JPH1179455A - Medium carrying device and manufacture therefor - Google Patents
Medium carrying device and manufacture thereforInfo
- Publication number
- JPH1179455A JPH1179455A JP26266497A JP26266497A JPH1179455A JP H1179455 A JPH1179455 A JP H1179455A JP 26266497 A JP26266497 A JP 26266497A JP 26266497 A JP26266497 A JP 26266497A JP H1179455 A JPH1179455 A JP H1179455A
- Authority
- JP
- Japan
- Prior art keywords
- medium
- transport
- strip
- stator
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 8
- 238000007865 diluting Methods 0.000 claims description 2
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 abstract description 12
- 229920002050 silicone resin Polymers 0.000 abstract description 7
- 239000002904 solvent Substances 0.000 abstract description 6
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000002791 soaking Methods 0.000 abstract 1
- 239000002609 medium Substances 0.000 description 65
- 239000006163 transport media Substances 0.000 description 48
- 229920005989 resin Polymers 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- 238000002474 experimental method Methods 0.000 description 15
- 238000012546 transfer Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000011295 pitch Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 238000012795 verification Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000003203 everyday effect Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、複写機、プリン
タ、ファクシミリ、現金自動入出金装置等において、用
紙その他の媒体を装置各部に搬送するために用いられる
媒体搬送装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a medium transport device used for transporting paper and other media to various parts of a copying machine, a printer, a facsimile, an automatic cash dispensing device, and the like.
【0002】[0002]
【従来の技術】従来、複写機、プリンタ、ファクシミ
リ、現金自動入出金装置等に用いられる媒体搬送装置と
しては、ゴムローラを用いた回転型電磁モータ駆動の媒
体搬送装置が一般的であった。ところが、この装置は、
回転型電磁モータ自体の消費電力が大きいことや、発熱
量も大きいことが、問題であった。更に、回転型電磁モ
ータや多数のゴムローラを装置内部に配置するため、装
置が大型になり小形化するにも限界があった。2. Description of the Related Art Heretofore, as a medium transfer device used for a copying machine, a printer, a facsimile, an automatic cash dispenser, and the like, a medium transfer device driven by a rotary electromagnetic motor using a rubber roller has been generally used. However, this device
The problem is that the power consumption of the rotary electromagnetic motor itself is large and the amount of heat generated is also large. Furthermore, since a rotary electromagnetic motor and a large number of rubber rollers are arranged inside the apparatus, there is a limit to the size and size of the apparatus.
【0003】そこで、これらの問題を改善するために、
近年静電アクチュエータを用いた媒体搬送装置の技術開
発が進行中である。この技術は、例えば『特開平2−2
85978号公報』により紹介されている。この装置
は、絶縁層内部に帯状電極を有する固定子と、同じく絶
縁層内部に帯状電極を有する移動子から構成される。固
定子と移動子双方の帯状電極に直流電圧を印加して双方
の帯状電極間に発生する静電気力を用いて移動子を移動
させている。[0003] In order to improve these problems,
In recent years, technical development of a medium transport device using an electrostatic actuator is in progress. This technique is described in, for example,
No. 859778]. This device is composed of a stator having a strip electrode inside an insulating layer and a moving element also having a strip electrode inside the insulating layer. A DC voltage is applied to the strip electrodes of both the stator and the mover, and the mover is moved by using an electrostatic force generated between the two strip electrodes.
【0004】[0004]
【発明が解決しようとする課題】ところで、上記のよう
な静電アクチュエータを用いた媒体搬送装置には、以下
に記すような解決すべき課題が残されていた。この装置
の搬送力は、誘電分極によって絶縁体表面に発生する正
負の静電荷の電荷量に、比例する。その電荷量は、固定
子の基材及び帯状電極周辺の絶縁層を形成する、絶縁材
料の絶縁抵抗値に大きく依存する。一方、この絶縁材料
の絶縁抵抗値は、環境特性、特に耐湿特性に大きく依存
する。従って、梅雨時等、湿度の高い環境では、媒体搬
送力が著しく低下する、という解決すべき課題が残され
ていた。By the way, the medium conveying apparatus using the above-mentioned electrostatic actuator has the following problems to be solved. The transport force of this device is proportional to the amount of positive and negative electrostatic charges generated on the insulator surface by dielectric polarization. The charge amount largely depends on the insulation resistance value of the insulating material forming the insulating layer around the base material of the stator and the strip electrodes. On the other hand, the insulation resistance value of this insulating material greatly depends on environmental characteristics, particularly, moisture resistance characteristics. Therefore, in a high humidity environment such as during the rainy season, there is a problem to be solved that the medium conveyance force is significantly reduced.
【0005】[0005]
【課題を解決するための手段】本発明は、以上の点を解
決するために、次の構成を採用する。〈構成1〉搬送路
を搬送される搬送対象物に、所定の静電気力を加えて、
所定の方向へ搬送する固定子を備え、この固定子には、
基材上に形成した複数の帯状電極と、この基材上で帯状
電極を覆う絶縁層と、上記基材と絶縁層全体を覆う防湿
層を設けたことを特徴とする媒体搬送装置。The present invention adopts the following constitution in order to solve the above points. <Configuration 1> A predetermined electrostatic force is applied to an object to be conveyed along the conveyance path,
It has a stator that conveys it in a predetermined direction.
A medium transport device comprising: a plurality of strip electrodes formed on a base; an insulating layer covering the strip electrodes on the base; and a moisture-proof layer covering the entire base and the insulating layer.
