JPH11344455A - X-ray fluorescence X-ray analysis method for sample mask, sample holder and slag - Google Patents

X-ray fluorescence X-ray analysis method for sample mask, sample holder and slag

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Publication number
JPH11344455A
JPH11344455A JP10154097A JP15409798A JPH11344455A JP H11344455 A JPH11344455 A JP H11344455A JP 10154097 A JP10154097 A JP 10154097A JP 15409798 A JP15409798 A JP 15409798A JP H11344455 A JPH11344455 A JP H11344455A
Authority
JP
Japan
Prior art keywords
sample
slag
analysis
ray fluorescence
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10154097A
Other languages
Japanese (ja)
Other versions
JP3628516B2 (en
Inventor
Noriko Makiishi
規子 槇石
Akira Yamamoto
山本  公
Hideo Maruyama
秀雄 圓山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Rigaku Corp
Original Assignee
Rigaku Industrial Corp
Kawasaki Steel Corp
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Filing date
Publication date
Application filed by Rigaku Industrial Corp, Kawasaki Steel Corp filed Critical Rigaku Industrial Corp
Priority to JP15409798A priority Critical patent/JP3628516B2/en
Publication of JPH11344455A publication Critical patent/JPH11344455A/en
Application granted granted Critical
Publication of JP3628516B2 publication Critical patent/JP3628516B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

(57)【要約】 【課題】 固体試料片を直接蛍光X線分析を行う際に、
試料表面の凹凸による分析精度の低下を防止することが
可能な蛍光X線分析用試料マスク、試料ホルダ、およ
び、スラグの蛍光X線分析方法の提供。 【解決手段】 一次X線照射用かつ特性X線取り出し用
の開口部6を有する蛍光X線分析用試料マスク2であっ
て、試料マスク2の試料と相対する面上に、開口部6を
囲む突部4を設けた試料マスク、該試料マスクを用いた
試料ホルダ、および、溶融スラグを角柱状サンプラーま
たは板状サンプラーの周面に付着せしめ急冷固化後剥離
し、得られたスラグ試料片の平滑な分析面を前記した試
料マスク2の突部4に当接せしめ、蛍光X線分析を行う
スラグの蛍光X線分析方法。
(57) [Summary] [PROBLEMS] To directly perform X-ray fluorescence analysis on a solid sample piece,
Provided are a sample mask for X-ray fluorescence analysis, a sample holder, and a method of X-ray fluorescence analysis of slag, which can prevent a decrease in analysis accuracy due to irregularities on the sample surface. SOLUTION: This is a fluorescent X-ray analysis sample mask 2 having an opening 6 for irradiating primary X-rays and extracting characteristic X-rays, and surrounds the opening 6 on a surface of the sample mask 2 facing the sample. A sample mask provided with the projection 4, a sample holder using the sample mask, and a molten slag are adhered to the peripheral surface of a prismatic sampler or a plate-like sampler, quenched and solidified, and then peeled off. A slag X-ray fluorescence analysis method in which a simple analysis surface is brought into contact with the projection 4 of the sample mask 2 and X-ray fluorescence analysis is performed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、固体試料片を直接
蛍光X線分析を行う際に、試料表面の凹凸による分析精
度の低下を防止することが可能な蛍光X線分析用試料マ
スク、試料ホルダに関する。さらに、本発明は、鉄鋼の
精錬工程、銑鉄の製造工程において、鋼や銑鉄の組成を
制御するために重要な働きを示すスラグを迅速に分析
し、得られた分析結果に基づき、オンラインで操業の指
針を与えることが可能なスラグの蛍光X線分析方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample mask and a sample for X-ray fluorescence analysis, which are capable of preventing a decrease in analysis accuracy due to unevenness of the sample surface when directly performing X-ray fluorescence analysis on a solid sample piece. Regarding the holder. Furthermore, the present invention quickly analyzes slag that plays an important role in controlling the composition of steel and pig iron in the steel refining process and pig iron manufacturing process, and operates online based on the obtained analysis results. The present invention relates to a method for X-ray fluorescence analysis of slag which can provide the guidelines described in the above.

【0002】[0002]

【従来の技術】通常、スラグの分析には、多元素を同時
に精度良く分析することが可能なガラスビード蛍光X線
分析法が用いられる。この方法は、粉砕したスラグ約0.
3 〜0.5gを、ほう酸ナトリウムなどの融剤約5g を用い
て融解し、均質なガラス状の試料を調製して蛍光X線分
析を行う方法である。
2. Description of the Related Art Generally, glass bead fluorescent X-ray analysis, which can simultaneously analyze multiple elements with high accuracy, is used for slag analysis. This method uses a crushed slag of about 0.
In this method, 3-0.5 g is melted using about 5 g of a flux such as sodium borate, and a homogeneous glassy sample is prepared for X-ray fluorescence analysis.

【0003】この方法は、試料が融解によって均質な状
態になっていること、融剤で希釈されているため、蛍光
X線分析における共存元素の影響が小さいことなどの理
由で分析精度が優れている。しかし、粉砕、秤量、融解
の作業に、通常は少なくとも30分を要し、分析時間の点
で問題がある。
[0003] In this method, the analysis accuracy is excellent because the sample is homogenized by melting and is diluted with a flux, so that the influence of coexisting elements in the fluorescent X-ray analysis is small. I have. However, the operations of grinding, weighing, and melting usually require at least 30 minutes, which is problematic in terms of analysis time.

【0004】一方、迅速性、簡便性を要求される場合に
は、ブリケット法が用いられる場合がある。この方法
は、スラグを粉砕した後、直接または容器に入れて加圧
成型し、得られた成型体すなわちブリケットを蛍光X線
分析に供するものである。この方法は、秤量や融解の作
業がないため、ガラスビード法に比べると分析時間は短
いが、粉砕時に容器の共洗いなどを行うため、少なくと
も25〜30分を要する。
On the other hand, when quickness and simplicity are required, the briquetting method may be used. In this method, after slag is crushed, it is subjected to pressure molding directly or in a container, and the obtained molded body, ie, briquette, is subjected to X-ray fluorescence analysis. This method has a shorter analysis time than the glass bead method because there is no work of weighing and melting, but it requires at least 25 to 30 minutes to wash the container together at the time of pulverization.

【0005】また、上記したガラスビード法やブリケッ
ト法は、効率に優れた自動化システムとして組み上げた
としても、分析時間を20分以下にするのは困難である
(小倉ら、NKK技報、No.128、p49(1989) 参照)。こ
のため、特開平9−166589号公報において、分析時間を
短縮することを目的として、採取した試料そのものを蛍
光X線分析する方法が開示されている。
Further, even if the above-mentioned glass bead method or briquette method is set up as an efficient automatic system, it is difficult to reduce the analysis time to 20 minutes or less (Kokura et al., NKK Technical Report, No. 128, p. 49 (1989)). For this reason, Japanese Patent Application Laid-Open No. 9-166589 discloses a method of performing X-ray fluorescence analysis of a collected sample itself for the purpose of shortening the analysis time.

【0006】上記した方法は、溶融鉄鋼の溶融スラグ層
に直径10mmの円より大きな平坦面を有するサンプラーを
挿入し、スラグを平坦面に付着させ、サンプラーをスラ
グ層から引き上げ、固化したスラグを剥離し、平坦面に
付着していたスラグを用い、サンプラーと接触した側と
反対側の面にX線を照射し蛍光X線分析を行うものであ
る。
[0006] In the above method, a sampler having a flat surface larger than a circle having a diameter of 10 mm is inserted into a molten slag layer of molten steel, the slag is attached to the flat surface, the sampler is pulled up from the slag layer, and the solidified slag is separated. Then, the slag adhered to the flat surface is used to irradiate X-rays on the surface opposite to the side in contact with the sampler to perform fluorescent X-ray analysis.

