JPH1143533A - Resin composition, permanent resist resin composition, and their cured product - Google Patents
Resin composition, permanent resist resin composition, and their cured productInfo
- Publication number
- JPH1143533A JPH1143533A JP9213897A JP21389797A JPH1143533A JP H1143533 A JPH1143533 A JP H1143533A JP 9213897 A JP9213897 A JP 9213897A JP 21389797 A JP21389797 A JP 21389797A JP H1143533 A JPH1143533 A JP H1143533A
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- epoxy resin
- meth
- acid
- anhydride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 25
- 239000003822 epoxy resin Substances 0.000 claims abstract description 42
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 42
- 239000002253 acid Substances 0.000 claims abstract description 25
- 239000004593 Epoxy Substances 0.000 claims abstract description 12
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 11
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000003085 diluting agent Substances 0.000 claims abstract description 9
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 7
- 239000003999 initiator Substances 0.000 claims abstract description 7
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 6
- 150000008065 acid anhydrides Chemical class 0.000 claims abstract 3
- 150000007519 polyprotic acids Polymers 0.000 claims abstract 2
- 150000008064 anhydrides Chemical class 0.000 claims description 21
- 239000000047 product Substances 0.000 claims description 15
- 229920003986 novolac Polymers 0.000 claims description 10
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 18
- 239000000203 mixture Substances 0.000 abstract description 16
- 238000007747 plating Methods 0.000 abstract description 15
- 239000002904 solvent Substances 0.000 abstract description 14
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 abstract description 10
- 239000007787 solid Substances 0.000 abstract description 9
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 abstract description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 abstract description 4
- 229930003836 cresol Natural products 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 abstract description 3
- 239000001384 succinic acid Substances 0.000 abstract 1
- RINCXYDBBGOEEQ-UHFFFAOYSA-N succinic anhydride Chemical compound O=C1CCC(=O)O1 RINCXYDBBGOEEQ-UHFFFAOYSA-N 0.000 abstract 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 25
- 238000000034 method Methods 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- -1 dipropylene Glycol ethers Chemical class 0.000 description 11
- 239000000243 solution Substances 0.000 description 11
- 239000000654 additive Substances 0.000 description 9
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000011161 development Methods 0.000 description 8
- 230000004907 flux Effects 0.000 description 8
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 8
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000003208 petroleum Substances 0.000 description 7
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 6
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000007772 electroless plating Methods 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- 238000005476 soldering Methods 0.000 description 6
- 206010034972 Photosensitivity reaction Diseases 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- NWVVVBRKAWDGAB-UHFFFAOYSA-N hydroquinone methyl ether Natural products COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 230000036211 photosensitivity Effects 0.000 description 5
- 239000000376 reactant Substances 0.000 description 5
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 3
- MOBNLCPBAMKACS-UHFFFAOYSA-N 2-(1-chloroethyl)oxirane Chemical compound CC(Cl)C1CO1 MOBNLCPBAMKACS-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 3
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 3
- 229930185605 Bisphenol Natural products 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- 235000010290 biphenyl Nutrition 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000001723 curing Methods 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 238000002845 discoloration Methods 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 2
- XLPJNCYCZORXHG-UHFFFAOYSA-N 1-morpholin-4-ylprop-2-en-1-one Chemical compound C=CC(=O)N1CCOCC1 XLPJNCYCZORXHG-UHFFFAOYSA-N 0.000 description 2
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910002012 Aerosil® Inorganic materials 0.000 description 2
- 229910002019 Aerosil® 380 Inorganic materials 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 2
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 238000001879 gelation Methods 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 150000007974 melamines Chemical class 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 2
- 229950000688 phenothiazine Drugs 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- ARCGXLSVLAOJQL-UHFFFAOYSA-N trimellitic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 ARCGXLSVLAOJQL-UHFFFAOYSA-N 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical compound ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- NPENBPVOAXERED-UHFFFAOYSA-N (4-benzoylphenyl)-phenylmethanone Chemical class C=1C=C(C(=O)C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 NPENBPVOAXERED-UHFFFAOYSA-N 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- VPBZZPOGZPKYKX-UHFFFAOYSA-N 1,2-diethoxypropane Chemical compound CCOCC(C)OCC VPBZZPOGZPKYKX-UHFFFAOYSA-N 0.000 description 1
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- ONCICIKBSHQJTB-UHFFFAOYSA-N 1-[4-(dimethylamino)phenyl]propan-1-one Chemical compound CCC(=O)C1=CC=C(N(C)C)C=C1 ONCICIKBSHQJTB-UHFFFAOYSA-N 0.000 description 1
- JWYVGKFDLWWQJX-UHFFFAOYSA-N 1-ethenylazepan-2-one Chemical compound C=CN1CCCCCC1=O JWYVGKFDLWWQJX-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- HUKQHBSQSCNWIM-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)propane-1,3-diol;2-ethyl-2-(hydroxymethyl)propane-1,3-diol Chemical compound CCC(CO)(CO)CO.CCC(CO)(CO)CO.OCC(CO)(CO)CO HUKQHBSQSCNWIM-UHFFFAOYSA-N 0.000 description 1
- GIMQKKFOOYOQGB-UHFFFAOYSA-N 2,2-diethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)(OCC)C(=O)C1=CC=CC=C1 GIMQKKFOOYOQGB-UHFFFAOYSA-N 0.000 description 1
- IVIDDMGBRCPGLJ-UHFFFAOYSA-N 2,3-bis(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C1OC1COC(CO)COCC1CO1 IVIDDMGBRCPGLJ-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- SHJIJMBTDZCOFE-UHFFFAOYSA-N 2-[2-[2-(2-hydroxyethoxy)ethoxy]ethoxy]-1-methoxyethanol Chemical compound COC(O)COCCOCCOCCO SHJIJMBTDZCOFE-UHFFFAOYSA-N 0.000 description 1
- XXZCIYUJYUESMD-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-(morpholin-4-ylmethyl)pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C(=NN(C=1)CC(=O)N1CC2=C(CC1)NN=N2)CN1CCOCC1 XXZCIYUJYUESMD-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- ODGCZQFTJDEYNI-UHFFFAOYSA-N 2-methylcyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1(C)C=CCCC1C(O)=O ODGCZQFTJDEYNI-UHFFFAOYSA-N 0.000 description 1
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical compound C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 1
- BJEMXPVDXFSROA-UHFFFAOYSA-N 3-butylbenzene-1,2-diol Chemical group CCCCC1=CC=CC(O)=C1O BJEMXPVDXFSROA-UHFFFAOYSA-N 0.000 description 1
- UJTRCPVECIHPBG-UHFFFAOYSA-N 3-cyclohexylpyrrole-2,5-dione Chemical compound O=C1NC(=O)C(C2CCCCC2)=C1 UJTRCPVECIHPBG-UHFFFAOYSA-N 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- GZVHEAJQGPRDLQ-UHFFFAOYSA-N 6-phenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=2C=CC=CC=2)=N1 GZVHEAJQGPRDLQ-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 206010034960 Photophobia Diseases 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- XVWNIYLSVLQOFL-UHFFFAOYSA-N [1-(diethylamino)cyclohexa-2,4-dien-1-yl]-[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1(N(CC)CC)C=CC=CC1 XVWNIYLSVLQOFL-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- ATMLPEJAVWINOF-UHFFFAOYSA-N acrylic acid acrylic acid Chemical compound OC(=O)C=C.OC(=O)C=C ATMLPEJAVWINOF-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229920003180 amino resin Polymers 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 229910002026 crystalline silica Inorganic materials 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000391 magnesium silicate Substances 0.000 description 1
- 229910052919 magnesium silicate Inorganic materials 0.000 description 1
- 235000019792 magnesium silicate Nutrition 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- VYKXQOYUCMREIS-UHFFFAOYSA-N methylhexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21C VYKXQOYUCMREIS-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 229940088644 n,n-dimethylacrylamide Drugs 0.000 description 1
- YLGYACDQVQQZSW-UHFFFAOYSA-N n,n-dimethylprop-2-enamide Chemical compound CN(C)C(=O)C=C YLGYACDQVQQZSW-UHFFFAOYSA-N 0.000 description 1
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- NIUZJTWSUGSWJI-UHFFFAOYSA-M triethyl(methyl)azanium;chloride Chemical compound [Cl-].CC[N+](C)(CC)CC NIUZJTWSUGSWJI-UHFFFAOYSA-M 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- HVYVMSPIJIWUNA-UHFFFAOYSA-N triphenylstibine Chemical compound C1=CC=CC=C1[Sb](C=1C=CC=CC=1)C1=CC=CC=C1 HVYVMSPIJIWUNA-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
- Epoxy Resins (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、特に回路基板用永
久レジトとして有用な樹脂組成物及びその硬化物に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin composition useful as a permanent resist for circuit boards, and a cured product thereof.