【0006】〈構成2〉搬送路を搬送される搬送対象物
に、所定の静電気力を加えて、所定の方向へ搬送する固
定子を製造する場合において、基材上に複数の帯状電極
を形成し、この基材上で帯状電極を覆うように絶縁層を
形成し、乾燥処理をした後、低湿度雰囲気下40℃以上
に加熱した状態で、溶剤に対するシリコン系樹脂の割合
を、70重量%以上90重量%以下で希釈し、真空脱泡
したものに浸漬して、防湿層を形成することを特徴とす
る媒体搬送装置の製造方法。<Structure 2> A plurality of band-shaped electrodes are formed on a base material when a stator to be conveyed in a predetermined direction is applied by applying a predetermined electrostatic force to an object to be conveyed along a conveyance path. Then, an insulating layer is formed on the base material so as to cover the strip-shaped electrodes, dried, and then heated to 40 ° C. or more in a low humidity atmosphere, and the ratio of the silicon-based resin to the solvent is reduced to 70% by weight. A method for manufacturing a medium transporting device, comprising diluting at not less than 90% by weight and immersing in a vacuum-defoamed material to form a moisture-proof layer.
【0007】〈構成3〉搬送路を搬送される搬送対象物
に、所定の静電気力を加えて、所定の方向へ搬送する固
定子を備え、この固定子には、基材上に形成した複数の
帯状電極と、この基材上の帯状電極と上記基材全体を覆
う防湿層を設けたことを特徴とする媒体搬送装置。<Structure 3> There is provided a stator for applying a predetermined electrostatic force to a transfer object transferred on a transfer path and transferring the object in a predetermined direction, and the stator includes a plurality of stators formed on a base material. A belt-like electrode, and a moisture-proof layer covering the whole of the substrate and the band-shaped electrode on the substrate.
【0008】[0008]
【発明の実施の形態】以下、本発明を図示の実施の形態
について詳細に説明する。図1は、具体例1の構成図で
ある。本発明による媒体搬送装置の説明をする前に発明
の理解を容易にするために媒体搬送装置の主要部であ
る、静電アクチュエータについて図を用いて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the illustrated embodiments. FIG. 1 is a configuration diagram of the first specific example. Before describing the medium transport apparatus according to the present invention, an electrostatic actuator, which is a main part of the medium transport apparatus, will be described with reference to the drawings to facilitate understanding of the invention.
【0009】(静電アクチュエータの構成)図2は、静
電アクチュエータの斜視図である。静電アクチュエータ
は、固定子1と搬送媒体2を備える。固定子1は、基材
11と、帯状電極12と、絶縁層13とから構成されて
いる。基材11は、絶縁体であり、ガラス、エポキシ系
樹脂、フッ素系樹脂、繊維混入樹脂、ポリイミド系樹
脂、等を用いることができる。(Structure of Electrostatic Actuator) FIG. 2 is a perspective view of the electrostatic actuator. The electrostatic actuator includes a stator 1 and a transport medium 2. The stator 1 includes a base material 11, a strip electrode 12, and an insulating layer 13. The base material 11 is an insulator, and glass, an epoxy resin, a fluorine resin, a fiber-mixed resin, a polyimide resin, or the like can be used.
【0010】帯状電極12は、金、銀、銅等、導電性材
料であれば良い。基材11の上に無電界メッキ、箔張り
付け等した後、エッチング等によって形成される。電極
ピッチ及び電極幅は、この静電アクチュエータの目的、
用途に応じて設計される。更に複数の帯状電極12は、
3相に相別接続されている。以後3相のそれぞれをA
相、B相、C相と名付け、A相に接続された電極を12
A、B相に接続された電極を12B、C相に接続された
電極を12Cと記す。The strip electrode 12 may be made of a conductive material such as gold, silver and copper. After electroless plating, foil bonding, etc., on the base material 11, it is formed by etching or the like. The electrode pitch and electrode width depend on the purpose of this electrostatic actuator,
Designed according to the application. Further, the plurality of strip electrodes 12
The three phases are separately connected. After that, each of the three phases is A
Phases, B phase and C phase, and the electrodes connected to A phase are 12
The electrode connected to the A and B phases is referred to as 12B, and the electrode connected to the C phase is referred to as 12C.
【0011】絶縁層13は、帯状電極12間相互の絶縁
を目的として電極表面、側面に塗布される。絶縁性の樹
脂、例えばフッ素系樹脂をコーティングしたり、ポリイ
ミドフィルムを接着したり等して形成される。厚さは任
意であるが、厚くし過ぎると搬送力が弱まり、逆に薄す
ぎると気中放電しやすくなるので、目的、用途に合わせ
た適切な設計が必要である。搬送媒体2は、用紙や紙幣
等の紙葉類や、キャッシュカードやプリペイドカード等
のカード類その他、本発明による媒体搬送装置によって
搬送されるすべての媒体を意味する。次に静電アクチュ
エータの動作について説明する。The insulating layer 13 is applied to the electrode surface and side surfaces for the purpose of insulating the strip electrodes 12 from each other. It is formed by coating an insulating resin, for example, a fluorine-based resin, or by bonding a polyimide film. The thickness is arbitrary, but if the thickness is too large, the conveying force is weakened. On the other hand, if the thickness is too small, air discharge easily occurs. Therefore, an appropriate design according to the purpose and application is required. The transport medium 2 means paper sheets such as paper and bills, cards such as cash cards and prepaid cards, and all other media transported by the medium transport apparatus according to the present invention. Next, the operation of the electrostatic actuator will be described.
【0012】(静電アクチュエータの動作)図3、図4
は、静電アクチュエータの動作説明図である。動作の理
解を容易にするために、一枚の搬送媒体2を細分化し
て、それぞれ2A1〜2B3と記す。また、複数の帯状
電極12を、3相に相別接続して、A相に接続された電
極を12A1〜12A4、B相に接続された電極を12
B1〜12B4、C相に接続された電極を12C1〜1
2C4と記す。更に静電気力を実線(吸引力)及び点線
(反発力)で表す。静電気力が搬送媒体2の搬送方向
(図上左から右方向)に働く時は、実線又は点線の上に
○印を付し、搬送方向と反対方向に働く時は、×印を付
す。(Operation of Electrostatic Actuator) FIGS. 3 and 4
FIG. 4 is an explanatory diagram of the operation of the electrostatic actuator. In order to facilitate understanding of the operation, one transport medium 2 is subdivided and described as 2A1 to 2B3, respectively. Further, the plurality of strip electrodes 12 are connected to each other in three phases, the electrodes connected to the A phase are 12A1 to 12A4, and the electrodes connected to the B phase are
B1 to 12B4, electrodes connected to the C phase are 12C1 to 1
Recorded as 2C4. Further, the electrostatic force is represented by a solid line (suction force) and a dotted line (repulsive force). When the electrostatic force acts in the transport direction of the transport medium 2 (from left to right in the figure), a circle is put on the solid line or the dotted line, and when it acts in the opposite direction to the transport direction, a cross is placed.