【0007】しかし、この方法では、スラグが冷却固化
する過程において、スラグ中の酸化物の凝固温度の違い
により、付着したスラグの厚さ方向で成分の分布が生じ
る。特に、最後に固化するスラグ試料表面、すなわちサ
ンプラーと接触する側と反対側の試料表面ではその影響
が著しい。したがって、この面を分析するとスラグの平
均組成とは大きく異なった分析値となってしまう。
However, in this method, in the process of cooling and solidifying the slag, a component distribution occurs in the thickness direction of the attached slag due to the difference in the solidification temperature of the oxide in the slag. In particular, the effect is remarkable on the surface of the slag sample which solidifies last, that is, the sample surface opposite to the side in contact with the sampler. Therefore, when this surface is analyzed, the analysis value is significantly different from the average composition of the slag.

【0008】また、一般に、鉄鋼の精錬工程、銑鉄の製
造工程においては、操業時に湯面は変動し、スラグは鋼
や銑鉄と混在すること、さらに鋼種あるいは時系列的な
操業状況によってスラグの粘性が変化するため、この方
法では必ずしも平坦な測定面を得ることができず、分析
精度の低下を招く。このような問題から、前記公報に開
示された技術は実用的でなく、スラグ分析は、前記した
ガラスビード法またはブリケット法で行われるのが一般
的である。
In general, in the steel refining process and the pig iron manufacturing process, the molten metal level fluctuates during operation, and slag is mixed with steel or pig iron, and the viscosity of the slag depends on the type of steel or time-series operation conditions. , The flat measurement surface cannot always be obtained by this method, and the analysis accuracy is lowered. Due to such a problem, the technology disclosed in the above publication is not practical, and slag analysis is generally performed by the above-described glass bead method or briquette method.

【0009】以上述べたように、スラグの分析にはガラ
スビード法あるいはブリケット法を用いた蛍光X線分析
法が利用されているが、両者ともに試料調製に時間を要
し、少なくとも25〜30分は必要な分析方法のため、鉄鋼
の精錬中に分析結果を得ることは困難である。また冷却
固化したスラグ試料のサンプラーとの非接触面を直接分
析する方法も上記理由により十分な精度を得ることがで
きない。
As described above, the analysis of slag is carried out by the glass bead method or the fluorescent X-ray analysis method using the briquette method. Both methods require time for sample preparation, and are at least 25 to 30 minutes. Because of the required analytical methods, it is difficult to obtain analytical results during steel refining. Also, the method of directly analyzing the non-contact surface of the cooled and solidified slag sample with the sampler cannot obtain sufficient accuracy for the above-described reason.

【0010】しかし、鉄鋼の精錬工程においては、スラ
グの組成の変化は鋼自体の組成の制御に大きな影響を与
えるため、その組成を精錬中に知ることができれば、操
業の条件制御に大きく貢献できる。また、銑鉄の製造工
程においても、短時間にスラグの組成を分析することが
可能であれば、より迅速に高炉の制御を行うことがで
き、操業の安定化に寄与することが期待できる。
However, in the steel refining process, changes in the composition of slag have a great effect on the control of the composition of the steel itself. Therefore, if the composition of the slag can be known during refining, it can greatly contribute to the control of operating conditions. . Also, in the pig iron production process, if it is possible to analyze the composition of slag in a short time, it is possible to control the blast furnace more quickly, and it can be expected to contribute to stabilization of operation.

【0011】以上のことから、本発明者らは、前記した
従来技術の問題点を解決し、鉄鋼の精錬工程、銑鉄の製
造工程において、スラグを迅速に分析し、得られた分析
結果に基づき、オンラインで操業の指針を与えることが
可能なように、製造現場で数分以内にスラグ組成を精度
よく、しかも簡便に分析することが可能な蛍光X線分析
用スラグサンプルの調製方法および調製装置を提案した
(特願平10− 57460号) 。
From the above, the present inventors have solved the above-mentioned problems of the prior art, and analyzed slag quickly in the steel refining process and the pig iron manufacturing process, and based on the obtained analysis results. A method and apparatus for preparing a slag sample for X-ray fluorescence analysis capable of accurately and easily analyzing the slag composition within a few minutes at a manufacturing site so as to provide an operation guideline online (Japanese Patent Application No. 10-57460).

【0012】この技術は、角柱状あるいは棒状のサンプ
ラーを溶融スラグ中に浸漬し、サンプラーの周面に溶融
スラグを付着させた後、サンプラーを引き上げ、固化し
たスラグを剥離し、スラグのサンプラーとの接触面を蛍
光X線分析することによりスラグの迅速分析を可能にす
るもので、この方法、装置によれば、粉砕などの試料調
製が不要で、また偏析の影響も殆どなく数分でスラグ組
成を分析できる。
In this technique, a prismatic or rod-shaped sampler is immersed in a molten slag, the molten slag is attached to the peripheral surface of the sampler, the sampler is pulled up, the solidified slag is separated, and the slag is mixed with the sampler. This method enables rapid analysis of slag by fluorescent X-ray analysis of the contact surface. According to this method and apparatus, sample preparation such as pulverization is not required, and slag composition is reduced in a few minutes with almost no influence of segregation. Can be analyzed.

【0013】しかし、上記技術を適用する場合、スラグ
試料片の蛍光X線分析用試料ホルダへのセッティング方
法において改善すべき余地が残されていた。一般的に、
蛍光X線分析法では、平滑な試料ホルダーのマスク部に
試料を接触させてセッティングする。角柱状のサンプラ
ーで採取したスラグ試料片は平滑な分析面を有している
が、溶融スラグを、角柱の周面に付着固化させ、剥離し
た不定形の片状物を使用するため、角柱の角の部分に起
因してスラグ試料片の分析面側に突起部が生じることが
ある。
However, when the above technique is applied, there is room for improvement in a method of setting a slag specimen to a specimen holder for X-ray fluorescence analysis. Typically,
In the fluorescent X-ray analysis method, the sample is set by contacting the sample with a mask portion of a smooth sample holder. The slag sample piece collected by the prism-shaped sampler has a smooth analytical surface, but the molten slag is adhered and solidified on the peripheral surface of the prism, and the peeled amorphous flakes are used. A projection may be formed on the analysis surface side of the slag sample piece due to the corner portion.

【0014】この突起部が生じると、上記した平滑な試
料マスクに分析面を当てた場合、マスクにはその突起部
が接触し、分析すべき面が正常な位置からずれてしま
い、X線強度を変化させ分析誤差を生じさせるという問
題がある。一方、鉄鋼の精錬工程、銑鉄の製造工程の操
業において分析は迅速性が要求されるため、その突起部
を除去するために研磨などの作業を行うことは好ましく
ない。
When the projections are formed, when the analysis surface is brought into contact with the above-mentioned smooth sample mask, the projections come into contact with the mask, and the surface to be analyzed is shifted from a normal position. To cause an analysis error. On the other hand, in the operation of the iron and steel refining process and the pig iron manufacturing process, quick analysis is required, so that it is not preferable to perform operations such as polishing to remove the protrusions.

【0015】また、波長分散型の蛍光X線分析装置を使
用する場合、分析面からの情報を平均化し、分析面に少
々の凹凸があっても、その影響を受けないように試料を
回転させて分析することが必須であるが、突起部の多い
不定形のスラグ試料片を試料ホルダに載置しただけでは
ホルダーと試料は点で接触しているだけであり、回転時
に動く可能性がある。
When a wavelength-dispersive X-ray fluorescence spectrometer is used, information from the analysis surface is averaged, and the sample is rotated so that even if the analysis surface has a small amount of irregularities, it is not affected by the unevenness. It is essential to perform analysis by using a sample, but simply placing an irregularly shaped slag sample with many protrusions on the sample holder only contacts the holder and the sample at a point and may move during rotation. .