【0002】[0002]
【従来の技術】従来、プリント配線板は銅張積層板を用
い、銅箔の回路に不要な部分をエッチングにより除去す
るサブトラクテイブ法によって製造されているが、この
サブトラクテイブ法は、ファインパターン、高密度配線
板を形成するのが困難であること、また、小径フルーホ
ール、バイアホールが電気メッキでは均一に行えないこ
となどの欠点を有し、電子機器の高密度化に対応しきれ
なくなっているのが現状である。2. Description of the Related Art Conventionally, printed wiring boards are manufactured by using a copper-clad laminate and by a subtractive method in which unnecessary portions of a copper foil circuit are removed by etching. It has drawbacks that it is difficult to form a wiring board, and that small-diameter flu holes and via holes cannot be uniformly formed by electroplating. Is the current situation.
【0003】これに対し最近は、絶縁基材よりなる積層
板に接着剤層を形成し、そこへ無電解メッキにより回路
及びスルホールを形成するフルアデイセイブ法が注目さ
れている。この方法では導体パターン精度はメッキレジ
ストの転写精度のみで決定され、また導体部分が無電解
メッキのみで形成されるため、高アスペクト比スルホー
ルを有する基板においても、スローイングパワーの高い
均一なスルホールメッキを行うことが可能である。これ
までは一般民生用に適するとされてきたアデイテイブ法
であるが、産業用、高密度、高多層基板製造プロセスと
して実用され始めている。On the other hand, recently, a full-available method in which an adhesive layer is formed on a laminate made of an insulating base material and a circuit and a through hole are formed thereon by electroless plating has been receiving attention. In this method, the conductor pattern accuracy is determined only by the transfer accuracy of the plating resist, and since the conductor portion is formed only by electroless plating, even with a substrate having a high aspect ratio through hole, uniform through hole plating with high throwing power can be achieved. It is possible to do. Until now, the additive method, which has been considered suitable for general consumer use, has begun to be put into practical use as an industrial, high-density, high-multilayer substrate manufacturing process.
【0004】[0004]
【発明が解決しようとする課題】一般に民生用途の基板
製造のためのアデイテイブ法では、メッキレジストパタ
ーンはスクリーン印刷法によって転写されているが、高
密度配線を有するプリント配線板を製造するためには、
メッキレジストパターンを写真製版によって形成するこ
と、すなわちフォトレジストを用いたフォトアデイテイ
ブ法を採用することが必要となってくる。フォトアデイ
テイブ法に適したフォトレジストには、感度や解像度、
現像性のようなフォトレジスト本来の特性のほかに、次
のような特性が要求される。現像は、1,1,1−トリ
クロロエタン系有機溶剤又はアルカリ水溶液に限定され
るため、いずれかで現像可能であること、高温、高アル
カリ性条件下で長時間行われる無電解メッキに耐えるこ
と、メッキ処理後、永久レジストとして優れたソルダー
レジスト特性を有すること、はんだ付け工程での260
℃前後の温度にも耐える耐熱性、及びはんだ付け時に用
いるフラックスを洗浄する有機溶剤に対する耐溶剤性を
有すること、更には、積層されても基板全体の熱的信頼
性を停止させないことなどである。現在、このアデイテ
イブ法に使用可能なフォトレジストも市販されているが
その性能は未だ十分であるとはいえない。Generally, in an additive method for manufacturing a substrate for consumer use, a plating resist pattern is transferred by a screen printing method. However, in order to manufacture a printed wiring board having high-density wiring, ,
It is necessary to form a plating resist pattern by photolithography, that is, to employ a photo-additive method using a photoresist. Photoresists suitable for photo-additive methods include sensitivity, resolution,
In addition to the inherent properties of photoresist such as developability, the following properties are required. Development is limited to 1,1,1-trichloroethane-based organic solvent or alkaline aqueous solution, so that it can be developed by any of them, it can withstand electroless plating performed for a long time under high temperature and high alkaline conditions, plating After processing, have excellent solder resist properties as permanent resist, 260 in soldering process
It has heat resistance to withstand temperatures around ℃ and solvent resistance to organic solvents for cleaning flux used at the time of soldering, and furthermore, it does not stop the thermal reliability of the entire substrate even when laminated. . At present, photoresists that can be used in the additive method are commercially available, but their performance is not yet satisfactory.
【0005】従って、本発明の目的とするところは、写
真法によりパターン精度の良いレジスト形成がアルカリ
水溶液を用いた現像で可能であり、フルアデイテイブ法
の無電解銅メッキ液に十分に耐え、また、はんだ付け工
程の260℃前後の温度にも耐える耐熱性、及びはんだ
付け時に用いるフラックスを洗浄する有機溶剤に対する
耐溶剤性を備えていて、最終製品まで除去することなく
使用される永久レジスト機能組成物及びその硬化物を提
供するところにある。Accordingly, an object of the present invention is to form a resist with high pattern accuracy by a photographic method by development using an alkaline aqueous solution, sufficiently withstand the electroless copper plating solution of the full additive method, and A permanent resist functional composition that has heat resistance to withstand temperatures around 260 ° C in the soldering process and solvent resistance to organic solvents that clean flux used during soldering, and is used without removing it to the final product And a cured product thereof.
【0006】[0006]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明による樹脂組成物、プリント配線板用永久
レジスト樹脂組成物及びその硬化物は、下記の組成を有
し、永久レジストとしての優れた特性とこのレジスト樹
脂組成物を用いたプリント配線板を製造し得ることを性
能上の特長とするものである。In order to achieve the above object, a resin composition, a permanent resist resin composition for a printed wiring board, and a cured product thereof according to the present invention have the following composition, and are used as a permanent resist. It is characterized in that it has excellent characteristics and that a printed wiring board using the resist resin composition can be manufactured.
【0007】即ち、本発明は、(1)1分子中に少なく
とも2個のエポキシ基を有するエポキシ樹脂(a)と
(a)のエポキシ当量当たり0.80〜0.99モルの
(メタ)アクリル酸(b)と0.01〜0.2モルの二
塩基酸及び/又はその無水物(c)との反応生成物
(d)と、多塩基酸無水物(e)との反応生成物である
カルボキシル基を有する感光性プレポリマー(A)、希
釈剤(B)、光重合開始剤(C)及び熱硬化性成分
(D)を含有する樹脂組成物、(2)エポキシ樹脂
(a)がノボラック型エポキシ樹脂である(1)項記載
の樹脂組成物、(3)エポキシ樹脂(a)がトリスフェ
ノールメタン型エポキシ樹脂である(1)項記載の樹脂
組成物、(4)回路基板用永久レジストである(1)項
ないし(3)項のいずれかに記載の樹脂組成物、(5)
(1)項ないし(4)項記載の樹脂組成物の硬化物に関
する。That is, the present invention relates to (1) an epoxy resin (a) having at least two epoxy groups in one molecule and 0.80 to 0.99 mol of (meth) acrylic acid per epoxy equivalent of (a). A reaction product (d) of the acid (b) with 0.01 to 0.2 mol of a dibasic acid and / or its anhydride (c) and a reaction product of a polybasic anhydride (e) A resin composition containing a photosensitive prepolymer (A) having a certain carboxyl group, a diluent (B), a photopolymerization initiator (C), and a thermosetting component (D); and (2) an epoxy resin (a). The resin composition according to (1), which is a novolak type epoxy resin; (3) the resin composition according to (1), wherein the epoxy resin (a) is a trisphenolmethane type epoxy resin; A resist as described in any of the above items (1) to (3) Resin composition, (5)
The present invention relates to a cured product of the resin composition according to any one of (1) to (4).
【0008】本発明では、カルボキシル基を有する感光
性プレポリマー(A)を使用する。(A)成分は、1分
子中に少なくとも2個のエポキシ基を有するエポキシ樹
脂(a)と(a)のエポキシ当量当たり0.80〜0.
99モルの(メタ)アクリル酸(b)と0.01〜0.
