JPH11512232A5 - - Google Patents

Info

Publication number
JPH11512232A5
JPH11512232A5 JP1997510427A JP51042797A JPH11512232A5 JP H11512232 A5 JPH11512232 A5 JP H11512232A5 JP 1997510427 A JP1997510427 A JP 1997510427A JP 51042797 A JP51042797 A JP 51042797A JP H11512232 A5 JPH11512232 A5 JP H11512232A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997510427A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11512232A (ja
Filing date
Publication date
Priority claimed from US08/621,627 external-priority patent/US6086680A/en
Application filed filed Critical
Publication of JPH11512232A publication Critical patent/JPH11512232A/ja
Publication of JPH11512232A5 publication Critical patent/JPH11512232A5/ja
Pending legal-status Critical Current

Links

JP9510427A 1995-08-22 1996-08-22 低質量サセプタ Pending JPH11512232A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US263295P 1995-08-22 1995-08-22
US60/002,632 1995-08-22
US08/621,627 US6086680A (en) 1995-08-22 1996-03-26 Low-mass susceptor
US08/621,627 1996-03-26
PCT/US1996/013575 WO1997008743A1 (en) 1995-08-22 1996-08-22 Low mass susceptor

Publications (2)

Publication Number Publication Date
JPH11512232A JPH11512232A (ja) 1999-10-19
JPH11512232A5 true JPH11512232A5 (2) 2004-09-09

Family

ID=26670648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9510427A Pending JPH11512232A (ja) 1995-08-22 1996-08-22 低質量サセプタ

Country Status (5)

Country Link
US (1) US6086680A (2)
EP (1) EP0846335A1 (2)
JP (1) JPH11512232A (2)
KR (1) KR100444756B1 (2)
WO (1) WO1997008743A1 (2)

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TWI845682B (zh) 2019-05-22 2024-06-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 工件基座主體
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TWI861334B (zh) 2020-01-21 2024-11-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 用於均勻沉積之具有側壁隆起的基座及處理結晶基材之方法
TWI888578B (zh) 2020-06-23 2025-07-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 基座及反應腔室
TWI889919B (zh) 2020-10-21 2025-07-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 用於可流動間隙填充之方法及裝置
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