【0016】試料が動いた場合には分析値の誤差となる
ばかりでなく、マスクの孔から試料の一部が突出するこ
とも考えられ、最悪の場合、装置内のシャッターなどに
挟まる可能性もある。以上述べたように、角柱状のサン
プラーで採取したスラグ試料片を直接蛍光X線分析する
場合、試料調製を全く不要とするためには、平滑な分析
面の周囲の凹凸による問題点を解決する必要があった。
If the sample moves, not only will an analysis value error occur, but also a part of the sample may protrude from the hole of the mask. In the worst case, the sample may be caught by a shutter or the like in the apparatus. is there. As described above, when directly subjecting a slag sample piece collected by a prismatic sampler to X-ray fluorescence analysis, in order to eliminate the need for sample preparation, the problem due to unevenness around the smooth analysis surface is solved. Needed.

【0017】さらに、上記したスラグ試料片に限らず、
金属試料などの試料を直接蛍光X線分析で分析する場
合、分析面を平らに研摩する必要があり、研摩すべき面
積が最小となる分析方法が見出されれば試料調製に要す
る時間を削減できる。
Furthermore, the present invention is not limited to the slag specimen described above.
When a sample such as a metal sample is directly analyzed by X-ray fluorescence analysis, the analysis surface needs to be polished flat, and if an analysis method that minimizes the area to be polished is found, the time required for sample preparation can be reduced.

【0018】[0018]

【発明が解決しようとする課題】本発明は、前記した従
来技術の問題点を解決し、固体試料片を直接蛍光X線分
析を行う際に、試料表面の凹凸による分析精度の低下を
防止することが可能な蛍光X線分析用試料マスク、試料
ホルダを提供することを目的とする。さらに、本発明
は、鉄鋼の精錬工程、銑鉄の製造工程において、鋼や銑
鉄の組成を制御するために重要な働きを示すスラグを迅
速に分析し、得られた分析結果に基づき、オンラインで
操業の指針を与えることが可能なスラグの蛍光X線分析
方法を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, and prevents a decrease in analysis accuracy due to irregularities on the sample surface when directly performing X-ray fluorescence analysis on a solid sample piece. An object of the present invention is to provide a sample mask and a sample holder for fluorescent X-ray analysis, which are capable of performing the analysis. Furthermore, the present invention quickly analyzes slag that plays an important role in controlling the composition of steel and pig iron in the steel refining process and pig iron manufacturing process, and operates online based on the obtained analysis results. It is an object of the present invention to provide a method of X-ray fluorescence analysis of slag which can provide the guidelines of the above.

【0019】[0019]

【課題を解決するための手段】第1の発明は、一次X線
照射用かつ特性X線取り出し用の開口部6を有する蛍光
X線分析用試料マスク2であって、該試料マスク2の試
料と相対する面上に、前記開口部6を囲む突部4を設け
たことを特徴とする蛍光X線分析用試料マスクである。
A first invention is a sample mask 2 for X-ray fluorescence analysis having an opening 6 for irradiating primary X-rays and extracting characteristic X-rays. A sample mask for X-ray fluorescence analysis, wherein a projection 4 surrounding the opening 6 is provided on a surface opposite to the above.

【0020】第2の発明は、一次X線照射用かつ特性X
線取り出し用の開口部6を有する蛍光X線分析用試料マ
スク2と該試料マスク2に試料を押圧、固定する試料押
さえ治具3を有する蛍光X線分析用試料ホルダ1であっ
て、前記試料マスク2の試料と相対する面上に、前記開
口部6を囲む突部4を設けたことを特徴とする蛍光X線
分析用試料ホルダである。
A second aspect of the present invention is directed to a primary X-ray
A fluorescent X-ray analysis sample mask 1 having an X-ray extraction opening 6 and a sample X-ray analysis sample holder 1 having a sample holding jig 3 for pressing and fixing the sample on the sample mask 2; A sample holder for X-ray fluorescence analysis, wherein a projection 4 surrounding the opening 6 is provided on a surface of the mask 2 facing the sample.

【0021】前記した第1の発明、第2の発明において
は、前記開口部6を囲む突部4が、試料の平滑面と3点
以上の箇所で接触する突部であることが好ましい。これ
は、前記突部4が3点以上の箇所で試料の平滑面と接触
することによって、基本的に、試料の平滑面(分析面)
を蛍光X線分析の基準の位置〔:基準面(強度較正位
置〕にセットすることが可能となるためである。
In the first and second aspects of the present invention, it is preferable that the projection 4 surrounding the opening 6 is a projection that contacts the smooth surface of the sample at three or more points. This is because the protrusion 4 comes into contact with the smooth surface of the sample at three or more points, and thus the smooth surface (analytical surface) of the sample is basically obtained.
Can be set at the reference position [: reference plane (intensity calibration position)] of the fluorescent X-ray analysis.

【0022】また、前記した第1の発明、第2の発明に
おいては、前記開口部6を囲む突部4が、試料の平滑面
と3点以上の箇所で接触する高さが等しい突部であるこ
とが好ましい。これは、高さが等しい3点以上の箇所で
試料の平滑面と接触することによって、試料の平滑面
(分析面)を蛍光X線分析の基準の位置〔:基準面(強
度較正位置〕にセットすることがより容易になるためで
ある。
In the first and second aspects of the present invention, the protrusion 4 surrounding the opening 6 is a protrusion having the same height at three or more points in contact with the smooth surface of the sample. Preferably, there is. This is because the sample is brought into contact with the smooth surface of the sample at three or more points having the same height, so that the smooth surface (analysis surface) of the sample is moved to the reference position [: reference surface (intensity calibration position)] for X-ray fluorescence analysis. This is because it is easier to set.

【0023】また、前記開口部6を囲む突部4は、試料
の平滑面と連続して接触する連続した突部であってもよ
い。前記した第2の発明においては、前記試料押さえ治
具3の試料接触部が弾性体で形成されることが好ましい
(第2の発明の好適態様)。第3の発明は、前記した第
1の発明の蛍光X線分析用試料マスクを用いたスラグの
蛍光X線分析方法であって、溶融スラグを角柱状サンプ
ラーまたは板状サンプラーの周面に付着せしめ急冷固化
後剥離し、得られたスラグ試料片の平滑な分析面を前記
試料マスク2の突部4に当接せしめ、蛍光X線分析を行
うことを特徴とするスラグの蛍光X線分析方法である。
The projection 4 surrounding the opening 6 may be a continuous projection continuously contacting the smooth surface of the sample. In the above-described second invention, it is preferable that the sample contact portion of the sample holding jig 3 is formed of an elastic body (a preferred embodiment of the second invention). According to a third aspect of the present invention, there is provided a method of X-ray fluorescence analysis of slag using the sample mask for X-ray fluorescence analysis according to the first aspect of the invention, wherein the molten slag is attached to a peripheral surface of a prismatic sampler or a plate-like sampler. A slag fluorescent X-ray analysis method characterized in that the slag is separated after quenching and solidification, and a smooth analysis surface of the obtained slag sample piece is brought into contact with the projection 4 of the sample mask 2 and X-ray fluorescence analysis is performed. is there.

