JPH11278663A - Magnetic screw conveyor - Google Patents

Abstract

(57) [Problem] To provide a compact magnetic screw conveying device. SOLUTION: The magnetic screw conveying device 1 of the present invention comprises a casing 3
A seal pipe 4 made of a non-magnetic material, which is hermetically fixed at a penetrating portion of the wall surface of the housing 3, and penetrates the housing 3 through the seal pipe 4, and is rotatably supported outside the housing 3. The rotating shaft 6, a male magnetic screw 21 provided on the rotating shaft 6 in the seal pipe 4, a motor 12 connected to the rotating shaft 6, and the casing 3 so as to be parallel to the seal pipe 4.
The slide rail 14 provided in the inside and the male magnetic screw 21
Female screw 26 corresponding to the slide rail 14
And a slider 15 provided to be slidable with respect to.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic screw conveying device for operating a slider in a housing, which is isolated from the outside, by a power transmitting means using a magnetic screw from outside.

[0002]

2. Description of the Related Art Conventionally, for example, various types of transfer devices have been used to operate a transferred object in a vacuum chamber from the atmosphere side, and an example using a magnetic coupling disclosed in Japanese Utility Model Laid-Open No. 18679/1991. Is mentioned. In this case, as shown in FIG. 6, a housing 53 is formed in which a pipe 52 is integrally connected to a vacuum chamber 51, and a shaft 54 is inserted from the pipe 52 into the vacuum chamber 51 via a bearing 55. A block 57 provided with a plurality of magnet plates 56 in a circumferential shape is fixed to a shaft 54 in the pipe 52. By rotating or axially moving the driving magnet 58 outside the pipe 52 with respect to such a block 57, the shaft 54 in the housing 53 is moved.
Is rotated or moved linearly in the axial direction.

[0003]

However, such a conventional transfer apparatus has a problem that the apparatus itself becomes large because the shaft 54 itself moves in the axial direction. Although not shown in the drawings, for example, the driving magnet 5
Driving means such as a cylinder is required to move 8 in the axial direction, which complicates the structure and also has a problem of increasing the size of the apparatus.

[0004] The present invention has been made to solve the above-mentioned problems, and has as its object to provide a compact magnetic screw conveying device.

[0005]

According to the present invention, there is provided a magnetic screw conveying device, comprising: a seal pipe made of a non-magnetic material which penetrates a casing and is hermetically fixed at a penetrating portion of a wall of the casing; A rotating shaft rotatably supported outside the housing, penetrating the housing, and a male magnetic screw provided on the rotating shaft in the seal pipe; a motor connected to the rotating shaft; A slide rail provided in the housing so as to be parallel to the seal pipe, and a slider provided with a female magnetic screw corresponding to the male magnetic screw and slidably provided on the slide rail. It is characterized by.

In such a magnetic screw conveying device, when the rotation shaft is rotated by the driving of the motor, and the male magnetic screw in the seal pipe is rotated, the female magnetic screw attracted to the male magnetic screw by the magnetic force. Since the screw cannot be rotated by the slider and cannot follow the rotation of the male magnetic screw, a thrust is generated in the movable axial direction of the slider. Therefore, the power from the motor outside the housing is transmitted from the male magnetic screw isolated by the seal pipe to the female magnetic screw in a non-contact state, and the linear motion of the slider provided inside the housing is operated. Therefore, on the drive side outside the housing, there is no operation in the axial direction due to only the rotation operation of the motor and the rotating shaft, so that a compact magnetic screw transport device can be provided without extra equipment in the axial direction.

Further, in the magnetic screw conveying device of the present invention, the male magnetic screw is divided in the seal pipe, and the rotary piece slidingly contacting the inner surface of the seal pipe between the divided male magnetic screws is provided on the rotary shaft. It is characterized by being fixed to. Therefore, even if the transport distance is long,
By connecting a plurality of divided male magnetic screws, it can be made long.In this case, the rotating shaft is bent by the suction force and its own weight of the female magnetic screws, but the seal is inserted by the rotating piece inserted in the middle. Since the male magnetic screw is directly supported on the seal pipe, it is prevented from being demagnetized by being supported by the pipe.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a magnetic screw conveying device according to the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing a magnetic screw transfer device provided in a vacuum chamber. The magnetic screw transfer device 1 is formed such that a housing 3 constituting a vacuum chamber is integrally fixed on a base 2 and can transfer an object to be transferred within the housing 3. The casing 3 has a seal pipe 4 made of a non-magnetic material passed over the inside thereof, and both ends of the seal pipe 4 are fixed to side walls so as to keep the casing 3 airtight. That is, as shown in FIG. 2, the seal pipe 4 uses the sealing flanges 5, 5 at the penetrating portions of the housing 3, and the sealing flanges 5, 5 are air-tight by brazing or welding, and can also be subjected to high vacuum. Secured to withstand. Therefore, a tunnel portion penetrated by the seal pipe 4 is formed in the vacuum of the housing 3.