2モルの二塩基酸又はその無水物(c)との反応生成物
(d)と、多塩基酸無水物(e)との反応生成物であっ
て1分子中に少なくとも2個のエポキシ基を有するエポ
キシ樹脂(a)と(a)のエポキシ当量当たり0.80
〜0.99モルの(メタ)アクリル酸(b)と0.01
〜0.2モルの二塩基酸及び/又はその無水物(c)を
反応させ、次いでこの反応物(d)と多塩基酸無水物
(e)を反応させることにより得ることができる。1分
子中に少なくとも2個以上のエポキシ基を有するエポキ
シ化合物(a)の具体例としては、例えば、ノボラック
型エポキシ樹脂(例えば、フェノール、クレゾール、ハ
ロゲン化フェノールおよびアルキルフェノールなどのフ
ェノール類とホルムアルデヒドとを酸性触媒下で反応し
て得られるノボラック類とエピクロルヒドリンおよび/
またはメチルエピクロルヒドリンとを反応させて得られ
るもの等。市販品としては、日本化薬(株)製、EOC
N−103、EOCN−104S、EOCN−102、
EOCN−1027、EPPN−201、BREN−
S:ダウ・ケミカル社製、DEN−431、DEN−4
39;大日本インキ化学工業(株)製、N−730、N
−770、N−865、N−665、N−673、VH
−4150等)、ビスフェノール型エポキシ樹脂(例え
ば、ビスフェノールA、ビスフェノールF、ビスフェノ
ールSおよびテトラブロムビスフェノールA等のビスフ
ェノール類とエピクロルヒドリンおよび/またはメチル
エピクロルヒドリンとを反応させて得られるものや、ビ
スフェノールAあるいはビスフェノールFのジグリシジ
ルエーテルと前記ビスフェノール類の縮合物とエピクロ
ルヒドリンおよび/またはメチルエピクロルヒドリンと
を反応させ得られるもの等。市販品としては、油化シェ
ルエポキシ(株)製、エピコート1004、エピコート
1002、エピコート4002、エピコート4004
等。)、トリスフェノールメタン型エポキシ樹脂(例え
ば、トリスフェノールメタン、トリスクレゾールメタン
等のエピクロルヒドリンおよび/またはメチルエピクロ
ルシドリンとを反応させて得られるもの等。市販品とし
ては、日本化薬(株)製、EPPN−501、EPPN
−502等。)トリス(2,3−エポキシプロピル)イ
ソシーヌレート、ビフェニルジグリシジルエーテル、そ
の他、ダイセル化学工業(株)製、セロキサイド202
1:三井石油化学工業(株)製、エポミックVG−31
01;油化シェルエポキシ(株)製、E−1031S;
日本曹達(株)製、EPB−13、EPB−27等の脂
環式エポキシ樹脂、共重合型エポキシ樹脂(例えば、グ
リシジルメタクリレートとスチレンとメチルスチレンの
共重合体である日本油脂(株)製、CP−50M、CP
−50S、あるいは、グリシジルメタクリレートとシク
ロヘキシルマレイミドなどの共重合体等)。あるいはそ
の他、特殊構造を有するエポキシ樹脂等を挙げることが
できる。特に好ましいものとしては、例えば、クレゾー
ル・ノボラック型エポキシ樹脂、フェノール・ノボラッ
ク型エポキシ樹脂、トリスフェノールメタン型エポキシ
樹脂等を挙げることかできる。In the present invention, a photosensitive prepolymer (A) having a carboxyl group is used. Component (A) is an epoxy resin (a) having at least two epoxy groups in one molecule and 0.80 to 0.8 per epoxy equivalent of (a).
99 moles of (meth) acrylic acid (b) and 0.01-0.
A reaction product (d) with 2 mol of a dibasic acid or its anhydride (c) and a polybasic anhydride (e), wherein at least two epoxy groups are present in one molecule; 0.80 per epoxy equivalent of epoxy resins (a) and (a)
0.99 mol of (meth) acrylic acid (b) and 0.01
It can be obtained by reacting .about.0.2 mol of a dibasic acid and / or its anhydride (c), and then reacting this reactant (d) with a polybasic anhydride (e). Specific examples of the epoxy compound (a) having at least two or more epoxy groups in one molecule include, for example, novolak-type epoxy resins (for example, phenols such as phenol, cresol, halogenated phenol and alkylphenol, and formaldehyde). Novolaks obtained by reaction in the presence of an acidic catalyst and epichlorohydrin and / or
Or those obtained by reacting with methyl epichlorohydrin. Commercial products include Nippon Kayaku Co., Ltd., EOC
N-103, EOCN-104S, EOCN-102,
EOCN-1027, EPPN-201, BREN-
S: DEN-431, DEN-4 manufactured by Dow Chemical Company
39; N-730, N, manufactured by Dainippon Ink and Chemicals, Inc.
-770, N-865, N-665, N-673, VH
-4150 etc.), bisphenol type epoxy resins (for example, those obtained by reacting bisphenols such as bisphenol A, bisphenol F, bisphenol S and tetrabromobisphenol A with epichlorohydrin and / or methyl epichlorohydrin, bisphenol A or bisphenol A product obtained by reacting the diglycidyl ether of F with the condensate of the above bisphenols and epichlorohydrin and / or methyl epichlorohydrin, etc. Commercially available products are Yuko Shell Epoxy Co., Ltd., Epicoat 1004, Epicoat 1002, Epicoat 4002. , Epicoat 4004
etc. ), Trisphenolmethane-type epoxy resin (for example, those obtained by reacting with epichlorohydrin and / or methylepichlorosiderin such as trisphenolmethane, triscresol methane, etc.) Commercial products include Nippon Kayaku Co., Ltd. Made, EPPN-501, EPPN
-502 and the like. ) Tris (2,3-epoxypropyl) isocineurate, biphenyl diglycidyl ether, others, manufactured by Daicel Chemical Industries, Ltd., Celloxide 202
1: EPOMIC VG-31 manufactured by Mitsui Petrochemical Industries, Ltd.
01; Yuka Shell Epoxy Co., Ltd., E-1031S;
Alicyclic epoxy resins such as EPB-13 and EPB-27 manufactured by Nippon Soda Co., Ltd., and copolymerized epoxy resins (for example, manufactured by Nippon Oil & Fats Co., Ltd., which is a copolymer of glycidyl methacrylate, styrene and methylstyrene, CP-50M, CP
-50S, or a copolymer of glycidyl methacrylate and cyclohexylmaleimide, etc.). Alternatively, other examples include an epoxy resin having a special structure. Particularly preferred are, for example, cresol novolak type epoxy resin, phenol novolak type epoxy resin, trisphenolmethane type epoxy resin and the like.
【0009】反応物(d)は、1分子中に少なくとも2
個のエポキシ基を有するエポキシ樹脂(a)のエポキシ
当量当たり0.80〜0.99モルの(メタ)アクリル
酸(b)と0.01〜0.2モルの二塩基酸又はその無
水物(c)を反応させることにより得ることかできる。The reactant (d) contains at least 2 molecules per molecule.
0.80 to 0.99 mol of (meth) acrylic acid (b) and 0.01 to 0.2 mol of dibasic acid or anhydride thereof per epoxy equivalent of epoxy resin (a) having two epoxy groups ( c) can be obtained by reacting.
【0010】次に、前記(メタ)アクリル酸(b)は、
アクリル酸又はメタクリル酸である。Next, the (meth) acrylic acid (b) is
Acrylic acid or methacrylic acid.
【0011】二塩基酸又はその無水物(c)の具体例と
しては、例えばコハク酸、マレイン酸、アジピン酸、フ
タル酸、テレフタル酸、テトラヒドロフタル酸、ヘキサ
ヒドロフタル酸、メチルテトラヒドロフタル酸、メチル
ヘキサヒドロフタル酸等の二塩基酸又はその無水物等を
挙げることができる。Specific examples of the dibasic acid or its anhydride (c) include, for example, succinic acid, maleic acid, adipic acid, phthalic acid, terephthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, methyltetrahydrophthalic acid, methyl Examples thereof include dibasic acids such as hexahydrophthalic acid and anhydrides thereof.
【0012】前記エポキシ樹脂(a)と前記(メタ)ア
クリル酸(b)と前記二塩基酸又はその無水物(c)の
反応は、エポキシ樹脂(a)のエポキシ基1当量に対し
て(メタ)アクリル酸(b)0.8〜0.99モル、好
ましくは0.9〜0.95モルであり、二塩基酸又はそ
の無水物(c)は、0.01〜0.2モル、好ましくは
0.05〜0.1モルで反応させる。反応は、前記、エ
ポキシ樹脂(a)と(メタ)アクリル酸(b)と二塩基
酸又はその無水物(c)を同時に仕込み反応する方法
(A法)とエポキシ樹脂(a)と(メタ)アクリル酸
(b)の反応を約50〜80%反応率で二塩基酸又はそ
の無水物(c)を仕込み反応させる方法(B法)とがあ
る。The reaction between the epoxy resin (a), the (meth) acrylic acid (b) and the dibasic acid or its anhydride (c) is based on the equivalent of (meth) ) Acrylic acid (b) is 0.8 to 0.99 mol, preferably 0.9 to 0.95 mol, and dibasic acid or anhydride (c) is 0.01 to 0.2 mol, preferably Are reacted at 0.05 to 0.1 mol. The reaction is carried out by simultaneously charging and reacting the epoxy resin (a), (meth) acrylic acid (b) and dibasic acid or its anhydride (c) (method A), and the epoxy resin (a) and (meth) There is a method (method B) in which the reaction of acrylic acid (b) is carried out by charging dibasic acid or its anhydride (c) at a reaction rate of about 50 to 80%.