【0024】第4の発明は、前記した第2の発明または
第2の発明の好適態様の蛍光X線分析用試料ホルダを用
いたスラグの蛍光X線分析方法であって、溶融スラグを
角柱状サンプラーまたは板状サンプラーの周面に付着せ
しめ急冷固化後剥離し、得られたスラグ試料片の平滑な
分析面を前記試料マスク2の突部4に当接せしめると共
に、該スラグ試料片を前記試料押さえ治具3で押圧、固
定した後、該試料ホルダ1を用いて蛍光X線分析を行う
ことを特徴とするスラグの蛍光X線分析方法である。
According to a fourth aspect of the present invention, there is provided a method for X-ray fluorescence analysis of slag using the sample holder for X-ray fluorescence analysis according to the second aspect of the present invention or the preferred embodiment of the second aspect, wherein the molten slag is formed into a prismatic shape. The sample is adhered to the peripheral surface of a sampler or a plate-like sampler, quenched, solidified, and peeled off, and the smooth analysis surface of the obtained slag sample piece is brought into contact with the projection 4 of the sample mask 2, and the slag sample piece is put into the sample. A slag X-ray fluorescence analysis method characterized by performing X-ray fluorescence analysis using the sample holder 1 after pressing and fixing with a holding jig 3.

【0025】前記した第3の発明、第4の発明において
は、前記した蛍光X線分析方法が、下面照射方式の蛍光
X線分析方法であることが好ましい(第3の発明の好適
態様、第4の発明の好適態様)。なお、上記した下面照
射方式の蛍光X線分析方法とは、一次X線を試料の下側
から照射して分析する方式を示す。
In the third and fourth aspects of the present invention, it is preferable that the X-ray fluorescence analysis method is a bottom-side irradiation type X-ray fluorescence analysis method. Preferred Embodiment 4 of the Invention). In addition, the above-mentioned bottom surface irradiation type fluorescent X-ray analysis method refers to a method of irradiating primary X-rays from below the sample and analyzing.

【0026】上記した方式においては、試料は、重力ま
たは重力および試料押さえ治具の両者によって、試料の
下方に配置された試料マスクに押付けられ、基準位置に
固定される。
In the above-described method, the sample is pressed against the sample mask disposed below the sample by gravity or both the gravity and the sample holding jig, and is fixed at the reference position.

【0027】[0027]

【発明の実施の形態】以下、本発明をさらに詳細に説明
する。図1に、本発明の蛍光X線分析用試料マスクの一
例を、平面図(a) およびA−A部断面図(b) によって示
す。また、図2に、本発明の蛍光X線分析用試料ホルダ
の試料押さえ治具の一例を、平面図(a) およびB−B部
断面図(b) によって示す。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in more detail. FIG. 1 shows an example of a sample mask for X-ray fluorescence analysis of the present invention by a plan view (a) and a cross-sectional view taken along the line AA (b). FIG. 2 shows an example of a sample holding jig of the sample holder for X-ray fluorescence analysis of the present invention by a plan view (a) and a sectional view taken along the line BB (b).

【0028】また、図3に、スラグ試料片をセット、固
定した状態における本発明の蛍光X線分析用試料マス
ク、試料ホルダの一例を断面図によって示す。図1〜図
3において、1は蛍光X線分析用試料ホルダ(以下試料
ホルダとも記す)、2は蛍光X線分析用試料マスク(以
下試料マスクとも記す)、3は試料押さえ治具、4は突
部、5はバネなどの弾性体、6は試料マスク2の開口
部、7はスラグ試料片、7aはスラグ試料片の分析面、7b
はスラグ試料片の突起、7cはスラグ試料片の分析面と反
対側の試料面、8は試料マスク2の試料と相対する面、
9はビスを示す。
FIG. 3 is a sectional view showing an example of a sample mask and a sample holder for fluorescent X-ray analysis of the present invention in a state where a slag sample piece is set and fixed. 1 to 3, reference numeral 1 denotes a sample holder for X-ray fluorescence analysis (hereinafter also referred to as a sample holder), 2 denotes a sample mask for X-ray fluorescence analysis (hereinafter also referred to as a sample mask), 3 denotes a sample holding jig, and 4 denotes a sample holding jig. Protrusions, 5 an elastic body such as a spring, 6 an opening of the sample mask 2, 7 a slag sample piece, 7a an analysis surface of the slag sample piece, 7b
Is a projection of the slag sample piece, 7c is a sample surface opposite to the analysis surface of the slag sample piece, 8 is a surface of the sample mask 2 facing the sample,
9 denotes a screw.

【0029】なお、突部4は、試料マスク2の試料と相
対する面8上に設けられ、かつ試料マスク2の開口部6
の周縁を囲む高さが等しい突部であり、図1〜図3に例
示した試料マスク2の場合、該突部4は、図示するよう
に、試料の分析面7aの周縁面である平滑面と連続して接
触(:当接)する連続した突部である。図1、図3に例
示したように、第1の発明は、一次X線照射用かつ特性
X線取り出し用の開口部6を有する蛍光X線分析用試料
マスク2であって、該試料マスク2の試料と相対する面
上に、前記開口部6を囲む突部4を設けた蛍光X線分析
用試料マスクである。
The projection 4 is provided on a surface 8 of the sample mask 2 facing the sample, and the opening 6 of the sample mask 2 is provided.
In the case of the sample mask 2 illustrated in FIGS. 1 to 3, the protrusion 4 has a smooth surface which is a peripheral surface of the analysis surface 7a of the sample, as shown in FIG. Is a continuous protrusion that is in continuous contact with (: abuts). As illustrated in FIGS. 1 and 3, the first invention is a sample mask 2 for X-ray fluorescence analysis having an opening 6 for irradiating primary X-rays and extracting characteristic X-rays. This is a fluorescent X-ray analysis sample mask provided with a projection 4 surrounding the opening 6 on a surface facing the sample.

【0030】また、図1〜図3に例示したように、第2
の発明は、一次X線照射用かつ特性X線取り出し用の開
口部6を有する蛍光X線分析用試料マスク2と該試料マ
スク2に試料を押圧、固定する試料押さえ治具3を有す
る蛍光X線分析用試料ホルダ1であって、前記試料マス
ク2の試料と相対する面上に、前記開口部6を囲む突部
4を設けた蛍光X線分析用試料ホルダである。
Further, as exemplified in FIGS.
The invention provides a fluorescent X-ray analysis sample mask 2 having an opening 6 for primary X-ray irradiation and characteristic X-ray extraction, and a fluorescent X-ray having a sample holding jig 3 for pressing and fixing a sample on the sample mask 2. A sample holder 1 for X-ray analysis, which is a sample holder for X-ray fluorescence analysis provided with a projection 4 surrounding the opening 6 on a surface of the sample mask 2 facing the sample.

【0031】前記した第1の発明、第2の発明によれ
ば、分析部周囲の突部でのみ位置決めがされるため、ス
ラグ試料片周辺部が分析面側に突起部を有していても、
試料マスク2の試料と相対する面に例えば高さが数mmの
突部4を設けることによって、試料がホルダ部に接触す
る危険が大きく軽減され、スラグの突起部を研磨などで
除去せずとも分析面を基準の位置にセットすることが可
能である。
According to the first and second aspects of the present invention, since positioning is performed only at the protrusion around the analysis section, even if the peripheral portion of the slag sample piece has a protrusion on the analysis surface side. ,
By providing a projection 4 having a height of several mm, for example, on the surface of the sample mask 2 facing the sample, the danger of the sample coming into contact with the holder is greatly reduced, and the projection of the slag can be removed without polishing or the like. It is possible to set the analysis surface at a reference position.