【0013】(a)は、初期分極の動作を示す。初期分
極とは、静電アクチュエータの動作の初期に、搬送媒体
2の表面に静電荷を発生させる動作である。A相に負電
圧、B相に正電圧、C相に正電圧を印加する。以後負電
圧をN、正電圧をP、0電圧をGで表し、(a)の状態
を(N、P、P)と記す。帯状電極12A1〜12C4
に、直流電圧(N、P、P)を印加すると、この直流電
圧によって、搬送媒体2の内部に誘電分極が生じ、媒体
表面に、対向する帯状電極12A1〜12Cと反対の静
電荷が発生する。搬送媒体2は絶縁体なので、この発生
した静電荷は、細分化した媒体2A1〜2B3にその極
性を維持したまま帯電する。(A) shows the operation of the initial polarization. The initial polarization is an operation of generating an electrostatic charge on the surface of the transport medium 2 at the beginning of the operation of the electrostatic actuator. A negative voltage is applied to the A phase, a positive voltage is applied to the B phase, and a positive voltage is applied to the C phase. Hereinafter, the negative voltage is represented by N, the positive voltage is represented by P, and the 0 voltage is represented by G, and the state (a) is described as (N, P, P). Strip electrodes 12A1 to 12C4
When a DC voltage (N, P, P) is applied to the medium, the DC voltage causes dielectric polarization inside the carrier medium 2 and generates an electrostatic charge on the surface of the medium opposite to the band electrodes 12A1 to 12C facing each other. . Since the transport medium 2 is an insulator, the generated electrostatic charges are charged on the subdivided media 2A1 to 2B3 while maintaining their polarities.
【0014】この状態で、細分化した媒体2A1〜2B
3に帯電した静電荷と、帯状電極12A1〜12C4上
に蓄積された静電荷との間に、静電気力は、以下のよう
に働く。細分化した媒体2A1〜2B3と各々対向する
帯状電極12A1〜12B3との間に強い吸引力が、搬
送媒体2を固定子1に吸着する方向に働く。同時に、細
分化した媒体2A1と帯状電極12B1の間、細分化し
た媒体2C1と帯状電極12B1及び12A2との間、
細分化した媒体2A2と帯状電極12B2の間、細分化
した媒体2C2と帯状電極12B2及び12A3との
間、細分化した媒体2A3と帯状電極12B3の間に、
搬送媒体2に対して、搬送方向と反対方向への力が働
く。In this state, the divided media 2A1 to 2B
The electrostatic force acts between the electrostatic charge charged to No. 3 and the electrostatic charge accumulated on the strip electrodes 12A1 to 12C4 as follows. A strong suction force acts between the subdivided media 2A1 to 2B3 and the opposing strip electrodes 12A1 to 12B3 in a direction to attract the transport medium 2 to the stator 1. At the same time, between the subdivided medium 2A1 and the strip electrodes 12B1, between the subdivided medium 2C1 and the strip electrodes 12B1 and 12A2,
Between the subdivided medium 2A2 and the strip electrode 12B2, between the subdivided medium 2C2 and the strip electrodes 12B2 and 12A3, between the subdivided medium 2A3 and the strip electrode 12B3,
A force acts on the transport medium 2 in a direction opposite to the transport direction.
【0015】更に、細分化した媒体2B1と帯状電極1
2A1及び12C1との間、細分化した媒体2A2と帯
状電極12C1の間、細分化した媒体2B2と帯状電極
12A2及び12C2との間、細分化した媒体2A3と
帯状電極12C2の間、細分化した媒体2B3と帯状電
極12A3の間に、搬送媒体2に対して、搬送方向への
力が働く。但し、既に記したように、搬送媒体2を固定
子1に吸着する方向に強い吸着力が働いているので、搬
送媒体2は、そのままの位置にとどまる。Further, the subdivided medium 2B1 and the strip electrode 1
2A1 and 12C1, between the subdivided medium 2A2 and the strip electrode 12C1, between the subdivided medium 2B2 and the strip electrodes 12A2 and 12C2, between the subdivided medium 2A3 and the strip electrode 12C2, A force in the transport direction acts on the transport medium 2 between 2B3 and the strip electrode 12A3. However, as described above, since the strong suction force acts in the direction in which the transport medium 2 is attracted to the stator 1, the transport medium 2 remains at the same position.
【0016】(b)帯状電極12A1〜12C4に、直
流電圧(P、N、G)を印加する。細分化した媒体2A
1〜2B3と各々対向する帯状電極12A1〜12B3
との間に強い反発力が、搬送媒体2を固定子1から浮か
す方向に働く。同時に、細分化した媒体2A1と帯状電
極12B1の間、細分化した媒体2C1と帯状電極12
B1及び12A2との間、細分化した媒体2A2と帯状
電極12B2の間、細分化した媒体2C2と帯状電極1
2B2及び12A3との間、細分化した媒体2A3と帯
状電極12B3の間に、搬送媒体2に対して、搬送方向
への力が働く。(B) DC voltages (P, N, G) are applied to the strip electrodes 12A1 to 12C4. Subdivided medium 2A
Strip-shaped electrodes 12A1 to 12B3 respectively facing 1 to 2B3
A strong repulsive force acts in the direction in which the transport medium 2 floats from the stator 1. At the same time, between the subdivided medium 2A1 and the strip electrode 12B1, between the subdivided medium 2C1 and the strip electrode 12B1.