【0013】二塩基酸又は無水物(c)の仕込み量が
0.2モル以上で使用すると分子量が大きくなり、粘度
が高すぎたり、ゲル化する場合があり好ましくない。
又、仕込み量が0.01モル以下で使用すると分子量が
十分に大きくならず、耐熱性、耐メッキ液性、感光性等
が不十分である。When the amount of the dibasic acid or anhydride (c) used is 0.2 mol or more, the molecular weight is increased, and the viscosity may be too high or gelation may occur.
If the amount used is less than 0.01 mol, the molecular weight does not become sufficiently large, and the heat resistance, plating solution resistance, photosensitivity and the like are insufficient.
【0014】本発明の(A)成分は、(a)成分と
(b)成分と(c)成分を同時に仕込み反応させる(A
法)、又は(a)成分と(b)成分の反応を50〜80
%の反応率で(c)成分を仕込み反応させる(B法)こ
とにより分子量を大きくすることにより、耐熱性、耐メ
ッキ液性、感光性等が優れた特性を有している。The component (A) of the present invention is prepared by simultaneously charging and reacting the components (a), (b) and (c).
Method) or the reaction of component (a) with component (b)
% By increasing the molecular weight by charging the component (c) at a reaction rate of (%) (method B), thereby having excellent properties such as heat resistance, plating solution resistance, and photosensitivity.
【0015】(A)、(B)法とも反応時に、希釈剤と
して、エチルメチルケトン、シクロヘキサノン等のケト
ン類、トルエン、キシレン、テトラメチルベンゼン等の
芳香族炭化水素類、ジプロピレングリコールジメチルエ
ーテル、ジプロピレングリコールジエチルエーテルなど
のグリコールエーテル類、酢酸エチル、酢酸ブチル、ブ
チルセロソルブアセテート、カルビトールアセテートな
どのエステル類、オクタン、デカンなどの脂肪族炭化水
素、石油エーテル、石油ナフサ、水添石油ナフサ、ソル
ベントナフサなどの石油系溶剤等の有機溶剤類、アクリ
ロイルモルホリン、イソボルニル(メタ)アクリレー
ト、ジシクロペンタジエンモノ(メタ)アクリレート、
水添ジシクロペンタジエンモノ(メタ)アクリレート、
1,4−ブタンジオールジ(メタ)アクリレート、1,
6−ヘキサンジオールジ(メタ)アクリレート、ノナン
ビオールジ(メタ)アクリレート、トリシクロデカンジ
メチロールジ(メタ)アクリレート、イソシアヌレート
ジ(メタ)アクリレート、イソシアヌレートトリ(メ
タ)アクリレート、トリメチロールプロパントリ(メ
タ)アクリレート、ペンタエリスリトールトリ(メタ)
アクリレート、ペンタエリスリトールテトラ(メタ)ア
クリレート、ジペンタエリスリトールペンタ及びヘキサ
(メタ)アクリレート、ジトリメチロールプロパンテト
ラ(メタ)アクリレート等の光重合性反応性希釈剤等を
使用するのが好ましい。更に反応を促進させるために触
媒(例えば、トリフェニルホスフィン、ベンジルジメチ
ルアミン、メチルトリエチルアンモニウムクロライド、
トリフェニルスチビン等)を使用するのが好ましい。
又、反応中のゲル化を防止するために、重合禁止剤(例
えば、ハイドロキノン、メチルハイドロキノン、メトキ
ノン、フェノチアジン等)を使用するのが好ましい。反
応温度は、(A)法、(B)法とも60〜150℃であ
る。反応時間は好ましくは5〜40時間である。このよ
うな反応物(d)を得ることができる。At the time of the reaction in both methods (A) and (B), ketones such as ethyl methyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene, dipropylene glycol dimethyl ether, dipropylene Glycol ethers such as propylene glycol diethyl ether, esters such as ethyl acetate, butyl acetate, butyl cellosolve acetate and carbitol acetate, aliphatic hydrocarbons such as octane and decane, petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, solvent naphtha Organic solvents such as petroleum solvents such as acryloyl morpholine, isobornyl (meth) acrylate, dicyclopentadiene mono (meth) acrylate,
Hydrogenated dicyclopentadiene mono (meth) acrylate,
1,4-butanediol di (meth) acrylate, 1,
6-hexanediol di (meth) acrylate, nonambiol di (meth) acrylate, tricyclodecane dimethylol di (meth) acrylate, isocyanurate di (meth) acrylate, isocyanurate tri (meth) acrylate, trimethylolpropane tri (meth) acrylate Acrylate, pentaerythritol tri (meth)
It is preferable to use a photopolymerizable reactive diluent such as acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta and hexa (meth) acrylate, and ditrimethylolpropanetetra (meth) acrylate. To further promote the reaction, a catalyst (for example, triphenylphosphine, benzyldimethylamine, methyltriethylammonium chloride,
It is preferable to use triphenylstibine or the like.
In order to prevent gelation during the reaction, it is preferable to use a polymerization inhibitor (for example, hydroquinone, methylhydroquinone, methoquinone, phenothiazine, etc.). The reaction temperature is 60 to 150 ° C. in both the method (A) and the method (B). The reaction time is preferably 5 to 40 hours. Such a reactant (d) can be obtained.
【0016】次に、反応物(d)と多塩基酸無水物
(e)(例えば、無水コハク酸、無水マレイン酸、無水
フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無
水フタル酸、メチルヘキサヒドロ無水フタル酸、メチル
エンドメチレンテトラヒドロ無水フタル酸、トリメリッ
ト酸、ピロメリット酸等)の反応は、前記反応物(d)
中の水酸基に対して、水酸基1当量あたり前記の多塩基
酸無水物(e)を0.1〜1.0当量反応させるのが好
ましい。反応温度は60〜150℃が好ましい。反応時
間は、1〜10時間が好ましい。Next, reactant (d) and polybasic anhydride (e) (for example, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride) Acid, methylendomethylenetetrahydrophthalic anhydride, trimellitic acid, pyromellitic acid, etc.) are reacted with the reactant (d).
It is preferable to react 0.1 to 1.0 equivalent of the above-mentioned polybasic anhydride (e) per equivalent of the hydroxyl group with respect to the hydroxyl group contained therein. The reaction temperature is preferably from 60 to 150C. The reaction time is preferably 1 to 10 hours.
【0017】このようにして得られた本発明のカルボキ
シル基を有する感光性プレポリマー(A)の平均分子量
は、1万〜10万が好ましく、特に1.5〜5万が好ま
しい。固形分の酸価(mgKOH/g)は、70〜15
0が好ましく、特に80〜110が好ましい。The average molecular weight of the thus obtained photosensitive prepolymer having a carboxyl group (A) of the present invention is preferably 10,000 to 100,000, particularly preferably 1.5 to 50,000. The acid value (mgKOH / g) of the solid content is 70 to 15
0 is preferable, and 80 to 110 is particularly preferable.
【0018】本発明の組成物に含まれるカルボキシル基
を有する感光性プレポリマー(A)の量は、組成物中1
0〜80重量%が好ましく、特に15〜60重量%が好
ましい。The amount of the photosensitive prepolymer (A) having a carboxyl group contained in the composition of the present invention is 1% in the composition.
It is preferably from 0 to 80% by weight, particularly preferably from 15 to 60% by weight.
