JPH1165094A5 - - Google Patents

Info

Publication number
JPH1165094A5
JPH1165094A5 JP1997240276A JP24027697A JPH1165094A5 JP H1165094 A5 JPH1165094 A5 JP H1165094A5 JP 1997240276 A JP1997240276 A JP 1997240276A JP 24027697 A JP24027697 A JP 24027697A JP H1165094 A5 JPH1165094 A5 JP H1165094A5
Authority
JP
Japan
Prior art keywords
storage case
original plate
original
energy beam
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997240276A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1165094A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP24027697A priority Critical patent/JPH1165094A/ja
Priority claimed from JP24027697A external-priority patent/JPH1165094A/ja
Publication of JPH1165094A publication Critical patent/JPH1165094A/ja
Publication of JPH1165094A5 publication Critical patent/JPH1165094A5/ja
Pending legal-status Critical Current

Links

JP24027697A 1997-08-22 1997-08-22 収納ケース、露光装置及びデバイス製造装置 Pending JPH1165094A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24027697A JPH1165094A (ja) 1997-08-22 1997-08-22 収納ケース、露光装置及びデバイス製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24027697A JPH1165094A (ja) 1997-08-22 1997-08-22 収納ケース、露光装置及びデバイス製造装置

Publications (2)

Publication Number Publication Date
JPH1165094A JPH1165094A (ja) 1999-03-05
JPH1165094A5 true JPH1165094A5 (mo) 2006-06-15

Family

ID=17057091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24027697A Pending JPH1165094A (ja) 1997-08-22 1997-08-22 収納ケース、露光装置及びデバイス製造装置

Country Status (1)

Country Link
JP (1) JPH1165094A (mo)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002252162A (ja) * 2001-02-26 2002-09-06 Nikon Corp Ｘ線反射マスク、その保護方法、ｘ線露光装置及び半導体デバイスの製造方法
DE10164529C1 (de) * 2001-12-18 2003-10-09 Jenoptik Laser Optik Sys Gmbh Einrichtung zur Aufbewahrung und zum Transport von mindestens einem optischen Bauelement
WO2003079419A1 (en) * 2002-03-15 2003-09-25 Nikon Corporation Mask storage device, exposure device, and device manufacturing method
JP5620039B2 (ja) * 2003-08-01 2014-11-05 カール・ツァイス・エスエムティー・ゲーエムベーハー 少なくとも１つのシステム絞りを備えた光学結像装置
FR2869451B1 (fr) * 2004-04-21 2006-07-21 Alcatel Sa Enveloppe de transport a protection par effet thermophorese
FR2869452B1 (fr) * 2004-04-21 2006-09-08 Alcatel Sa Dispositif pour le transport de substrats sous atmosphere controlee
US7361911B2 (en) * 2004-12-09 2008-04-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWI522292B (zh) * 2007-11-15 2016-02-21 尼康股份有限公司 A mask case, a conveyance device, an exposure apparatus, a mask transfer method, and a device manufacturing method
JP5724564B2 (ja) * 2010-04-13 2015-05-27 株式会社ニコン マスクケース、マスクユニット、露光装置、基板処理装置及びデバイス製造方法
CN113264286A (zh) * 2021-06-01 2021-08-17 长鑫存储技术有限公司 光罩保护盒及光罩传送设备
US12125726B2 (en) 2021-07-19 2024-10-22 Changxin Memory Technologies, Inc. Mask pod and semiconductor device
CN115639719B (zh) * 2021-07-19 2025-05-27 长鑫存储技术有限公司 光罩盒及半导体设备

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