JPH1148129A5 - - Google Patents
Info
- Publication number
- JPH1148129A5 JPH1148129A5 JP1997213174A JP21317497A JPH1148129A5 JP H1148129 A5 JPH1148129 A5 JP H1148129A5 JP 1997213174 A JP1997213174 A JP 1997213174A JP 21317497 A JP21317497 A JP 21317497A JP H1148129 A5 JPH1148129 A5 JP H1148129A5
- Authority
- JP
- Japan
- Prior art keywords
- resin
- polishing
- fluororesin
- lands
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21317497A JPH1148129A (ja) | 1997-08-07 | 1997-08-07 | 研磨パッド及び板状材の研磨方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21317497A JPH1148129A (ja) | 1997-08-07 | 1997-08-07 | 研磨パッド及び板状材の研磨方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1148129A JPH1148129A (ja) | 1999-02-23 |
| JPH1148129A5 true JPH1148129A5 (2) | 2005-05-26 |
Family
ID=16634779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21317497A Withdrawn JPH1148129A (ja) | 1997-08-07 | 1997-08-07 | 研磨パッド及び板状材の研磨方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1148129A (2) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100471527B1 (ko) * | 1999-03-30 | 2005-03-09 | 가부시키가이샤 니콘 | 연마체, 연마장치, 연마방법 및 반도체 소자의 제조방법 |
| KR100857504B1 (ko) | 2000-12-01 | 2008-09-08 | 도요 고무 고교 가부시키가이샤 | 연마 패드용 쿠션층 |
| JP4621014B2 (ja) * | 2004-12-10 | 2011-01-26 | 東洋ゴム工業株式会社 | 研磨パッドおよび半導体デバイスの製造方法 |
| JP5080769B2 (ja) * | 2006-09-15 | 2012-11-21 | 株式会社東京精密 | 研磨方法及び研磨装置 |
| JP2015096286A (ja) * | 2013-11-15 | 2015-05-21 | 株式会社ツールバンク | 研磨パッド |
| JP2015150635A (ja) * | 2014-02-13 | 2015-08-24 | 株式会社東芝 | 研磨布および研磨布の製造方法 |
-
1997
- 1997-08-07 JP JP21317497A patent/JPH1148129A/ja not_active Withdrawn
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