A rod 6 having a male magnetic screw 21 is inserted into the seal pipe 4 and penetrates through the housing 3 and is rotatably supported outside. The rod 6 is divided in the axial direction as shown in FIG. 2 and connected coaxially as a single rod via a connecting rod 7. Then, between the divided rods 6, 6, a cylindrical rotary piece 8 made of resin is formed.
Is fitted and is in sliding contact with the inner peripheral surface of the inserted seal pipe 4. On the other hand, around the rods 6 and 6, a cylindrical magnet 2
2, 22 are fitted, and a male magnetic screw 21 spirally magnetized is formed on the outer peripheral surface such that N-pole magnetized bands 23N and S-pole magnetized bands 23S are alternately positioned as shown in FIG. Have been. The male magnetic screw 21 is disposed with a small gap (preferably 1 mm or less) from the seal pipe 4, is supported by the rotating piece 8, and is in a non-contact state with the seal pipe 4.

The rods 6, 6 penetrating the housing 3 through the seal pipe 4 are rotatably supported at both ends by bearings 10, 10 of brackets 9, 9 erected on the base 2. In addition, rotating pieces 11, 11 made of resin or the like are provided in sealing flanges 5, 5 provided in the penetrating portions of the housing 3.
Are fitted, and the rods 6, 6 penetrating the rotating pieces 11, 11 are slidably contacted in the rotating pieces 11, 11. One end of the rod 6 penetrates the bracket 9 and the drive motor 12 fixed to the opposite side of the bracket 9
Are coupled to each other by a coupling 13.

A seal pipe 4 is provided on the bottom of the housing 3.
A slide rail 14 is laid in parallel with the above. A slider 15 having a female magnetic screw 26 is slidably mounted on the slide rail 14. Here, FIG.
FIG. 2 is an external perspective view showing a slider 15. FIG.
3 is a diagram showing a cross section of the slider 15. FIG. Slider 1
Reference numeral 5 denotes a slide section 16 directly mounted on the slide rail 14 and a holder section 17 holding a female screw 26. The holder portion 17 includes a pair of left and right blocks 17a, 17a, and a semicircular groove formed on each joint surface is combined to form a through portion.

A semi-cylindrical magnet 27 is fitted in each of the grooves of the blocks 17a, 17a, and an N-pole magnetized band 28N and an S-pole magnetized band corresponding to the male magnetic screw 21 are provided on the inner peripheral surface thereof. A female magnetic screw 21 spirally magnetized is formed so that 28S are alternately positioned. In addition, each block 17
A semi-cylindrical seal cover 29 made of a non-magnetic material is attached to the surface of the semi-cylindrical female magnetic screw 26 formed on each of the a and 17a, and the outer edge of the seal cover 29 is welded to the block 17a. The female magnetic screw 26 is configured to be kept airtight. Each block 17a, 17a holding such a female magnetic screw 26 is shown in FIG.
As shown in (1), the slide part 16 is assembled by screwing it from above.

When the blocks 17a, 17a are integrally formed (see FIG. 3), the female magnetic screw 26 formed on the semi-cylindrical magnet 27 has a pair of magnets 27,2.
7, the N-pole magnetized band 28N and the S-pole magnetized band 28S are spirally connected so as to correspond to the male magnetic screw 21. On the other hand, the male magnetic screw 21 formed on the rods 6 and 6 with the rotary piece 8 interposed therebetween also has the N-pole magnetized band 23N and S
The pole magnetized band 23S is configured to be continuous in the axial direction so as to correspond to the female magnetic screw 26.

In the magnetic screw transport device having such a configuration, the transport operation is performed in the closed housing 3 as follows. The inside of the housing 3 is in a vacuumed working state,
It is in a state of being isolated from the outside of the housing 3. Then, when the drive motor 12 is started and the rotation of the motor shaft occurs, the rotation is transmitted to the rods 6 and 6 via the coupling 13. The rods 6, 6 are attached to the bracket 9,
9 supported by the bearings 10, 10 and rotated, and the rotating pieces 11, 11 of the sealing flanges 5, 5.
Slide inside.

When the rods 6 and 6 rotate, the integrally formed male magnetic screw 21 also rotates.
And a female magnetic screw 26 attracted by the magnetic force to generate a thrust. Male magnetic screw 21 and female magnetic screw 26
Means that the magnetized bands of different polarity spirally magnetized (23N and 28
S, 23S and 28N), and the female magnetic screw 2
6 is stopped by a slider 15. Then, when the male magnetic screw 21 rotates, the spiral state of the magnetized band attracting the non-rotating female magnetic screw 26 moves so as to be apparently shifted in the axial direction. Therefore, the female magnetic screw 26 is attracted in the direction of the displacement, and a thrust for moving the slider 15 is generated.

