JPH11350125A5 - - Google Patents
Info
- Publication number
- JPH11350125A5 JPH11350125A5 JP1998164024A JP16402498A JPH11350125A5 JP H11350125 A5 JPH11350125 A5 JP H11350125A5 JP 1998164024 A JP1998164024 A JP 1998164024A JP 16402498 A JP16402498 A JP 16402498A JP H11350125 A5 JPH11350125 A5 JP H11350125A5
- Authority
- JP
- Japan
- Prior art keywords
- cooling water
- water channel
- sputtering
- target
- copper plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10164024A JPH11350125A (ja) | 1998-06-12 | 1998-06-12 | スパッタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10164024A JPH11350125A (ja) | 1998-06-12 | 1998-06-12 | スパッタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11350125A JPH11350125A (ja) | 1999-12-21 |
| JPH11350125A5 true JPH11350125A5 (2) | 2005-08-25 |
Family
ID=15785354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10164024A Pending JPH11350125A (ja) | 1998-06-12 | 1998-06-12 | スパッタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11350125A (2) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003301622A1 (en) * | 2002-10-24 | 2004-05-13 | Honeywell International Inc | Target designs and related methods for enhanced cooling and reduced deflection and deformation |
| EP2746424B1 (de) * | 2012-12-21 | 2018-10-17 | Oerlikon Surface Solutions AG, Pfäffikon | Verdampfungsquelle |
| CN104992935B (zh) * | 2015-06-25 | 2018-03-02 | 许继集团有限公司 | 一种电力电子功率元件用水冷散热器 |
| CN105336716B (zh) * | 2015-09-30 | 2018-03-02 | 许继集团有限公司 | 一种换流阀阀组模块及使用该阀组模块的换流阀阀塔 |
| KR102263414B1 (ko) * | 2020-02-19 | 2021-06-10 | 주식회사 엘에이티 | 스퍼터 전극체 |
-
1998
- 1998-06-12 JP JP10164024A patent/JPH11350125A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003517198A5 (2) | ||
| JPH10144614A5 (2) | ||
| WO2003015133A3 (en) | Showerhead electrode design for semiconductor processing reactor | |
| CA2445526A1 (en) | Localized bodily cooling/heating apparatus and method | |
| KR920022389A (ko) | 기판(基板) 처리 장치 | |
| TWI456638B (zh) | 具有區域依賴性熱效率之溫度受控電漿製程腔室部件 | |
| TW201211299A (en) | Apparatus for chemical vapor deposition | |
| GB2417067B (en) | Improved gas heat exchanger | |
| ATE308398T1 (de) | Thermische ummantelung eines metallurgischen gefässes | |
| JPH11350125A5 (2) | ||
| JP2001102435A5 (2) | ||
| TW200802553A (en) | Heating apparatus | |
| JPH07201956A (ja) | ウエハ冷却装置 | |
| US10794255B2 (en) | Apparatus for utilizing waste heat of an internal combustion engine | |
| JP2004179166A5 (2) | ||
| RU2007135795A (ru) | Электродуговая печь | |
| CN101142383A (zh) | 气隙隔绝的排气歧管 | |
| JP2003078091A5 (2) | ||
| JP2003163201A5 (2) | ||
| JPS6179769A (ja) | ウエハ温度制御装置 | |
| JP2003041365A (ja) | 基板処理装置 | |
| JPH11168045A5 (2) | ||
| JPH02192592A (ja) | 真空熱処理炉 | |
| JPH11350125A (ja) | スパッタリング装置 | |
| JPS55155193A (en) | Heat exchanger with fin |