JPH1140654A5 - - Google Patents
Info
- Publication number
- JPH1140654A5 JPH1140654A5 JP1997192753A JP19275397A JPH1140654A5 JP H1140654 A5 JPH1140654 A5 JP H1140654A5 JP 1997192753 A JP1997192753 A JP 1997192753A JP 19275397 A JP19275397 A JP 19275397A JP H1140654 A5 JPH1140654 A5 JP H1140654A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film formation
- film
- holding
- formation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19275397A JPH1140654A (ja) | 1997-07-17 | 1997-07-17 | 基板保持構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19275397A JPH1140654A (ja) | 1997-07-17 | 1997-07-17 | 基板保持構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1140654A JPH1140654A (ja) | 1999-02-12 |
| JPH1140654A5 true JPH1140654A5 (mo) | 2005-04-28 |
Family
ID=16296485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19275397A Pending JPH1140654A (ja) | 1997-07-17 | 1997-07-17 | 基板保持構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1140654A (mo) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100384060B1 (ko) * | 2000-12-04 | 2003-05-14 | 삼성전자주식회사 | 반도체장치 애싱설비의 척 플레이트 및 이를 이용한 척조립체 |
| US7993460B2 (en) * | 2003-06-30 | 2011-08-09 | Lam Research Corporation | Substrate support having dynamic temperature control |
| JP2008198739A (ja) * | 2007-02-09 | 2008-08-28 | Tokyo Electron Ltd | 載置台構造、これを用いた処理装置及びこの装置の使用方法 |
| JP7547147B2 (ja) * | 2020-10-02 | 2024-09-09 | 株式会社カネカ | 成膜用トレイ及び太陽電池製造方法 |
-
1997
- 1997-07-17 JP JP19275397A patent/JPH1140654A/ja active Pending
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