【0032】なお、試料マスク2の開口部6周縁を囲む
突部4が蛍光X線分析装置の焦点位置になるべく近い方
がX線強度の減衰もなく、精度よく分析が可能である。
また、前記した第2の発明の好適態様は、スラグ試料片
7など試料片の非分析面(:分析面の反対側の試料面)
を、バネやゴムなどの弾力性のある部材である弾性体5
を介して軽く押さえつけることによって試料片を固定
し、試料ホルダを回転させたり、移動させたりする場合
にも位置ずれがおきないようにするものである。
The closer the projection 4 surrounding the periphery of the opening 6 of the sample mask 2 to the focal position of the fluorescent X-ray analyzer, the more accurate the analysis can be made without attenuation of the X-ray intensity.
In a preferred aspect of the second invention, the non-analytical surface of the sample such as the slag sample 7 (the sample surface opposite to the analytical surface) is used.
Is an elastic member 5 which is an elastic member such as a spring or rubber.
The sample piece is fixed by lightly pressing through the, so that the sample holder is not shifted even when the sample holder is rotated or moved.

【0033】第3の発明は、前記した第1の発明の蛍光
X線分析用試料マスクを用いたスラグの蛍光X線分析方
法であって、溶融スラグを角柱状サンプラーまたは板状
サンプラーの周面に付着せしめ急冷固化後剥離し、得ら
れたスラグ試料片の平滑な分析面を前記試料マスク2の
突部4に当接せしめ、蛍光X線分析を行うスラグの蛍光
X線分析方法である。
According to a third aspect of the present invention, there is provided a method of X-ray fluorescence analysis of slag using the sample mask for X-ray fluorescence analysis according to the first aspect of the present invention, wherein the molten slag is provided on a peripheral surface of a prismatic sampler or a plate-like sampler. This is an X-ray fluorescence X-ray analysis method for performing X-ray fluorescence analysis by bringing a smooth analysis surface of the obtained slag sample piece into contact with the protruding portion 4 of the sample mask 2 after quenching and solidifying the slag.

【0034】第4の発明は、前記した第2の発明または
第2の発明の好適態様の蛍光X線分析用試料ホルダを用
いたスラグの蛍光X線分析方法であって、溶融スラグを
角柱状サンプラーまたは板状サンプラーの周面に付着せ
しめ急冷固化後剥離し、得られたスラグ試料片の平滑な
分析面を前記試料マスク2の突部4に当接せしめると共
に、該スラグ試料片を前記試料押さえ治具3で押圧、固
定した後、該試料ホルダ1を用いて蛍光X線分析を行う
スラグの蛍光X線分析方法である。
According to a fourth aspect of the present invention, there is provided a method of X-ray fluorescence analysis of slag using the sample holder for X-ray fluorescence analysis according to the second aspect of the invention or a preferred embodiment of the second aspect of the invention, wherein the molten slag is formed in a prismatic shape. The sample is adhered to the peripheral surface of a sampler or a plate-like sampler, quenched, solidified, and peeled off, and the smooth analysis surface of the obtained slag sample piece is brought into contact with the projection 4 of the sample mask 2, and the slag sample piece is put into the sample. This is a slag X-ray fluorescence analysis method in which X-ray fluorescence analysis is performed using the sample holder 1 after being pressed and fixed by the holding jig 3.

【0035】前記した第3の発明、第4の発明において
は、前記した蛍光X線分析方法が、一次X線を試料の下
側から照射して分析する下面照射方式の蛍光X線分析方
法であることが好ましい(第3の発明の好適態様、第4
の発明の好適態様)。上記した方式においては、試料
は、重力によって、試料の下方に配置された試料マス
クに押付けられ、基準位置に固定されるか、または試
料の上方において試料と接触せしめた試料押さえ治具を
用い、重力および試料押さえ治具の両者によって、試料
の下方に配置された試料マスクに押付けられ、基準位置
に固定される。
In the third and fourth aspects of the present invention, the above-mentioned fluorescent X-ray analysis method is a fluorescent X-ray analysis method of a bottom-side irradiation type in which primary X-rays are irradiated from below the sample and analyzed. (Preferred embodiment of the third invention, fourth embodiment)
Preferred embodiment of the invention). In the method described above, the sample is pressed by gravity against a sample mask arranged below the sample and fixed at a reference position, or using a sample holding jig brought into contact with the sample above the sample, Both the gravity and the sample holding jig press the sample mask placed below the sample to fix it at the reference position.

【0036】前記した第1の発明〜第4の発明、第2の
発明の好適態様、第3の発明の好適態様、および第4の
発明の好適態様(以下これらの発明および好適態様を本
発明と総称する)においては試料の分析面は平滑な状態
であることが望ましい。本発明によれば、前記した蛍光
X線分析用試料マスクに試料を当接し、蛍光X線分析装
置へ挿入し、試料の分析面にX線を照射し、蛍光X線分
析を行うことによって、迅速かつ正確にスラグなどの試
料の組成を分析することが可能となった。
The above-described first to fourth inventions, preferred embodiments of the second invention, preferred embodiments of the third invention, and preferred embodiments of the fourth invention (these inventions and preferred embodiments will be referred to as the present invention hereinafter). (Collectively referred to as)), the analysis surface of the sample is desirably in a smooth state. According to the present invention, the sample is brought into contact with the sample mask for X-ray fluorescence analysis described above, inserted into an X-ray fluorescence analyzer, X-rays are irradiated on the analysis surface of the sample, and X-ray fluorescence analysis is performed. It has become possible to quickly and accurately analyze the composition of a sample such as slag.

【0037】次に、前記した本発明の蛍光X線分析用試
料マスク、試料ホルダの作用、効果を、図面に基づいて
説明する。図4は、従来の蛍光X線分析用試料マスクお
よび本発明の蛍光X線分析用試料マスクにスラグ試料片
を載置した時の、試料マスクおよびスラグ試料片の位置
関係を示す断面図である。
Next, the operation and effect of the sample mask and sample holder for X-ray fluorescence analysis of the present invention will be described with reference to the drawings. FIG. 4 is a cross-sectional view showing the positional relationship between the sample mask and the slag sample when the slag sample is placed on the conventional sample mask for X-ray fluorescence analysis and the sample mask for X-ray fluorescence analysis of the present invention. .

【0038】図4(a) は、従来の試料マスクを用いた場
合、図4(b) 、(c) は、本発明の試料マスクを用いた場
合、各々の、試料マスクおよびスラグ試料片の位置関係
を示す。なお、図4(c) において、10はOリングを示
し、その他の符号は図1と同様の内容を示す。
FIG. 4 (a) shows the case where the conventional sample mask is used, and FIGS. 4 (b) and 4 (c) show the case where the sample mask of the present invention is used. This shows the positional relationship. In FIG. 4C, reference numeral 10 denotes an O-ring, and other reference numerals indicate the same contents as in FIG.

【0039】図4(a) に示す従来の試料マスクを用いた
場合、スラグ試料片7の分析面7aが傾斜するため、蛍光
X線分析の基準面(強度較正位置)の設定が困難であ
る。これに対して、本発明の試料マスクを用いた図4
(b) の場合、スラグ試料片7の分析面7aは、スラグ試料
片7の端部に凸部があっても間隔dによって吸収される
ため、試料マスク2の基準面に常に正確に保持できる。
When the conventional sample mask shown in FIG. 4A is used, since the analysis surface 7a of the slag sample piece 7 is inclined, it is difficult to set a reference surface (intensity calibration position) for X-ray fluorescence analysis. . In contrast, FIG. 4 using the sample mask of the present invention.
In the case of (b), the analysis surface 7a of the slag sample piece 7 is absorbed by the distance d even if there is a convex portion at the end of the slag sample piece 7, so that it can always be accurately held on the reference surface of the sample mask 2. .