B1 and 12A2, between the subdivided medium 2A2 and the strip electrode 12B2, and between the subdivided medium 2C2 and the strip electrode 1
2B2 and 12A3, and between the subdivided medium 2A3 and the strip electrode 12B3, a force acts on the transport medium 2 in the transport direction.
【0017】更に、細分化した媒体2B1と帯状電極1
2A1との間、細分化した媒体2B2と帯状電極12A
2との間、細分化した媒体2B3と帯状電極12A3の
間に、搬送媒体2に対して、搬送方向と反対方向への力
が働く。この状態では、搬送媒体2に対して、搬送方向
への力(○印)の個数が、搬送媒体2に対して、搬送方
向と反対方向への力(×印)よりも多いため、搬送媒体
2は、帯状電極12の1ピッチ移動して(c)に至る。
(c)の状態では、細分化した媒体2A1〜2B3と各
々対向する帯状電極12B1〜12C3との間に強い吸
引力が、搬送媒体2を固定子1に吸着する方向に働く。
従って、搬送媒体2に対して、搬送方向への力(○印)
の個数の大小にかかわらず、搬送媒体2は、そのままの
位置にとどまる。Further, the subdivided medium 2B1 and the strip electrode 1
2A1, the subdivided medium 2B2 and the strip electrode 12A
2, and between the subdivided medium 2B3 and the strip electrode 12A3, a force acts on the transport medium 2 in the direction opposite to the transport direction. In this state, the number of forces (indicated by a circle) in the transport direction with respect to the transport medium 2 is greater than the force (indicated by a cross) in the direction opposite to the transport direction with respect to the transport medium 2. No. 2 moves by one pitch of the strip electrode 12, and reaches (c).
In the state (c), a strong suction force acts between the subdivided media 2A1 to 2B3 and the opposing strip electrodes 12B1 to 12C3 in a direction to attract the transport medium 2 to the stator 1.
Therefore, the force in the transport direction on the transport medium 2 (marked by ○)
Irrespective of the magnitude of the number, the transport medium 2 remains at the same position.
【0018】次に、(d)に移り、帯状電極12A1〜
12C4に、直流電圧(G、P、N)を印加する。細分
化した媒体2A1〜2B3と各々対向する帯状電極12
B1〜12C3との間に強い反発力が、搬送媒体2を固
定子1から浮かす方向に働く。同時に、細分化した媒体
2A1と帯状電極12C1の間、細分化した媒体2C1
と帯状電極12C1及び12B2との間、細分化した媒
体2A2と帯状電極12C2の間、細分化した媒体2C
2と帯状電極12C2及び12B3との間、細分化した
媒体2A3と帯状電極12C3の間に、搬送媒体2に対
して、搬送方向への力が働く。Next, the process proceeds to (d), in which the strip electrodes 12A1 to 12A1
DC voltage (G, P, N) is applied to 12C4. The strip-shaped electrodes 12 respectively facing the subdivided media 2A1-2B3.
A strong repulsive force acts between B1 and 12C3 to lift the transport medium 2 from the stator 1. At the same time, between the subdivided medium 2A1 and the strip electrode 12C1, the subdivided medium 2C1
Between the strip-shaped electrodes 12C1 and 12B2, between the segmented medium 2A2 and the strip-shaped electrodes 12C2,
2 and the strip electrodes 12C2 and 12B3, and between the subdivided medium 2A3 and the strip electrodes 12C3, a force acts on the transport medium 2 in the transport direction.
【0019】更に、細分化した媒体2B1と帯状電極1
2B1との間、細分化した媒体2B2と帯状電極12B
2との間、細分化した媒体2B3と帯状電極12B3の
間に、搬送媒体2に対して、搬送方向と反対方向への力
が働く。この状態では、搬送媒体2に対して、搬送方向
への力(○印)の個数が、搬送媒体2に対して、搬送方
向と反対方向への力(×印)よりも多いため、搬送媒体
2は、帯状電極12の1ピッチ移動して(e)に至る。
(e)の状態では、細分化した媒体2A1〜2B3と各
々対向する帯状電極12C1〜12A4との間に強い吸
引力が、搬送媒体2を固定子1に吸着する方向に働く。
従って、搬送媒体2に対して、搬送方向への力(○印)
の個数の大小にかかわらず、搬送媒体2は、そのままの
位置にとどまる。Further, the subdivided medium 2B1 and the strip electrode 1
2B1, the divided medium 2B2 and the strip electrode 12B
2, a force in the direction opposite to the transport direction acts on the transport medium 2 between the subdivided medium 2B3 and the strip electrode 12B3. In this state, the number of forces (indicated by a circle) in the transport direction with respect to the transport medium 2 is greater than the force (indicated by a cross) in the direction opposite to the transport direction with respect to the transport medium 2. No. 2 moves by one pitch of the strip electrode 12 to reach (e).
In the state of (e), a strong suction force acts between the subdivided media 2A1 to 2B3 and the opposing strip electrodes 12C1 to 12A4 in a direction in which the transport medium 2 is attracted to the stator 1.
Therefore, the force in the transport direction on the transport medium 2 (marked by ○)
Irrespective of the magnitude of the number, the transport medium 2 remains at the same position.
【0020】次に、(f)に移り、帯状電極12A1〜
12C4に、直流電圧(N、G、P)を印加する。細分
化した媒体2A1〜2B3と各々対向する帯状電極12
C1〜12A4との間に強い反発力が、搬送媒体2を固
定子1から浮かす方向に働く。同時に、細分化した媒体
2A1と帯状電極12A2の間、細分化した媒体2C1
と帯状電極12A2及び12C2との間、細分化した媒
体2A2と帯状電極12A3の間、細分化した媒体2C
2と帯状電極12A3及び12C3との間、細分化した
媒体2A3と帯状電極12A4の間に、搬送媒体2に対
して、搬送方向への力が働く。Next, the process proceeds to (f), in which the strip electrodes 12A1 to 12A1
DC voltage (N, G, P) is applied to 12C4. The strip-shaped electrodes 12 respectively facing the subdivided media 2A1-2B3.
