JPH11350125A - スパッタリング装置 - Google Patents

スパッタリング装置

Info

Publication number
JPH11350125A
JPH11350125A JP10164024A JP16402498A JPH11350125A JP H11350125 A JPH11350125 A JP H11350125A JP 10164024 A JP10164024 A JP 10164024A JP 16402498 A JP16402498 A JP 16402498A JP H11350125 A JPH11350125 A JP H11350125A
Authority
JP
Japan
Prior art keywords
cooling water
target
water passage
cooling
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10164024A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11350125A5 (2
Inventor
Takashi Sueyoshi
貴志 末吉
Hatsuhiko Shibazaki
初彦 柴崎
Kentaro Shingo
健太郎 新郷
Yoshiyuki Nakano
喜之 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10164024A priority Critical patent/JPH11350125A/ja
Publication of JPH11350125A publication Critical patent/JPH11350125A/ja
Publication of JPH11350125A5 publication Critical patent/JPH11350125A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP10164024A 1998-06-12 1998-06-12 スパッタリング装置 Pending JPH11350125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10164024A JPH11350125A (ja) 1998-06-12 1998-06-12 スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10164024A JPH11350125A (ja) 1998-06-12 1998-06-12 スパッタリング装置

Publications (2)

Publication Number Publication Date
JPH11350125A true JPH11350125A (ja) 1999-12-21
JPH11350125A5 JPH11350125A5 (2) 2005-08-25

Family

ID=15785354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10164024A Pending JPH11350125A (ja) 1998-06-12 1998-06-12 スパッタリング装置

Country Status (1)

Country Link
JP (1) JPH11350125A (2)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014051746A (ja) * 2002-10-24 2014-03-20 Honeywell Internatl Inc 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
JP2014122422A (ja) * 2012-12-21 2014-07-03 Sulzer Metaplas Gmbh 蒸発源
CN104992935A (zh) * 2015-06-25 2015-10-21 许继集团有限公司 一种电力电子功率元件用水冷散热器
CN105336716A (zh) * 2015-09-30 2016-02-17 许继集团有限公司 一种换流阀阀组模块及使用该阀组模块的换流阀阀塔
KR102263414B1 (ko) * 2020-02-19 2021-06-10 주식회사 엘에이티 스퍼터 전극체

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014051746A (ja) * 2002-10-24 2014-03-20 Honeywell Internatl Inc 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
JP2014122422A (ja) * 2012-12-21 2014-07-03 Sulzer Metaplas Gmbh 蒸発源
CN104992935A (zh) * 2015-06-25 2015-10-21 许继集团有限公司 一种电力电子功率元件用水冷散热器
CN104992935B (zh) * 2015-06-25 2018-03-02 许继集团有限公司 一种电力电子功率元件用水冷散热器
CN105336716A (zh) * 2015-09-30 2016-02-17 许继集团有限公司 一种换流阀阀组模块及使用该阀组模块的换流阀阀塔
CN105336716B (zh) * 2015-09-30 2018-03-02 许继集团有限公司 一种换流阀阀组模块及使用该阀组模块的换流阀阀塔
KR102263414B1 (ko) * 2020-02-19 2021-06-10 주식회사 엘에이티 스퍼터 전극체

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