【0019】次に希釈剤(B)の具体例としては、例え
ば、エチルメチルケトン、シクロヘキサノン等のケトン
類、トルエン、キシレン、テトラメチルベンゼン等の芳
香族炭化水素類、メチルセロソルブ、ブチルセロソル
ブ、メチルカルビトール、ブチルカルビトール、プロピ
レングリコールモノメチルエーテル、ジプロピレングリ
コールモノエチルエーテル、ジプロピレングリコールジ
エチルエーテル等のグリコールエーテル類、酢酸エチ
ル、酢酸ブチル、ブチルセロソルブアセテート、カルビ
トールアセテート等のエステル類、エタノール、プロパ
ノール、エチレングリコール、プロピレングリコールな
どのアルコール類、オクタン、デカンなどの脂肪族炭化
水素、石油エーテル、石油ナフサ、水添石油ナフサ、ソ
ルベントナフサ等の石油系溶剤や2−ヒドロキシエチル
(メタ)アクリレート、2−ヒドロキシプロピル(メ
タ)アクリレート、N−ビニルピロリドン、N−ビニル
カプロラクタム、アクリロイルモルホリン、メトキシテ
トラエチレングリコール(メタ)アクリレート、メトキ
シポリエチレングリコール(メタ)アクリレート、ポリ
エチレングリコールジ(メタ)アクリレート、N,N−
ジメチルアクリルアミド、メラミン(メタ)アクリレー
ト、ジエチレングリコールジ(メタ)アクリレート、ト
リエチレングリコールジ(メタ)アクリレート、プロピ
レングリコールジ(メタ)アクリレート、トリプロピレ
ングリコールジ(メタ)アクリレート、グリセリンジグ
リシジルエーテルジ(メタ)アクリレート、イソボルニ
ル(メタ)アクリレート、あるいはヘキサンジオール、
トリメチロールプロパン、ペンタエリスリトールジトリ
メチロールプロパン、ジペンタエリスリトール、トリス
−ヒドロキシエチルイソシアヌレート等の多価アルコー
ル又はこれらのエチレンオキサイドもしくはプロピレン
オキサイド付加物の多価(メタ)アクリレート類等の光
重合性反応性希釈剤等を挙げることができる。Specific examples of the diluent (B) include, for example, ketones such as ethyl methyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene, methyl cellosolve, butyl cellosolve and methyl carbyl. Tall, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monoethyl ether, glycol ethers such as dipropylene glycol diethyl ether, ethyl acetate, butyl acetate, butyl cellosolve acetate, esters such as carbitol acetate, ethanol, propanol, Alcohols such as ethylene glycol and propylene glycol; aliphatic hydrocarbons such as octane and decane; stones such as petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha Solvent, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, N-vinylpyrrolidone, N-vinylcaprolactam, acryloylmorpholine, methoxytetraethylene glycol (meth) acrylate, methoxypolyethylene glycol (meth) acrylate , Polyethylene glycol di (meth) acrylate, N, N-
Dimethyl acrylamide, melamine (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, glycerin diglycidyl ether di (meth) Acrylate, isobornyl (meth) acrylate, or hexanediol,
Photopolymerizable reactivity of polyhydric alcohols such as trimethylolpropane, pentaerythritol ditrimethylolpropane, dipentaerythritol, tris-hydroxyethyl isocyanurate, and polyhydric (meth) acrylates of ethylene oxide or propylene oxide adduct thereof. Diluents and the like can be mentioned.
【0020】前記の希釈剤(B)は単独または2種以上
の混合物として用いられ、本発明の組成物に含まれる希
釈剤(B)の量は、特定の範囲に限定されるものではな
いが、組成物中、5〜80重量%が好ましく、特に好ま
しくは10〜70重量%である。The diluent (B) is used alone or as a mixture of two or more, and the amount of the diluent (B) contained in the composition of the present invention is not limited to a specific range. In the composition, it is preferably from 5 to 80% by weight, particularly preferably from 10 to 70% by weight.
【0021】光重合開始剤(C)の具体例としては、ア
セトフェノン、2,2−ジエトキシ−2−フェニルアセ
トフェノン、p−ジメチルアミノプロピオフェノン、シ
クロロアセトフェノン、2−メチル−1−〔4−(メチ
ルチオ)フェニル〕−2−モルホリノ−プロパン−1−
オン、2−ベンジル−2−ジメチルアミノ−1−(4−
モルホリノフェニル)−ブタノン−1等のアセトフェノ
ン類、ベンゾフェノン、2−クロロベンゾフェノン、
p,p−ビスジエチルアミノベンゾフェノン、P,P−
ビスジエチルアミノベンゾヘェノン、4−ベンゾイル−
4′−メチルジフェニルサルファイド等のベンゾフェノ
ン類、ベンジル、ベンゾイン、ベンゾインメチルエーテ
ル、ベンゾインイソブチルエーテル等のベンゾインエー
テル類ベンジルジメチルケタール等のケタール類、チオ
キサントン、2−クロロチオキサントン、2,4−ジエ
チルチオキサントン、2−イソプロピルチオキサントン
等のチオキサントン類、アントラキノン、2,4,5−
トリアリールイミダゾール二量体、2,4,6−トリス
−S−トリアジン、2,4,6−トリメチルベンゾイル
ジフェニルホスフィンオキサイド等が挙げられる。これ
らの重合開始剤(c)は、単独でまたは2種以上を組み
合わせて使用することができる。Specific examples of the photopolymerization initiator (C) include acetophenone, 2,2-diethoxy-2-phenylacetophenone, p-dimethylaminopropiophenone, cycloloacetophenone, 2-methyl-1- [4- (Methylthio) phenyl] -2-morpholino-propane-1-
On, 2-benzyl-2-dimethylamino-1- (4-
Acetophenones such as morpholinophenyl) -butanone-1, benzophenone, 2-chlorobenzophenone,
p, p-bisdiethylaminobenzophenone, P, P-
Bisdiethylaminobenzohenone, 4-benzoyl-
Benzophenones such as 4'-methyldiphenyl sulfide; benzoin ethers such as benzyl, benzoin, benzoin methyl ether and benzoin isobutyl ether; ketals such as benzyl dimethyl ketal; thioxanthone; 2-chlorothioxanthone; 2,4-diethylthioxanthone; -Thioxanthones such as isopropylthioxanthone, anthraquinone, 2,4,5-
Triarylimidazole dimer, 2,4,6-tris-S-triazine, 2,4,6-trimethylbenzoyldiphenylphosphine oxide and the like can be mentioned. These polymerization initiators (c) can be used alone or in combination of two or more.
【0022】本発明において、(C)成分の量は、組成
物中、0.1〜30重量%が好ましく、特に好ましく
は、1〜20重量%である。In the present invention, the amount of the component (C) is preferably from 0.1 to 30% by weight, particularly preferably from 1 to 20% by weight in the composition.
【0023】次に、熱硬化性成分(D)の具体例として
は、エポキシ樹脂やブトキシ化メラミン樹脂、メトキシ
化メラミン樹脂、ベンゾグアナミン系共縮合樹脂等のア
ミノ樹脂が挙げられる。これらの中で、特にエポキシ樹
脂が好適である。その代表的ものとしては、例えば、ビ
スフェノールA型エポキシ樹脂、ビスフェノールF型エ
ポキシ樹脂、フェノールノボラック型エポキシ樹脂、ク
レゾールノボラック型エポキシ樹脂、脂環式エポキシ樹
脂、トリスフェノールメタン型エポキシ樹脂、ゴム変性
エポキシ樹脂、トリス(2,3−エポキシプロピル)イ
ソシアヌレート、ジフェニルジグリシジルエーテル、テ
トラメチルジフェニルジグリシジルエーテル等を挙げる
ことかできる。これらエポキシ樹脂を使用する場合、硬
化剤を使用するのが好ましい。硬化剤の具体例として
は、メラミン誘導対、イミダゾール誘導体、ジシアンジ
アミド、フェノール誘導体などの公知のエポキシ硬化剤
等が挙げられる。このような熱硬化性成分は、前記感光
性プレポリマー(A)に対して5〜40重量部配合する
ことか好ましく、これにより少ないと最終的に得られる
本発明の樹脂組成物の最終的に得られる硬化塗膜の耐熱
性、耐溶剤性、耐酸性、密着性、絶縁抵抗等の電気特性
の十分な性能が得られないことがあり、これ以上である
と感光性、現像性が下がる。Next, specific examples of the thermosetting component (D) include amino resins such as epoxy resins, butoxylated melamine resins, methoxylated melamine resins, and benzoguanamine-based co-condensation resins. Of these, epoxy resins are particularly preferred. Typical examples thereof include bisphenol A type epoxy resin, bisphenol F type epoxy resin, phenol novolak type epoxy resin, cresol novolak type epoxy resin, alicyclic epoxy resin, trisphenol methane type epoxy resin, and rubber modified epoxy resin. , Tris (2,3-epoxypropyl) isocyanurate, diphenyl diglycidyl ether, tetramethyl diphenyl diglycidyl ether, and the like. When using these epoxy resins, it is preferable to use a curing agent. Specific examples of the curing agent include a known epoxy curing agent such as a melamine derivative, an imidazole derivative, dicyandiamide, and a phenol derivative. It is preferable that such a thermosetting component is blended in an amount of 5 to 40 parts by weight based on the photosensitive prepolymer (A). The resulting cured coating film may not have sufficient electrical properties such as heat resistance, solvent resistance, acid resistance, adhesion, insulation resistance, etc. If it exceeds this, the photosensitivity and developability will decrease.