A strong repulsive force acts between C1 and 12A4 in a direction that causes the transport medium 2 to float from the stator 1. At the same time, between the subdivided medium 2A1 and the strip electrode 12A2, the subdivided medium 2C1
Between the strip-shaped electrodes 12A2 and 12C2, between the subdivided medium 2A2 and the strip-shaped electrodes 12A3,
2 and the strip electrodes 12A3 and 12C3, and between the subdivided medium 2A3 and the strip electrodes 12A4, a force acts on the transfer medium 2 in the transfer direction.
【0021】更に、細分化した媒体2B1と帯状電極1
2C1との間、細分化した媒体2B2と帯状電極12C
2との間、細分化した媒体2B3と帯状電極12C3の
間に、搬送媒体2に対して、搬送方向と反対方向への力
が働く。この状態では、搬送媒体2に対して、搬送方向
への力(○印)の個数が、搬送媒体2に対して、搬送方
向と反対方向への力(×印)よりも多いため、搬送媒体
2は、帯状電極12の1ピッチ移動する。以後同様の動
作を繰り返して搬送媒体2は、搬送方向へ移動する。以
上で静電アクチュエータの説明を終り、再び図1に戻っ
て本発明による媒体搬送装置について説明する。Further, the subdivided medium 2B1 and the strip electrode 1
2C1, the subdivided medium 2B2 and the strip electrode 12C
2, a force in the direction opposite to the transport direction acts on the transport medium 2 between the subdivided medium 2B3 and the strip electrode 12C3. In this state, the number of forces (indicated by a circle) in the transport direction with respect to the transport medium 2 is greater than the force (indicated by a cross) in the direction opposite to the transport direction with respect to the transport medium 2. 2 moves the strip-shaped electrode 12 by one pitch. Thereafter, the same operation is repeated, and the transport medium 2 moves in the transport direction. This is the end of the description of the electrostatic actuator. Returning to FIG. 1 again, the medium transport device according to the present invention will be described.
【0022】〈具体例1の構成〉図1(a)及び(b)
より、具体例1による媒体搬送装置は、固定子1と、搬
送媒体2と、電源5と、駆動部6と、制御部7とを備え
る。ここで搬送媒体2は、媒体搬送装置の付属物と解す
ることもできるが、本発明では、動作説明上構成要素と
して扱う。固定子1は、既に静電アクチュエータの構成
で説明したように、基材11と、帯状電極12と、絶縁
層13を備える。更に、具体例1では、上記構成要素の
他に、防湿層14を備える。基材11としてエポキシ系
樹脂を用いた。厚さ形状等の設計に自由度を持たせるた
めである。帯状電極12として、銅電極を用いて、電極
ピッチ0.4mm、電極幅0.1mmで形成した。絶縁
層13として、約40μmの厚さにソルダーレジストを
コーティングした。<Structure of Embodiment 1> FIGS. 1A and 1B
More specifically, the medium transport device according to the specific example 1 includes the stator 1, the transport medium 2, the power supply 5, the driving unit 6, and the control unit 7. Here, the transport medium 2 can be understood as an accessory of the medium transport apparatus. However, in the present invention, the transport medium 2 is treated as a component in the description of the operation. The stator 1 includes the base material 11, the strip electrodes 12, and the insulating layer 13, as described in the configuration of the electrostatic actuator. Further, the specific example 1 includes a moisture-proof layer 14 in addition to the above components. Epoxy resin was used as the base material 11. This is for giving a degree of freedom in designing the thickness and the like. The strip electrode 12 was formed using a copper electrode at an electrode pitch of 0.4 mm and an electrode width of 0.1 mm. As the insulating layer 13, a solder resist was coated to a thickness of about 40 μm.
【0023】防湿層14は、防湿処理を目的として固定
子1の表面にコーティングした防湿材である。フッ素系
樹脂、シリコン系樹脂、エポキシ系樹脂等、耐湿特性の
良好な樹脂が使用可能である。本具体例ではシリコン系
樹脂を用いた。防湿層14の形成時に、その表面に凸凹
が発生しないこと、更に内部に気泡がないこと等の注意
が必要であり、形成時に粘度の調整が求められる。そこ
で、シリコン系樹脂を主溶剤であるトルエンで希釈した
後、真空脱泡処理した。更に、予め40℃以上に加熱し
て十分乾燥させた固定子1に、低湿度雰囲気のもとで、
浸漬法によって約40μmの厚さに形成した。種々実験
の結果、浸漬法によって厚さ数十μmの膜をえるには、
シリコン系樹脂を主溶剤であるトルエンで70%から9
0%に希釈する必要があることを確認した。これらの操
作によって、表面に凸凹がなく、気泡を内封しない防湿
層の形成が可能であることを実験的に確認した。The moisture-proof layer 14 is a moisture-proof material coated on the surface of the stator 1 for the purpose of moisture-proof treatment. A resin having good moisture resistance such as a fluorine resin, a silicon resin, and an epoxy resin can be used. In this specific example, a silicon-based resin was used. At the time of forming the moisture-proof layer 14, it is necessary to pay attention that unevenness does not occur on the surface and that there are no bubbles inside, and it is necessary to adjust the viscosity at the time of formation. Therefore, the silicon-based resin was diluted with toluene as a main solvent, and then subjected to vacuum defoaming treatment. Further, the stator 1 previously heated to 40 ° C. or more and sufficiently dried is placed under a low humidity atmosphere.
It was formed to a thickness of about 40 μm by an immersion method. As a result of various experiments, to obtain a film with a thickness of several tens of μm by the immersion method,
70% to 9% of silicone resin with toluene as main solvent
It was determined that it was necessary to dilute to 0%. It was experimentally confirmed that by these operations, it was possible to form a moisture-proof layer having no irregularities on the surface and not enclosing bubbles.