The slider 15 slides on the slide rail 14 by a thrust generated between the male magnetic screw 21 and the female magnetic screw 26. The thrust generated on the slider 15 is determined by the direction of rotation of the male magnetic screw 21, and the forward / reverse rotation of the drive motor 12 causes the slide rail 1 to rotate.
4 can be reciprocated. Therefore, the slider 15 in the housing 3 is moved in a predetermined direction by an operation outside the housing 3, and the transported object placed on the slider 15 is transported.

In the magnetic screw transport device 1 of the present embodiment as described above, the slider 15 that linearly moves is provided in the sealed housing 3 and does not move in the axial direction outside the housing 3, so that the device itself is compact. I was able to.
Further, in the magnetic screw transport device 1, the male magnetic screw 21 and the female magnetic screw 26 are used to enable non-contact power transmission, and the inside and outside of the housing 3 are completely shut off by wrapping the seal pipe 4 around the housing 3. The slider 15 could be operated in this state. Therefore, dust generation due to power transmission is eliminated, and the inside of the housing 3 can be kept clean.

In this embodiment, since the connecting rod 7 is provided with the rotating piece 8 so as to slide in the seal pipe 4, the male magnetic screw 21 slides on the seal pipe 4 to be demagnetized. Could be prevented. That is, the long male magnetic screw 21 may be deflected by its own weight or the attractive force of the magnetic force, and the cylindrical magnet 22 may come into contact with the seal pipe 4 to be demagnetized. A gap between the magnet and the cylindrical magnet 22 is secured, and demagnetization due to contact is avoided.

It should be noted that the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the female magnetic screw 26 is formed on the circumference by laminating a semi-cylindrical magnet, but as shown in FIG. 5, a semi-circular slider is provided on the slider 31 having a semi-circular groove. (The same components are denoted by the same reference numerals). In this case, the slider 31 sucks the male magnetic screw 21 in the seal pipe 4 only on one half surface, and the slider 31 slides in the housing 3 by the thrust generated as described above.
Move up. When the female magnetic screw is semicircular and the magnetic force is weak, a configuration in which a plurality of magnetic screws are arranged in parallel with one slider may be adopted. Further, for example, in the above-described embodiment, the magnetic screw transfer device used for the vacuum chamber is shown, but the slider is not filled in the sealed housing 3 but in a fixed housing provided with a seal pipe filled with water or the like. May be operated.

[0020]

According to the present invention, there is provided a seal pipe made of a non-magnetic material which penetrates the inside of a casing and is hermetically fixed at a penetrating portion of a wall of the casing, and a casing which penetrates the casing through the inside of the seal pipe to form an outer casing A rotary shaft rotatably supported by the above, a male magnetic screw provided on the rotary shaft in the seal pipe, a motor connected to the rotary shaft, and a slide provided in the housing so as to be parallel to the seal pipe. Since the rail and the female magnetic screw corresponding to the male magnetic screw are provided and the slider is slidably provided on the slide rail, it is possible to provide a compact magnetic screw transport device. Was.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of a magnetic screw transport device according to the present invention.

FIG. 2 is an enlarged sectional view of a male magnetic screw and the like.

FIG. 3 is an external perspective view showing a slider.

FIG. 4 is a diagram showing a cross section of a slider.

FIG. 5 is a cross-sectional view showing another embodiment of the magnetic screw transport device according to the present invention.

FIG. 6 is a view showing a conventional transport device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Magnetic screw conveyance apparatus 3 Housing 4 Seal pipe 5 Sealing flange 6 Rod 8 Rotating piece 12 Drive motor 14 Slide rail 15 Slider 21 Male magnetic screw 26 Female magnetic screw

Claims (2)

[Claims] 1. A seal pipe made of a non-magnetic material that penetrates through a casing and is hermetically fixed at a penetrating portion of a wall surface of the casing, and penetrates the casing through the seal pipe and extends outside the casing. A rotating shaft rotatably supported; a male magnetic screw provided on the rotating shaft in the seal pipe; a motor connected to the rotating shaft; and a motor provided in the housing so as to be parallel to the seal pipe. A magnetic screw transport device comprising: a slide rail provided; and a female magnetic screw corresponding to the male magnetic screw, and a slider slidably provided on the slide rail. 2. The magnetic screw conveying device according to claim 1, wherein the male magnetic screw is divided in the seal pipe, and a rotating piece slidingly contacting the inner surface of the seal pipe between the divided male magnetic screws. A magnetic screw conveying device fixed to the rotating shaft.