【0024】本発明の樹脂組成物には、耐熱性向上、流
動性調整などの目的で、無機質粉末を含有することも可
能であり、その代表的なものとしては、例えば、非結晶
シリカ、アモルファスシリカ、高純度結晶シリカ、タル
ク、クレー、酸化チタン、炭酸カルシウム、水酸化アル
ミニウム、アルミナ、硫酸バリウム、含水珪酸、三酸化
アンチモン、炭酸マグネシウム、マイカ粉、珪酸アルミ
ニウム、珪酸マグネシウム等が挙げられる。The resin composition of the present invention may contain an inorganic powder for the purpose of improving heat resistance and adjusting fluidity, and typical examples thereof include amorphous silica and amorphous powder. Silica, high-purity crystalline silica, talc, clay, titanium oxide, calcium carbonate, aluminum hydroxide, alumina, barium sulfate, hydrated silicate, antimony trioxide, magnesium carbonate, mica powder, aluminum silicate, magnesium silicate, and the like.
【0025】本発明の樹脂組成物には、更に必要に応じ
て、着色剤、シリコン化合物やアクリレート共重合体、
フッ素系界面活性剤等のレベリング剤、シランカップリ
ング剤等の密着付与剤、アエロジル等のチクソトロピー
剤、また、ハイドロキノン、ハイドロキノンモノメチル
エーテル、ピロガロール、ターシャリブチルカテコー
ル、フェノチアジン等の重合禁止剤、また、各種界面活
性剤や高分子分散剤等の分散安定剤、さらにハレーショ
ン防止剤、難燃剤、消泡剤、酸化防止剤等の各種添加剤
を加えても良い。The resin composition of the present invention may further contain a coloring agent, a silicone compound or an acrylate copolymer, if necessary.
Leveling agents such as fluorine-based surfactants, adhesion promoters such as silane coupling agents, thixotropic agents such as Aerosil, and polymerization inhibitors such as hydroquinone, hydroquinone monomethyl ether, pyrogallol, tertiary butyl catechol, and phenothiazine, Various additives such as an antihalation agent, a flame retardant, an antifoaming agent, and an antioxidant may be added.
【0026】本発明の樹脂組成物は、(A)〜(D)成
分及びその他無機質粉末、各種添加剤を加えて混合し、
その混合物を三本ロールミル等で例えば、0.5時間混
合する等により固形分の分散を行ない、分散液として完
成させる。このようにして得られた樹脂組成物は、スク
リーン印刷、カーテンコート法、ロールコート法、スピ
ンコート法、ディップコート法等によりプリント基板上
に10〜150μm(液膜厚)の厚さに塗布した後、6
0〜80℃で15〜60分乾燥した後、有機溶剤等の揮
発分を揮発させた後、その乾燥塗膜に所望の回路パター
ンのネガフィルムを密着させ、その上から紫外線又は電
子線などの放射線を照射する。それから、ネガフィルム
を取り除き、希アルカリ水溶液を現像液として現像する
ことにより非露光領域の塗膜は除去されるが、露光部分
の塗膜は光硬化しているので除去されず残留する。この
際の希アルカリ水溶液としては、0.5〜5重量%の炭
酸ナトリウム水溶液が一般的であるが、他のアルカリ溶
液も使用可能である。次いで、130〜160℃で20
〜90分熱風乾燥機等で熱硬化させることにより硬化物
を得ることができる。The resin composition of the present invention comprises the components (A) to (D), other inorganic powders and various additives,
The mixture is mixed with a three-roll mill or the like, for example, for 0.5 hour to disperse the solid content, thereby completing a dispersion. The resin composition thus obtained was applied to a thickness of 10 to 150 μm (liquid thickness) on a printed circuit board by screen printing, curtain coating, roll coating, spin coating, dip coating, or the like. Later, 6
After drying at 0 to 80 ° C. for 15 to 60 minutes, a volatile film such as an organic solvent is volatilized, and then a negative film of a desired circuit pattern is brought into close contact with the dried coating film. Irradiate radiation. Then, the negative film is removed, and the coating film in the non-exposed area is removed by developing with a diluted alkaline aqueous solution as a developing solution, but the coating film in the exposed portion remains without being removed because it is light-cured. As the diluted alkaline aqueous solution at this time, a 0.5 to 5% by weight aqueous solution of sodium carbonate is generally used, but other alkaline solutions can also be used. Then at 130-160 ° C. for 20
A cured product can be obtained by heat curing with a hot air dryer or the like for 90 minutes.
【0027】本発明の樹脂組成物は、例えばプリント回
路基板等の回路基板のソルダーレジストや層間絶縁層等
の永久レジストとして好ましく使用されるが、これらに
限らず、一般塗料、接着剤等の幅広い用途に適用でき
る。The resin composition of the present invention is preferably used as a solder resist for a circuit board such as a printed circuit board or a permanent resist such as an interlayer insulating layer, but is not limited thereto. Applicable to application.
【0028】[0028]
【実施例】以下、本発明を実施例により更に具体的に説
明する。EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples.
【0029】(カルボキシル基を有する感光性プレポリ
マー(A)の合成例) 合成例1 o−クレゾール・ノボラック型エポキシ樹脂(日本化薬
(株)製、EOCN−104S、軟化点92℃、エポキ
シ当量(220)2200g(10当量)、アクリル酸
641g(8.9モル)、メチルハイドロキノン1.7
g、テトラヒドロ無水フタル酸76g(0.5モル)、
カルビトールアセテート1361g及びソルベントナフ
サ583.7gを仕込み、90℃に加熱攪拌し、反応混
合物を溶解した。次いで反応液を60℃まで冷却し、ト
リフェニルホスフィン14.5gを仕込み、100℃に
加熱し、約32時間反応し、酸価(mgKOH/g)が
3.0以下になったら、次いで60℃まで冷却し、テト
ラヒドロ無水フタル酸1089g(7.16モル)、カ
ルビトールアセテート508.2g及びソルベントナフ
サ217.8gを仕込み、95℃で10時間反応を行な
い、カルボキシル基を有する感光性プレポリマー(A−
1)を得た。生成物(固形分)の平均分子量は約2万で
酸価(固形分、mgKOH/g)は100であった。(Synthesis Example of Photosensitive Prepolymer (A) Having Carboxyl Group) Synthesis Example 1 o-cresol novolak type epoxy resin (manufactured by Nippon Kayaku Co., Ltd., EOCN-104S, softening point 92 ° C., epoxy equivalent) (220) 2200 g (10 equivalents), acrylic acid 641 g (8.9 mol), methylhydroquinone 1.7
g, tetrahydrophthalic anhydride 76 g (0.5 mol),
1361 g of carbitol acetate and 583.7 g of solvent naphtha were charged and heated and stirred at 90 ° C. to dissolve the reaction mixture. Next, the reaction solution was cooled to 60 ° C., charged with 14.5 g of triphenylphosphine, heated to 100 ° C., reacted for about 32 hours, and when the acid value (mg KOH / g) became 3.0 or less, then 60 ° C. The mixture was cooled to 1089 g (7.16 mol) of tetrahydrophthalic anhydride, 508.2 g of carbitol acetate and 217.8 g of solvent naphtha, and reacted at 95 ° C. for 10 hours to obtain a photosensitive prepolymer having a carboxyl group (A). −
1) was obtained. The average molecular weight of the product (solid content) was about 20,000 and the acid value (solid content, mgKOH / g) was 100.
【0030】合成例2 トリスフェノールメタン型エポキシ樹脂(日本化薬
(株)製、EPPN−503、軟化点81.5℃、エポ
キシ当量178.5)1785g(10当量)、アクリ
ル酸691.7g(9.6モル)、カルビトールアセテ
ート707.6g、メチルハイドロキノン1.7gを仕
込み、90℃に加熱攪拌し、反応混合物を溶解した。次
いで反応液を60℃まで冷却し、トリフェニルホスフィ
ン10.6gを仕込み、100℃に加熱し、酸価(mg
KOH/g)が85になった時に、テトラヒドロ無水フ
タル酸22.8g(0.15モル)を仕込み、反応を継
続し、酸価(mgKOH/g)が3.0以下になった
ら、次いで60℃まで冷却し、テトラヒドロ無水フタル
酸870.4g(5.73モル)、カルビトールアセテ
ート870.8g及びソルベントナフサ676.4gを
仕込み、95℃で10時間反応を行ない、カルボキシル
基を有する感光性プレポリマー(A−2)を得た。生成
物(固形分)の平均分子量は約1.5万で酸価(固形
分、mgKOH/g)は、95であった。Synthesis Example 2 1785 g (10 equivalents) of trisphenol methane type epoxy resin (EPPN-503, Nippon Kayaku Co., Ltd., softening point 81.5 ° C., epoxy equivalent 178.5), 691.7 g of acrylic acid ( 9.6 mol), 707.6 g of carbitol acetate and 1.7 g of methylhydroquinone were charged and heated and stirred at 90 ° C. to dissolve the reaction mixture. Next, the reaction solution was cooled to 60 ° C., 10.6 g of triphenylphosphine was charged, and the mixture was heated to 100 ° C. to obtain an acid value (mg
When the (KOH / g) became 85, 22.8 g (0.15 mol) of tetrahydrophthalic anhydride was charged, the reaction was continued, and when the acid value (mgKOH / g) became 3.0 or less, then 60 After cooling to 87.degree. C., 870.4 g (5.73 mol) of tetrahydrophthalic anhydride, 870.8 g of carbitol acetate and 676.4 g of solvent naphtha were charged and reacted at 95.degree. C. for 10 hours to obtain a photosensitive prepolymer having a carboxyl group. Polymer (A-2) was obtained. The average molecular weight of the product (solid content) was about 15,000, and the acid value (solid content, mgKOH / g) was 95.