【0024】搬送媒体2は、用紙や紙幣等の紙葉類や、
キュッシュカードやプリペイドカード等のカード類その
他、本発明による媒体搬送装置によって搬送されるすべ
ての媒体を意味する。電源5は、帯状電極12に印加す
る直流電圧を供給する電源であり正電圧と、負電圧と、
0電圧(接地電圧)の3出力を有している。駆動部6
は、電源5の出力を、A相、B相、C相のそれぞれに、
正電圧と、負電圧と、0電圧(接地電圧)を切り換えて
供給する部分である。制御部7は、駆動部6の相切り換
えを行う部分である。搬送方向、搬送速度等の制御をこ
の相切り換えによって行う。The transport medium 2 includes paper sheets such as paper and bills,
It refers to cards such as cash cards and prepaid cards, and all other media transported by the media transport device according to the present invention. The power supply 5 is a power supply that supplies a DC voltage to be applied to the strip-shaped electrode 12, and includes a positive voltage, a negative voltage,
It has three outputs of zero voltage (ground voltage). Drive unit 6
Changes the output of the power supply 5 to each of the A phase, the B phase, and the C phase,
This is a part that switches and supplies a positive voltage, a negative voltage, and a zero voltage (ground voltage). The control section 7 is a section that performs phase switching of the drive section 6. Control of the transport direction, transport speed, and the like is performed by this phase switching.
【0025】〈具体例1の動作〉図1(a)に示すよう
に、搬送媒体2を固定子1の上に載せて搬送を開始した
と仮定する。(b)は、以後の動作を説明するために固
定子1と搬送媒体2と、電源5と、駆動部6と、制御部
7の接続、及び位置関係を示した構成図である。搬送開
始時に制御部7の制御によって、駆動部6は、帯状電極
12に直流電圧(N、P、P)を印加する。<Operation of Embodiment 1> As shown in FIG. 1A, it is assumed that the transport medium 2 is placed on the stator 1 and the transport is started. (B) is a configuration diagram showing connections and positional relationships among the stator 1, the transport medium 2, the power supply 5, the drive unit 6, and the control unit 7 for explaining the subsequent operation. The drive unit 6 applies a DC voltage (N, P, P) to the strip electrode 12 under the control of the control unit 7 at the start of the transport.
【0026】この直流電圧(N、P、P)によって帯状
電極12に蓄積された電荷によって、その電極と対向す
る搬送媒体2の位置に、極性反対の静電荷が帯電する。
以後、制御部7の制御に基づいて、駆動部6が直流電圧
の極性を(P、N、G)、(G、P、N)、(N、G、
P)と切り換えるごとに、搬送媒体2は、帯状電極1ピ
ッチずつ搬送される。この動作は、既に静電アクチュエ
ータの動作で説明した動作と全く同様である。The charge accumulated on the strip electrode 12 by the DC voltage (N, P, P) charges the oppositely charged electrostatic charge at the position of the transport medium 2 facing the electrode.
Thereafter, based on the control of the control unit 7, the drive unit 6 changes the polarity of the DC voltage to (P, N, G), (G, P, N), (N, G,
Each time the mode is switched to P), the transport medium 2 is transported by one pitch of the strip electrode. This operation is exactly the same as the operation already described for the operation of the electrostatic actuator.
【0027】ここでは、直流電圧の極性変更を3段階の
搬送パターン(P、N、G)、(G、P、N)、(N、
G、P)に限って説明したが、このパターンにこだわる
必要はない。搬送媒体2の前進、後退、搬送速度等をも
含めて、搬送媒体装置の目的、用途に合わせて変更可能
である。In this case, the polarity of the DC voltage is changed in three stages of transport patterns (P, N, G), (G, P, N), (N,
G, P), but it is not necessary to stick to this pattern. The transfer medium 2 can be changed in accordance with the purpose and use of the transfer medium device, including the forward and backward movements of the transfer medium 2 and the transfer speed.
【0028】また、本具体例では、固定子1の上に搬送
媒体2を直接載せて搬送したが、絶縁体で構成した移動
子を備え、その上に搬送媒体2を載せて、移動子と一体
にして搬送することも可能である。これら搬送媒体2と
移動子を含めて搬送対象物と定義する。In this embodiment, the transport medium 2 is directly placed on the stator 1 and transported. However, a movable element made of an insulator is provided, and the transport medium 2 is placed on the movable element and It is also possible to carry them together. The object to be transported is defined as including the transport medium 2 and the moving element.
【0029】更に、本具体例では、基板状の直線搬送装
置を例にあげて説明した。しかし、固定子1をフィルム
状のフレキシブル基板等で制作することも可能である。
従って、湾曲状の曲線搬送路を備える媒体搬送装置も容
易に実現可能である。次に、本具体例による搬送媒体装
置の耐湿特性に関する実証実験について説明する。Further, in this embodiment, the explanation has been made by taking the example of the substrate-like linear transfer device. However, it is also possible to manufacture the stator 1 on a film-like flexible substrate or the like.
Therefore, a medium transport device having a curved curved transport path can be easily realized. Next, a description will be given of a demonstration experiment on the moisture resistance characteristics of the transport medium device according to this example.
【0030】(具体例1による搬送媒体装置の耐湿特性
に関する実証実験)実証実験(a)、固定子1(図1)
に防湿層14を備えた媒体搬送装置Aと、固定子1(図
1)に防湿層14を有しない媒体搬送装置Bを作成し
て、その双方を加湿前に、室内環境にて10分間連続往
復搬送動作をさせて動作状態を測定した。その結果、双
方全く異状なきことを確認した。実証実験(b)、上記
A、Bを40℃95%の恒温恒湿槽中に放置して1日経
過毎に、上記測定をした。その結果、Bは、3日経過後
に全く動作しなくなったが、Aは10日経過後も特性劣
化なきことを確認した。(Demonstration Experiment on Moisture Resistance Characteristics of Conveying Medium Device According to Specific Example 1) Demonstration experiment (a), stator 1 (FIG. 1)
A medium transport device A having a moisture barrier layer 14 and a media transport device B having no moisture barrier layer 14 in the stator 1 (FIG. 1) are continuously manufactured for 10 minutes in an indoor environment before humidification. The reciprocating conveyance operation was performed, and the operation state was measured. As a result, it was confirmed that both were completely unusual. In the verification experiment (b), the above A and B were left in a constant temperature and humidity chamber at 40 ° C. and 95%, and the above measurements were made every day. As a result, it was confirmed that B did not operate at all after 3 days, but A did not deteriorate after 10 days.