【0040】したがって、基準面を、図4(b) 、(c) の
新基準面位置として、ここで感度較正を行うことによっ
て、実際の試料において誤差を発生させることなく分析
することができる。また、図4(a) に示す従来の試料マ
スクを用いた場合、試料の回転時に試料が移動し、分析
面の平均的な組成を分析する上で問題があったが、本発
明の試料ホルダの好適態様である試料接触部に弾性体を
接触せしめる試料押さえ治具3を備えた試料ホルダを用
いることによって上記した従来技術の問題点を解決でき
る。
Therefore, the sensitivity can be calibrated here with the reference plane as the new reference plane position in FIGS. 4B and 4C, so that the analysis can be performed without causing an error in the actual sample. When the conventional sample mask shown in FIG. 4A is used, the sample moves when the sample is rotated, and there is a problem in analyzing the average composition of the analysis surface. By using the sample holder provided with the sample holding jig 3 for bringing the elastic body into contact with the sample contact portion, which is a preferred embodiment of the present invention, the above-mentioned problems of the prior art can be solved.

【0041】さらに、本発明の試料マスク、試料ホルダ
においては、図4(c) に示す突部4の先端と試料の平滑
面との間にOリングを挟むことによって、試料回転時の
試料の移動を完全に防止できる。また、材質が例えばゴ
ム、弾力を有する樹脂で構成された弾力を有するOリン
グを用い、下面照射方式の蛍光X線分析を行う場合、試
料押さえ治具3がなくとも、試料回転時の試料片の移動
(すべり)が防止でき、分析を行うことができる。
Further, in the sample mask and the sample holder of the present invention, an O-ring is interposed between the tip of the projection 4 and the smooth surface of the sample as shown in FIG. Movement can be completely prevented. Further, in the case where the fluorescent X-ray analysis of the lower surface irradiation method is performed by using an elastic O-ring made of, for example, rubber or elastic resin, the sample piece during rotation of the sample can be used without the sample holding jig 3. Movement (slip) can be prevented, and analysis can be performed.

【0042】前記したように、本発明においては、試料
の分析面は平滑な状態であることが望ましい。本発明の
スラグの蛍光X線分析方法におけるスラグ試料片を調製
する際の好適なスラグのサンプラーの一例を図5に示
す。図5(a) は角柱状のサンプラーの縦断面図を示し、
図5(b) は図5(a) C−C部の横断面図を示す。
As described above, in the present invention, the analysis surface of the sample is desirably smooth. FIG. 5 shows an example of a suitable slag sampler for preparing a slag sample in the slag X-ray fluorescence analysis method of the present invention. FIG. 5 (a) shows a longitudinal sectional view of a prismatic sampler,
FIG. 5B is a cross-sectional view taken along the line CC of FIG. 5A.

【0043】また、図5(a) 、(b) において、20は鉄、
ステンレス鋼など金属製の中空角柱、21はスラグ剥離
剤、22はモルタル、23は紙管を示す。なお、スラグ剥離
剤21は、冷却固化後のスラグと角柱との剥離をより容易
とするために予め角柱に塗布するものである。本発明の
スラグの蛍光X線分析方法においては、図5に例示した
角柱状のサンプラーを、所定長さだけ溶融スラグ中に浸
漬し、該サンプラーの周面に溶融スラグを付着せしめ、
スラグが冷却固化後、剥離し、分析に供する。
5 (a) and 5 (b), reference numeral 20 denotes iron,
A hollow prism made of metal such as stainless steel, 21 is a slag release agent, 22 is a mortar, and 23 is a paper tube. Note that the slag release agent 21 is applied to the prism in advance so that the slag after cooling and solidification can be more easily separated from the prism. In the method of X-ray fluorescence analysis of slag of the present invention, the prismatic sampler illustrated in FIG. 5 is immersed in the molten slag by a predetermined length, and the molten slag is attached to the peripheral surface of the sampler.
After the slag is cooled and solidified, it is peeled off and subjected to analysis.

【0044】また、スラグを分析する場合、角柱状のサ
ンプラーの代わりに、少なくとも溶融スラグの付着部が
板状のサンプラーを用い、上記と同様の方法で分析用試
料を調製し分析に供することも好ましい。上記の方法に
よれば、サンプラーとの接触面の全面が平滑な、蛍光X
線分析用の試料として好適な板状の試料も得られるが、
サンプラーの角の部分の形状が反映されてバリ状の突起
がスラグ試料片周囲に存在する試料も得られる。
In the case of analyzing slag, instead of a prismatic sampler, a sampler having at least a molten slag adhered portion may be used, and a sample for analysis may be prepared in the same manner as described above for analysis. preferable. According to the above-described method, the fluorescent X is smooth over the entire contact surface with the sampler.
Although a plate-like sample suitable as a sample for line analysis can also be obtained,
A sample in which burr-like projections are present around the slag sample piece by reflecting the shape of the corner portion of the sampler is also obtained.

【0045】この場合、最終的なスラグ試料片の形状
は、冷却固化後のスラグを剥離して初めて判明すること
が多い。この結果、スラグ試料片周囲にバリ状の突起が
形成された試料片を得、該スラグ試料片について分析を
行う場合、突起物を除去するために研磨などの作業を行
うことは、分析の迅速性の面から望ましくない。
In this case, the final shape of the slag specimen is often found only after the slag after cooling and solidification is peeled off. As a result, when a sample piece having burr-like protrusions formed around the slag sample piece is obtained and analysis is performed on the slag sample piece, performing operations such as polishing to remove the protrusions is a rapid analysis. It is not desirable from the aspect of sex.

【0046】本発明の蛍光X線分析用試料マスク、試料
ホルダは、試料の分析面側の周辺部にバリ状の突起部な
どの突起部が存在しても、平坦な面を所定の位置にセッ
トすることが可能な試料マスク、試料ホルダであり、10
〜30mmφ程度の分析領域用の穴に接近した部分に例えば
高さ数mmの位置決め用の突部4を設けるようにした。こ
の結果、分析時に、試料の全体の形状の影響を受けるこ
とが無く、その結果、後記の実施例に示すように試料の
正確な分析を行うことが可能となった。
The sample mask and sample holder for X-ray fluorescence analysis of the present invention have a flat surface at a predetermined position even if a projection such as a burr-like projection is present on the peripheral portion on the analysis surface side of the sample. 10 sample masks and sample holders that can be set
For example, a positioning protrusion 4 having a height of several mm is provided in a portion close to a hole for an analysis region of about 30 mmφ. As a result, at the time of analysis, the sample was not affected by the overall shape of the sample, and as a result, accurate analysis of the sample could be performed as shown in Examples described later.

【0047】また、波長分散型の蛍光X線分析装置で
は、分光器の方向性による誤差を軽減させるために、試
料の回転を行うことが一般的であるが、このような回転
や試料ホルダの移動によってホルダ上に載置させただけ
のスラグ片は滑る可能性が高い。このため、スラグ試料
片など試料片の分析面の反対側の試料面を、バネやゴム
などの弾力性のある部材である弾性体を介して軽く押さ
えつけることによって、スラグ試料片を固定し、試料ホ
ルダを回転させたり、移動させたりする場合にも位置ず
れがおきない構成とした。
In a wavelength-dispersive X-ray fluorescence spectrometer, the sample is generally rotated in order to reduce errors due to the directionality of the spectroscope. A slag piece just placed on the holder by the movement is likely to slip. For this reason, the slag sample piece is fixed by lightly pressing the sample surface, such as the slag sample piece, opposite to the analysis surface of the sample piece through an elastic body such as a spring or rubber, which is an elastic member. Even when the holder is rotated or moved, no misalignment occurs.