【0031】(比較例のための合成例) 合成例3 o−クレゾール・ノボラック型エポキシ樹脂(日本化薬
(株)製、EOCN−104S、軟化点92℃、エポキ
シ当量220)2200g(10当量)、アクリル酸7
13.4g(9.9モル)、メチルハイドロキノン1.
7g,カルビトールアセテート1359g及びソルベン
トナフサ583.6gを仕込み、90℃に加熱攪拌し、
反応混合物を溶解した。次いで反応液を60℃まで冷却
し、トリフェニルホスフィン14.6gを仕込み、10
0℃に加熱し、約32時間反応し、酸価(mgKOH/
g)が3.0以下になったら、次いで60℃まで冷却
し、テトラヒドロ無水フタル酸1087.9g(7.1
6モル)、カルビトールアセテート410g及びソルベ
ントナフサ176gを仕込み95℃で10時間反応を行
ない、カルボキシル基を有する感光生プレポリマー(A
−3)を得た。生成物(固形分)の平均分子量は、約7
500で酸価(固形分、mgKOH/g)は100であ
った。(Synthesis Example for Comparative Example) Synthesis Example 3 2,200 g (10 equivalents) of o-cresol novolak type epoxy resin (EOCN-104S, Nippon Kayaku Co., Ltd., softening point 92 ° C., epoxy equivalent 220) , Acrylic acid 7
13.4 g (9.9 mol), methylhydroquinone 1.
7 g, 1359 g of carbitol acetate and 583.6 g of solvent naphtha were charged, and heated and stirred at 90 ° C.
The reaction mixture was dissolved. Then, the reaction solution was cooled to 60 ° C., and 14.6 g of triphenylphosphine was charged and 10
Heat to 0 ° C. and react for about 32 hours, acid value (mgKOH /
g) is 3.0 or less, then cooled to 60 ° C. and 1087.9 g of tetrahydrophthalic anhydride (7.1
6 mol), 410 g of carbitol acetate and 176 g of solvent naphtha, and reacted at 95 ° C. for 10 hours to obtain a carboxyl-containing photosensitive prepolymer (A).
-3) was obtained. The average molecular weight of the product (solids) is about 7
At 500, the acid value (solid content, mgKOH / g) was 100.
【0032】実施例1、2 比較例1 表1に示す配合組成(数値は重量部である。)に従っ
て、永久レジスト樹脂組成物を混合、分散、混練し調製
した。得られた組成物を積層板上に30μmの厚みで塗
布し、80℃で60分間乾燥し、次いでレジスト上にネ
ガマスクを接触させ、超高圧水銀灯を用いて紫外線を照
射した。未露光部分を1.5%Na2 CO3 水溶液で6
0秒間、2.0kg/cm2 のスプレー圧で現像した。
(現像前に加熱処理することもできる。)水洗乾燥後、
全面に紫外線を照射後、150℃で30分間加熱処理を
行なった。これを70℃で無電解銅メッキ液に10時間
浸漬し、約20μmの無電解銅メッキ皮膜を形成し、ア
デイテイブ法多層プリント配線板を作製した。このよう
にしてアデイテイブ法多層プリント配線板が得られる過
程でのレジスト特性について評価した結果を表1に示
す。Examples 1 and 2 Comparative Example 1 A permanent resist resin composition was mixed, dispersed and kneaded in accordance with the composition shown in Table 1 (the numerical values are parts by weight). The obtained composition was applied on a laminate at a thickness of 30 μm, dried at 80 ° C. for 60 minutes, then brought into contact with a negative mask on the resist, and irradiated with ultraviolet rays using an ultra-high pressure mercury lamp. The unexposed portion is treated with 1.5% Na 2 CO 3 aqueous solution 6
Development was performed for 0 second at a spray pressure of 2.0 kg / cm 2 .
(It can be heat-treated before development.)
After irradiating the entire surface with ultraviolet rays, a heat treatment was performed at 150 ° C. for 30 minutes. This was immersed in an electroless copper plating solution at 70 ° C. for 10 hours to form an electroless copper plating film of about 20 μm, thereby producing an additive-processed multilayer printed wiring board. Table 1 shows the results of evaluating the resist characteristics in the process of obtaining the additive multilayer printed wiring board in this manner.
【0033】評価方法 (現像性) ○・・・・現像時、完全にインキが除去され、完全な現
像ができた。 ×・・・・現像時、少しでも残渣が残っており、現像さ
れない部分がある。 (光感度)乾燥後の塗膜に、ステップタブレット21段
(ストファー社製)を密着させ積算光量300mJ/c
m2 の紫外線を照射露光する。次に1.5%Na2 CO
3水溶液で60秒間、2.0kg/cm2 のスプレー圧
で現像し、現像されずに残った塗膜の段数を確認する。
下記の基準を使用した。 ○・・・・9段以上 △・・・・6〜8段 ×・・・・5段以下Evaluation method (developability) ・ ・ ・: At the time of development, ink was completely removed and complete development was possible. ×: At the time of development, a small amount of residue remains, and there is a part that is not developed. (Light sensitivity) 21 steps of step tablets (manufactured by Stoffer) are adhered to the dried coating film, and the integrated light amount is 300 mJ / c.
Irradiation with ultraviolet rays of m 2 is performed. Next, 1.5% Na 2 CO
(3) Develop with an aqueous solution for 60 seconds at a spray pressure of 2.0 kg / cm 2 , and confirm the number of steps of the coating film that has not been developed.
The following criteria were used: ○ ・ ・ ・ 9 steps or more △ ・ ・ ・ ・ 6 ~ 8 steps × ・ ・ ・ ・ 5 steps or less
【0034】(耐溶剤性)レジスト硬化膜をアセトン2
0分間浸漬しその状態を目視した。 ○・・・・全く変化がなかった。 ×・・・・フクレやハクリが発生した。 (耐メッキ液) ○・・・・無電解メッキ工程で全く変化が見られない。 ×・・・・無電解メッキ工程で変色、フクレやハクリが
発生した。 (半田耐熱性)JIS C 6481の試験方法に従っ
て、260℃で半田浴への試験片を10秒浸漬を3回又
は2回行い、外観の変化を評価した。(Solvent resistance) The cured resist film is made of acetone 2
It was immersed for 0 minutes and the condition was visually observed. ○ ・ ・ ・ ・ No change at all. ×: blisters and peeling occurred. (Plating resistance) ○ ・ ・ ・ ・ No change is observed in the electroless plating process. C: Discoloration, blistering, and peeling occurred in the electroless plating process. (Solder Heat Resistance) According to the test method of JIS C6481, the test piece was immersed in a solder bath at 260 ° C. for 10 seconds three or two times, and the change in appearance was evaluated.
【0035】(ポストフラックス耐性)10秒浸漬を3
回行ない、外観の変化を評価した。 ○・・・・外観変化なし △・・・・硬化膜の変色が認められるもの ×・・・・硬化膜の浮き、剥れ、半田潜りあり 注)使用したポストフラックス(ロジン系):JIS
C 6481に従ったフラックスを使用。(Post-flux resistance)
It was rotated and the change in appearance was evaluated. ○ ・ ・ ・ ・ No change in appearance △ ・ ・ ・ ・ Discoloration of the cured film is observed × ・ ・ ・ ・ Floating, peeling and solder dipping of the cured film Note) Post flux used (rosin type): JIS
Use flux according to C 6481.