【0031】以上の判定基準として、到達率を重視し
た。到達率とは、実際に移動したピッチ数を、理論値で
除した値である。上記(a)でA、Bとも、95〜10
0%であったものが、上記(b)では、Bは、3日経過
後に20%以下に低下し、Aは10日経過後でも95%
以上を維持していた。As the above criterion, the arrival rate was emphasized. The arrival rate is a value obtained by dividing the number of pitches actually moved by a theoretical value. In the above (a), both A and B are 95 to 10
Although it was 0%, in the above (b), B decreased to 20% or less after 3 days, and A was 95% even after 10 days.
The above was maintained.
【0032】〈具体例1の効果〉具体例1による媒体搬
送装置は、固定子1に、シリコン系樹脂コーティングに
よる、防湿層14を備えることによって、以下の効果を
得た。 1.環境特性、特に耐湿特性が大きく改善された。従っ
て、梅雨時等、湿度の高い環境でも、媒体搬送力低下
が、無視できるようになった。 2.防湿層14の形成には、特殊な技術を必要としない
ので、媒体搬送装置の耐湿特性改善に要する、コストア
ップを最低限に抑えることができた。<Effect of Specific Example 1> The medium transport device according to the specific example 1 has the following effects by providing the stator 1 with the moisture-proof layer 14 made of a silicone resin coating. 1. Environmental properties, especially humidity resistance, have been greatly improved. Therefore, even in a humid environment such as during the rainy season, the decrease in the medium conveyance force can be ignored. 2. Since no special technique is required for forming the moisture-proof layer 14, the cost increase required for improving the moisture-resistant characteristics of the medium transport device can be minimized.
【0033】3.シリコン系樹脂特有の滑りの良さによ
って、固定子1上を搬送される搬送対象物の動作が緻密
になった。更に、防湿層14を、低湿度雰囲気のもと
で、予め溶剤で70%から90%に希釈し、真空脱泡し
たシリコン系樹脂に、予め40℃以上に加熱して乾燥さ
せてある固定子を浸漬して、形成することによって以下
の効果を得た。3. The movement of the object to be conveyed on the stator 1 has been improved due to the good sliding characteristic of the silicone resin. Further, the moisture-proof layer 14 is previously diluted to 70% to 90% with a solvent in a low-humidity atmosphere, and dried on a vacuum-defoamed silicone resin by heating to 40 ° C. or more in advance. The following effects were obtained by forming by dipping.
【0034】4.防湿層14の厚さを薄く均一に備える
ことができるため、防湿層14に起因する搬送力の低下
を無視することができた。 5.防湿層14を凸凹なく、形成でき、かつ、固定子表
面の気泡、キズ等にもシリコン樹脂がよく浸漬したた
め、接着強度の強い膜を形成することができた。4. Since the thickness of the moisture-proof layer 14 can be made thin and uniform, a decrease in the transport force due to the moisture-proof layer 14 could be ignored. 5. The moisture-proof layer 14 could be formed without unevenness, and the silicone resin was well immersed in bubbles, scratches, etc. on the stator surface, so that a film with high adhesive strength could be formed.
【0035】〈具体例2〉図5は、具体例2の構成図で
ある。図より、具体例2による、媒体搬送装置は、固定
子3と、搬送媒体2と、電源5と、駆動部6と、制御部
7とを備える。ここで搬送媒体2は、媒体搬送装置の付
属物と解することもできるが、本発明では、動作説明上
構成要素として扱う。具体例1と異なるのは、固定子3
のみであり、その他は全て具体例1と同様である。具体
例1との差異についてのみ説明する。<Embodiment 2> FIG. 5 is a block diagram of Embodiment 2. As shown in the figure, the medium transport device according to the second embodiment includes a stator 3, a transport medium 2, a power supply 5, a driving unit 6, and a control unit 7. Here, the transport medium 2 can be understood as an accessory of the medium transport apparatus. However, in the present invention, the transport medium 2 is treated as a component in the description of the operation. What is different from the specific example 1 is the stator 3
Only the others are the same as in the first embodiment. Only the differences from the specific example 1 will be described.
【0036】固定子3は、基材11と、帯状電極12
と、絶縁防湿層15を備える。具体例1による固定子1
との差異は、具体例1における絶縁層13(図1)に換
えて絶縁防湿層15を備える。更に、防湿層14(図
1)を有していない。その他は具体例1の固定子1と同
様である。絶縁防湿層15は、帯状電極12を備えた、
基材11の表面にコーティングした、絶縁材を兼ねた防
湿材である。フッ素系樹脂、シリコン系樹脂、エポキシ
系樹脂等、耐湿特性が良好で、かつ絶縁性の高い樹脂が
使用可能である。The stator 3 comprises a base material 11 and a strip electrode 12.
And an insulating moisture-proof layer 15. Stator 1 according to specific example 1
The difference is that the insulating moisture-proof layer 15 is provided instead of the insulating layer 13 (FIG. 1) in the first embodiment. Further, it does not have the moisture-proof layer 14 (FIG. 1). Others are the same as the stator 1 of the specific example 1. The insulating moisture-proof layer 15 includes the strip-shaped electrode 12.
It is a moisture-proof material that also serves as an insulating material, coated on the surface of the base material 11. Resins having good moisture resistance and high insulating properties, such as a fluorine-based resin, a silicon-based resin, and an epoxy-based resin, can be used.