【0048】[0048]

【実施例】以下、本発明を実施例に基づいて具体的に説
明する。本発明の蛍光X線分析用試料マスク、試料ホル
ダおよび蛍光X線分析方法を用いて、鉄鋼の精錬工程に
おけるスラグの組成を分析した。すなわち、鉄鋼の精錬
工程における溶融スラグを、前記した図5に示す角柱状
サンプラーで採取し、冷却固化後に剥離して得られたス
ラグ試料片のサンプラーとの接触面について、前記した
図1〜図3に示す試料マスク、試料ホルダを用いて下面
照射方式で蛍光X線分析を行った。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below based on embodiments. Using the sample mask for X-ray fluorescence analysis, the sample holder, and the X-ray fluorescence analysis method of the present invention, the composition of slag in the refining process of steel was analyzed. That is, the molten slag in the steel refining process is sampled by the prismatic sampler shown in FIG. 5 described above, and the contact surface of the slag sample piece obtained by peeling after cooling and solidifying with the sampler is described above with reference to FIGS. Using a sample mask and a sample holder shown in FIG. 3, X-ray fluorescence analysis was performed by a bottom irradiation method.

【0049】また、比較として、図4(a) に示す試料の
分析面側と相対する面が平面である従来の試料マスク2
を取り付けた試料ホルダを用いて蛍光X線分析を行うと
共に、ガラスビードを作成して蛍光X線分析を行った。
なお、上記した分析においては、形状の影響がなるべく
小さくなるように、蛍光X線分析におけるファンダメン
タルパラメーター法を用いた。
For comparison, the conventional sample mask 2 shown in FIG. 4A has a flat surface facing the analysis surface side of the sample.
X-ray fluorescence analysis was carried out using a sample holder to which a glass bead was attached, and a glass bead was prepared for X-ray fluorescence analysis.
In the above analysis, a fundamental parameter method in X-ray fluorescence analysis was used so that the influence of the shape was minimized.

【0050】表1に、得られた分析結果を示す。Table 1 shows the obtained analysis results.

【0051】[0051]

【表1】 [Table 1]

【0052】表1から明らかなように、本発明による分
析結果は、従来の試料マスクを用いた場合に比べて、標
準法であるガラスビード法と良く一致した。また、蛍光
X線強度自体も、本発明の場合、従来の試料マスクを用
いた場合に比べて強度が大きくなった。これは、従来の
試料マスクを取り付けた試料ホルダの場合、スラグ試料
片周辺部の突起部によって分析面が基準面からかけ離れ
た位置となり、強度が減衰したのに対して、本発明の試
料マスク、試料ホルダの場合、分析面が基準面と良く一
致したことによる。
As is clear from Table 1, the analysis results according to the present invention were in good agreement with the glass bead method, which is the standard method, as compared with the case where the conventional sample mask was used. Also, the intensity of the fluorescent X-ray itself was higher in the case of the present invention than in the case where the conventional sample mask was used. This is because, in the case of a sample holder to which a conventional sample mask is attached, the analysis surface is at a position far away from the reference surface due to a projection on the periphery of the slag sample piece, and the strength is attenuated. In the case of the sample holder, this is because the analysis surface was in good agreement with the reference surface.

【0053】また、従来の試料マスクを取り付けた試料
ホルダの場合、分析面が基準面から離れた位置となり、
分析値に誤差が出たと考えられる。本発明の蛍光X線分
析用試料マスク、試料ホルダおよびスラグの蛍光X線分
析方法を用いることによって、試料の分析位置を精度良
く設定し、試料回転移動時にも試料が動くことなく分析
することが可能となり、標準法である従来のガラスビー
ド法と良く一致した分析結果が得られると共に、従来の
ガラスビード法では少なくとも30分以上を要していたス
ラグの組成分析を、2分以内で行うことが可能となっ
た。
In the case of a sample holder with a conventional sample mask, the analysis surface is located at a position distant from the reference surface.
It is considered that an error occurred in the analysis value. By using the method of X-ray fluorescence analysis of the sample mask, sample holder and slag for X-ray fluorescence analysis of the present invention, the analysis position of the sample can be set with high accuracy, and the analysis can be performed without moving the sample even when rotating the sample. It is possible to obtain analysis results that are in good agreement with the standard glass bead method, which is the standard method, and to perform slag composition analysis within 2 minutes, which required at least 30 minutes with the conventional glass bead method Became possible.

【0054】また、試料調製作業も不要のため、全体の
作業性も良好となった。この結果、スラグの組成分析時
間の短縮に基づく精錬工程の迅速な制御、スラグ組成の
情報に基づく精錬条件の最適化が可能となった。本発明
は、銑鉄の製造工程、鉄鋼の精錬工程以外の、スラグの
生成を伴う各種製造工程、さらには溶融物を扱う各種製
造工程などにおいても有効に活用することが可能であ
る。
Further, since the sample preparation work is unnecessary, the workability as a whole is improved. As a result, rapid control of the refining process based on the reduction of the slag composition analysis time and optimization of the refining conditions based on the information on the slag composition became possible. INDUSTRIAL APPLICABILITY The present invention can be effectively used in various manufacturing processes involving slag generation, and in various manufacturing processes dealing with molten materials, other than the pig iron manufacturing process and the steel refining process.

【0055】[0055]

【発明の効果】本発明の蛍光X線分析用試料マスク、試
料ホルダおよびスラグの蛍光X線分析方法を用いること
によって、標準法である従来のガラスビード法と良く一
致した分析結果が得られると共に、従来のガラスビード
法では少なくとも30分以上を要していたスラグの組成分
析を、2分以内で行うことが可能となった。
By using the method of X-ray fluorescence analysis of a sample mask, sample holder and slag for X-ray fluorescence analysis according to the present invention, an analysis result which is in good agreement with the conventional glass bead method as a standard method can be obtained. The slag composition analysis, which required at least 30 minutes or more in the conventional glass bead method, can be performed within 2 minutes.

【0056】また、試料調製作業も不要のため、全体の
作業性も良好となった。この結果、スラグの組成分析時
間の短縮に基づく精錬工程の迅速な制御、スラグ組成の
情報に基づく精錬条件の最適化が可能となった。本発明
は、スラグの生成を伴う各種製造工程、さらには溶融物
を扱う各種製造工程などにおいても有効に活用すること
が可能であり、その工業的意義は大きい。
Further, since the sample preparation work is not required, the whole workability is improved. As a result, rapid control of the refining process based on the reduction of the slag composition analysis time and optimization of the refining conditions based on the information on the slag composition became possible. INDUSTRIAL APPLICABILITY The present invention can be effectively used in various production processes involving slag generation, and further in various production processes dealing with a molten material, and the industrial significance thereof is great.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の蛍光X線分析用試料マスクの一例を示
す平面図(a) およびA−A部断面図(b) である。
FIGS. 1A and 1B are a plan view and a cross-sectional view taken along line AA, respectively, showing an example of a sample mask for X-ray fluorescence analysis of the present invention.

【図2】本発明の蛍光X線分析用試料ホルダの試料押さ
え治具の一例を示す平面図(a)およびB−B部断面図(b)
である。
FIG. 2 is a plan view (a) showing an example of a sample holding jig of a sample holder for X-ray fluorescence analysis of the present invention, and a cross-sectional view taken along the line BB (b).
It is.

【図3】スラグ試料片をセット、固定した状態における
本発明の蛍光X線分析用試料マスク、試料ホルダの一例
を示す断面図である。
FIG. 3 is a cross-sectional view showing an example of a sample mask and a sample holder for fluorescent X-ray analysis of the present invention in a state where a slag sample piece is set and fixed.