【0036】(レベラー用フラックス耐性)10秒浸漬
を3回行ない、煮沸水に10分間浸漬後、外観の変化を
評価した。 ○・・・・外観変化なし △・・・・硬化膜の変色が認められるもの ×・・・・硬化膜の浮き、剥れ、半田潜りあり 注)使用したレベラー用フラックス:(株)メック製、
W−121(Flux resistance for leveler) Dipping for 10 seconds was performed three times, and after immersing in boiling water for 10 minutes, the change in appearance was evaluated. ○ ・ ・ ・ No change in appearance △ ・ ・ ・ ・ Discoloration of the cured film is observed × ・ ・ ・ ・ Floating, peeling and solder dipping of the cured film Note) Flux for leveler used: manufactured by MEC Corporation ,
W-121
【0037】[0037]
【表1】 表1 実施例 比較例 1 2 1 合成例1で得た感光性プレポリマー(A−1) 74.7 合成例1で得た感光性プレポリマー(A−2) 74.7 合成例1で得た感光性プレポリマー(A−3) 69 KAYARAD DPHA *1 3.5 3.5 3.5 イルガキュアー 907 *2 3.0 3.0 3.0 KAYACURE DETX−S *3 0.5 0.5 0.5 EPPN−201 *4 10.0 10.0 10.0 カルビトールアセテート 10.0 10.0 10.0 二酸化シリカ 30 30 30 アエロジル380 *5 3 3 3 フタロシアニングリーン(着色顔料) 1.8 1.8 1.8 ジシアンジアミド(エポキシ硬化剤) 0.5 0.5 0.5 現像性 ○ ○ ○ 光感度 ○ ○ △ 耐メッキ液 ○ ○ × 半田耐熱性 ポストフラックス耐性 ○ ○ ○ レベラー用フラックス耐性 ○ ○ △Table 1 Example 1 Comparative Example 12 1 Photosensitive Prepolymer (A-1) Obtained in Synthesis Example 1 74.7 Photosensitive Prepolymer (A-2) Obtained in Synthesis Example 1 74.7 Obtained in Synthesis Example 1 Photosensitive prepolymer (A-3) 69 KAYARAD DPHA * 1 3.5 3.5 3.5 Irgacure 907 * 2 3.0 3.0 3.0 KAYACURE DETX-S * 3 0.5 0.5 0.5 EPPN-201 * 4 10.0 10.0 10.0 Carbitol acetate 10.0 10.0 10.0 Dioxide Silica 30 30 30 Aerosil 380 * 5 3 3 3 Phthalocyanine green (color pigment) 1.8 1.8 1.8 Dicyandiamide (epoxy hardener) 0.5 0.5 0.5 Developability ○ ○ ○ Photosensitivity ○ ○ △ Plating solution ○ ○ × Soldering heat resistance Post flux Resistance ○ ○ ○ Flux resistance for leveler ○ ○ △
【0038】注) *1 KAYARAD DPH
A:日本化薬(株)製、ジペンタエリスリトールペンタ
及びヘキサアクリレート混合物。 *2 イルガキュアー907:チバ・ガイギー
(株)製、光重合開始剤。 *3 KAYACURE DETX−S:日本化薬
(株)製、光重合開始剤。 *4 EPPN−201:日本化薬(株)製、フェ
ノール・ノボラック型エポキシ樹脂。 *5 アエロジル380:日本アエロジル(株)
製、無水シリカNote) * 1 KAYARAD DPH
A: Nippon Kayaku Co., Ltd. mixture of dipentaerythritol penta and hexaacrylate. * 2 Irgacure 907: a photopolymerization initiator manufactured by Ciba-Geigy Corporation. * 3 KAYACURE DETX-S: Nippon Kayaku Co., Ltd. photopolymerization initiator. * 4 EPPN-201: a phenol novolak type epoxy resin manufactured by Nippon Kayaku Co., Ltd. * 5 Aerosil 380: Japan Aerosil Co., Ltd.
Made, anhydrous silica
【0039】表1の評価結果から、本発明の樹脂組成物
は、感光性に優れ、その硬化物は、耐メッキ液性、耐熱
性に優れている。From the evaluation results shown in Table 1, the resin composition of the present invention is excellent in photosensitivity, and the cured product is excellent in plating solution resistance and heat resistance.
【0040】[0040]
【発明の効果】本発明の樹脂組成物、永久レジスト樹脂
組成物及びその硬化物は、高感度、高解像度で、かつ、
希アルカリ水溶液による現像が容易であるにもかかわら
ず、耐溶剤性、高温、高アルカリ性条件下で長時間行な
われる無電解メッキに対する耐メッキ液性に優れ、更に
は、はんだ付け工程の260℃前後の温度にも耐える耐
熱性をもそなえたプリント配線板の製造に特に適してい
る。The resin composition, the permanent resist resin composition and the cured product of the present invention have high sensitivity, high resolution, and
Despite easy development with dilute alkali aqueous solution, it has excellent solvent resistance, plating solution resistance to electroless plating performed for a long time under high temperature and high alkalinity conditions, and around 260 ° C. in the soldering process It is particularly suitable for manufacturing a printed wiring board having heat resistance to withstand the above temperatures.
Claims (5)
有するエポキシ樹脂(a)と(a)のエポキシ当量当た
り0.80〜0.99モルの(メタ)アクリル酸(b)
と0.01〜0.2モルの二塩基酸又はその無水物
(c)との反応生成物(d)と多塩基酸無水物(e)と
の反応生成物であるカルボキシル基を有する感光性プレ
ポリマー(A)、希釈剤(B)、光重合開始剤(C)及
び熱硬化性成分(D)を含有する樹脂組成物。1. An epoxy resin (a) having at least two epoxy groups in one molecule and 0.80 to 0.99 mol of (meth) acrylic acid (b) per epoxy equivalent of (a)
Having a carboxyl group, which is a reaction product of a reaction product (d) of a polybasic acid anhydride (e) with a dibasic acid or its anhydride (c) in an amount of 0.01 to 0.2 mol. A resin composition containing a prepolymer (A), a diluent (B), a photopolymerization initiator (C), and a thermosetting component (D).
シ樹脂である請求項1記載の樹脂組成物。2. The resin composition according to claim 1, wherein the epoxy resin (a) is a novolak type epoxy resin.
タン型エポキシ樹脂である請求項1記載の樹脂組成物。3. The resin composition according to claim 1, wherein the epoxy resin (a) is a trisphenolmethane type epoxy resin.
いし3のいずれかに記載の樹脂組成物。4. The resin composition according to claim 1, which is a permanent resist for a circuit board.
物。5. A cured product of the resin composition according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9213897A JPH1143533A (en) | 1997-07-25 | 1997-07-25 | Resin composition, permanent resist resin composition, and their cured product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9213897A JPH1143533A (en) | 1997-07-25 | 1997-07-25 | Resin composition, permanent resist resin composition, and their cured product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1143533A true JPH1143533A (en) | 1999-02-16 |
Family
ID=16646834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9213897A Pending JPH1143533A (en) | 1997-07-25 | 1997-07-25 | Resin composition, permanent resist resin composition, and their cured product |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1143533A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002173518A (en) * | 2000-09-28 | 2002-06-21 | Dainippon Ink & Chem Inc | Method for producing energy ray-curable resin and energy ray-curable resin composition |
| JP2002234932A (en) * | 2001-02-09 | 2002-08-23 | Nippon Kayaku Co Ltd | Epoxy carboxylate compound soluble in alkali aqueous solution photosensitive resin composition using the same and its cured product |
| JP2003107694A (en) * | 2001-09-27 | 2003-04-09 | Sumitomo Chem Co Ltd | Resin composition |
| JP2017190403A (en) * | 2016-04-14 | 2017-10-19 | 日本化薬株式会社 | Epoxy resin, reactive carboxylate compound, curable resin composition using the same, and use thereof |
-
1997
- 1997-07-25 JP JP9213897A patent/JPH1143533A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002173518A (en) * | 2000-09-28 | 2002-06-21 | Dainippon Ink & Chem Inc | Method for producing energy ray-curable resin and energy ray-curable resin composition |
| JP2002234932A (en) * | 2001-02-09 | 2002-08-23 | Nippon Kayaku Co Ltd | Epoxy carboxylate compound soluble in alkali aqueous solution photosensitive resin composition using the same and its cured product |
| JP2003107694A (en) * | 2001-09-27 | 2003-04-09 | Sumitomo Chem Co Ltd | Resin composition |
| JP2017190403A (en) * | 2016-04-14 | 2017-10-19 | 日本化薬株式会社 | Epoxy resin, reactive carboxylate compound, curable resin composition using the same, and use thereof |
| KR20170117881A (en) * | 2016-04-14 | 2017-10-24 | 닛뽄 가야쿠 가부시키가이샤 | Reactive epoxy carboxylate compound, reactive polycarboxylic acid compound, and active energy ray curable resin composition and use thereof |
| TWI726088B (en) * | 2016-04-14 | 2021-05-01 | 日商日本化藥股份有限公司 | Epoxy resin, reactive carboxylate compound, curable resin composition using the same, and uses thereof |
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