【図4】従来の試料マスクとスラグ試料片との位置関係
を示す断面図(a) 、および本発明の試料マスクとスラグ
試料片との位置関係を示す断面図(b) 、(c) である。
FIG. 4 is a sectional view (a) showing a positional relationship between a conventional sample mask and a slag sample piece, and sectional views (b) and (c) showing a positional relationship between a sample mask and a slag sample piece of the present invention. is there.

【図5】本発明に係るスラグのサンプラーの一例を示す
側断面図(a) およびC−C部横断面図(b) である。
5A is a side sectional view showing an example of a slag sampler according to the present invention, and FIG.

【符号の説明】 1 蛍光X線分析用試料ホルダ(:試料ホルダ) 2 蛍光X線分析用試料マスク(:試料マスク) 3 試料押さえ治具 4 突部 5 弾性体 6 試料マスクの開口部 7 スラグ試料片 7a スラグ試料片の分析面 7b スラグ試料片の突起 7c スラグ試料片の分析面と反対側の試料面 8 試料マスクの試料と相対する面 9 ビス 10 Oリング 20 金属製の中空角柱 21 スラグ剥離剤 22 モルタル 23 紙管[Description of Signs] 1 Sample holder for X-ray fluorescence analysis (: sample holder) 2 Sample mask for X-ray fluorescence analysis (: sample mask) 3 Sample holding jig 4 Projection 5 Elastic body 6 Opening of sample mask 7 Slug Sample piece 7a Analysis surface of slag sample piece 7b Projection of slag sample piece 7c Sample surface opposite to analysis surface of slag sample piece 8 Surface opposite to sample mask sample 9 Screw 10 O ring 20 Metallic hollow prism 21 Slag Release agent 22 Mortar 23 Paper tube

フロントページの続き (72)発明者 山本 公 千葉県千葉市中央区川崎町1番地 川崎製 鉄株式会社技術研究所内 (72)発明者 圓山 秀雄 大阪府高槻市赤大路町14−8 理学電機工 業株式会社内Continuation of the front page (72) Inventor Kimimoto Yamamoto 1 Kawasaki-cho, Chuo-ku, Chiba-shi, Chiba Pref. Kawasaki Steel Research Institute Co., Ltd. (72) Inventor Hideo Enyama 14-8 Akaoji-cho, Takatsuki-shi, Osaka Industry Co., Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 一次X線照射用かつ特性X線取り出し用
の開口部(6) を有する蛍光X線分析用試料マスク(2) で
あって、該試料マスク(2) の試料と相対する面上に、前
記開口部(6) を囲む突部(4) を設けたことを特徴とする
蛍光X線分析用試料マスク。
1. A fluorescent X-ray analysis sample mask (2) having an opening (6) for irradiating primary X-rays and extracting characteristic X-rays, the surface of the sample mask (2) facing the sample. A sample mask for X-ray fluorescence analysis, wherein a projection (4) surrounding the opening (6) is provided thereon.
【請求項2】 一次X線照射用かつ特性X線取り出し用
の開口部(6) を有する蛍光X線分析用試料マスク(2) と
該試料マスク(2) に試料を押圧、固定する試料押さえ治
具(3) を有する蛍光X線分析用試料ホルダ(1) であっ
て、前記試料マスク(2) の試料と相対する面上に、前記
開口部(6) を囲む突部(4) を設けたことを特徴とする蛍
光X線分析用試料ホルダ。
2. A sample mask (2) for X-ray fluorescence analysis having an opening (6) for irradiating primary X-rays and extracting characteristic X-rays, and a sample holder for pressing and fixing the sample on the sample mask (2). A sample holder (1) for fluorescent X-ray analysis having a jig (3), a projection (4) surrounding the opening (6) on a surface of the sample mask (2) facing the sample. A sample holder for X-ray fluorescence analysis, wherein the sample holder is provided.
【請求項3】 請求項1記載の蛍光X線分析用試料マス
クを用いたスラグの蛍光X線分析方法であって、溶融ス
ラグを角柱状サンプラーまたは板状サンプラーの周面に
付着せしめ急冷固化後剥離し、得られたスラグ試料片の
平滑な分析面を前記試料マスク(2) の突部(4) に当接せ
しめ、蛍光X線分析を行うことを特徴とするスラグの蛍
光X線分析方法。
3. A method for X-ray fluorescence analysis of slag using the sample mask for X-ray fluorescence analysis according to claim 1, wherein the molten slag is adhered to a peripheral surface of a prismatic sampler or a plate-like sampler and solidified by rapid cooling. X-ray fluorescence X-ray analysis method for slag, wherein the slag sample is peeled off, and a smooth analysis surface of the obtained slag sample piece is brought into contact with a projection (4) of the sample mask (2) to perform X-ray fluorescence analysis. .
【請求項4】 請求項2記載の蛍光X線分析用試料ホル
ダを用いたスラグの蛍光X線分析方法であって、溶融ス
ラグを角柱状サンプラーまたは板状サンプラーの周面に
付着せしめ急冷固化後剥離し、得られたスラグ試料片の
平滑な分析面を前記試料マスク(2) の突部(4) に当接せ
しめると共に、該スラグ試料片を前記試料押さえ治具
(3) で押圧、固定した後、該試料ホルダ(1) を用いて蛍
光X線分析を行うことを特徴とするスラグの蛍光X線分
析方法。
4. A method for X-ray fluorescence analysis of slag using the sample holder for X-ray fluorescence analysis according to claim 2, wherein the molten slag is adhered to the peripheral surface of a prismatic sampler or a plate-like sampler, and then quenched and solidified. Peeling and bringing the smooth analysis surface of the obtained slag sample piece into contact with the projection (4) of the sample mask (2), and holding the slag sample piece with the sample holding jig
(3) A method of X-ray fluorescence analysis of slag, comprising performing X-ray fluorescence analysis using the sample holder (1) after pressing and fixing in (3).
JP15409798A 1998-06-03 1998-06-03 X-ray fluorescence analysis sample mask, sample holder, and slag fluorescence X-ray analysis method Expired - Fee Related JP3628516B2 (en)

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JP15409798A JP3628516B2 (en) 1998-06-03 1998-06-03 X-ray fluorescence analysis sample mask, sample holder, and slag fluorescence X-ray analysis method

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Publication Number Publication Date
JPH11344455A true JPH11344455A (en) 1999-12-14
JP3628516B2 JP3628516B2 (en) 2005-03-16

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008128925A (en) * 2006-11-24 2008-06-05 Rigaku Industrial Co Modified sample holder for bottom surface irradiation X-ray fluorescence analysis and bottom surface irradiation type X-ray fluorescence analyzer equipped with the same
JP2014062888A (en) * 2012-08-29 2014-04-10 Rigaku Corp Sample holder for x-ray analyzer, attachment for x-ray analyzer and x-ray analyzer
CN104880474A (en) * 2014-10-23 2015-09-02 中国计量科学研究院 Standard substance anti-counterfeiting clamping sleeve and method for analysis of standard substance by standard substance anti-counterfeiting clamping sleeve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008128925A (en) * 2006-11-24 2008-06-05 Rigaku Industrial Co Modified sample holder for bottom surface irradiation X-ray fluorescence analysis and bottom surface irradiation type X-ray fluorescence analyzer equipped with the same
JP2014062888A (en) * 2012-08-29 2014-04-10 Rigaku Corp Sample holder for x-ray analyzer, attachment for x-ray analyzer and x-ray analyzer
CN104880474A (en) * 2014-10-23 2015-09-02 中国计量科学研究院 Standard substance anti-counterfeiting clamping sleeve and method for analysis of standard substance by standard substance anti-counterfeiting clamping sleeve

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