【0037】本具体例ではシリコン系樹脂を用いた。絶
縁防湿層15の形成時に、その表面に凸凹が発生しない
こと、更に内部に気泡がないこと等の注意が必要であ
り、形成時に適度の粘性が求められる。そこで、シリコ
ン系樹脂を、主溶剤であるトルエンで希釈した後、真空
脱泡処理した。更に、十分乾燥させた、帯状電極12を
備えた基材11に、低湿度雰囲気のもとで浸漬法によっ
て約80μmの厚さに形成した。この時、基材11の帯
状電極12側のみならず、その裏側にもシリコン系樹脂
が付着しても問題はない。In this example, a silicon-based resin was used. At the time of forming the insulating and moisture-proof layer 15, it is necessary to pay attention that no irregularities are generated on the surface and that there are no bubbles inside, and a proper viscosity is required at the time of formation. Therefore, the silicon-based resin was diluted with toluene as a main solvent, and then subjected to vacuum defoaming treatment. Further, the substrate 11 having a sufficiently dried band electrode 12 was formed to a thickness of about 80 μm by a dipping method in a low humidity atmosphere. At this time, there is no problem even if the silicon-based resin adheres not only to the band-shaped electrode 12 side of the base material 11 but also to the back side thereof.
【0038】具体例2の動作は具体例1の動作と全く同
様である。更に、全く同様の特性を示すことを、以下に
記す実証実験でも確認した。次に、具体例2による搬送
媒体装置の耐湿特性に関する実証実験について説明す
る。The operation of the embodiment 2 is exactly the same as the operation of the embodiment 1. Further, it was confirmed by the demonstration experiment described below that the same characteristics were exhibited. Next, a verification experiment on the moisture resistance characteristics of the transport medium device according to the specific example 2 will be described.
【0039】(具体例2による搬送媒体装置の耐湿特性
に関する実証実験)実証実験(c)、固定子3(図5)
に絶縁防湿層15を備えた媒体搬送装置Cと、固定子1
に防湿層14を有しない媒体搬送装置D(実証実験a、
bの媒体搬送装置Bと同一構成)を作成して、その双方
を加湿前に室内環境にて10分間連続往復搬送動作をさ
せて動作状態を測定した。その結果双方全く異状なきこ
とを確認した。(Demonstration Experiment on Moisture Resistance Characteristics of Conveying Medium Device According to Specific Example 2) Demonstration experiment (c), stator 3 (FIG. 5)
Transport device C provided with an insulating and moisture-proof layer 15 on the stator 1
Transport device D having no moisture barrier 14 (Demonstration experiment a,
b), and both of them were subjected to a continuous reciprocating transport operation for 10 minutes in an indoor environment before humidification, and the operating state was measured. As a result, it was confirmed that both were completely unusual.
【0040】実証実験(d)、上記C、Dを40℃95
%の恒温恒湿槽中に放置して1日経過毎に、上記測定を
した。その結果、Dは、3日経過後に全く動作しなくな
ったが、Cは10日経過後も特性劣化なきことを確認し
た。Demonstration experiment (d), C and D at 40 ° C. 95
% In a constant temperature / humidity bath, and the above measurement was carried out every day. As a result, it was confirmed that D did not operate at all after 3 days, but C did not deteriorate after 10 days.
【0041】以上の判定項目として、到達率を重視し
た。到達率とは、実際に移動したピッチ数を、理論値で
除した値である。上記(c)でC、Dとも、95〜10
0%であったものが、上記(d)では、Dは、3日経過
後に20%以下に低下し、Cは10日経過後でも95%
以上を維持していた。実証実験(c)、実証実験(d)
は、実証実験(a)、実証実験(b)と全く同様の結果
を示していることを確認した。As the above judgment items, emphasis was placed on the arrival rate. The arrival rate is a value obtained by dividing the number of pitches actually moved by a theoretical value. In the above (c), both C and D are 95 to 10
Although it was 0%, in the above (d), D decreased to 20% or less after 3 days, and C was 95% even after 10 days.
The above was maintained. Demonstration experiment (c), demonstration experiment (d)
Confirmed that the results showed exactly the same as those of the verification experiment (a) and the verification experiment (b).
【0042】〈具体例2の効果〉具体例2による媒体搬
送装置は、固定子3に、シリコン系樹脂コーティングに
よる、絶縁防湿層15を備えることによって、以下の効
果を得た。 1.具体例1による、絶縁層13と、防湿層14を形成
する2つの工程を、絶縁防湿層15を形成する1つの工
程で兼ねることができるため、媒体搬送装置の耐湿特性
改善に要するコストをより一層ダウンすることが可能に
なった。 2.更に具体例1による効果を全て維持することが可能
である。<Effects of Specific Example 2> The medium transport device according to Specific Example 2 has the following effects by providing the stator 3 with the insulating and moisture-proof layer 15 made of a silicon-based resin coating. 1. Since the two steps of forming the insulating layer 13 and the moisture-proof layer 14 according to the specific example 1 can be combined with one step of forming the insulating and moisture-proof layer 15, the cost required for improving the moisture-proof characteristics of the medium transport device can be increased. It has become possible to further down. 2. Further, it is possible to maintain all the effects of the first embodiment.
【図1】具体例1の構成図である。FIG. 1 is a configuration diagram of a specific example 1.
【図2】静電アクチュエータの斜視図である。FIG. 2 is a perspective view of an electrostatic actuator.
【図3】静電アクチュエータの動作説明図(その1)で
ある。FIG. 3 is an operation explanatory view (part 1) of the electrostatic actuator.
【図4】静電アクチュエータの動作説明図(その2)で
ある。FIG. 4 is an operation explanatory view (part 2) of the electrostatic actuator.
【図5】具体例2の構成図である。FIG. 5 is a configuration diagram of a specific example 2.
1 固定子 2 搬送媒体 5 電源 6 駆動部 7 制御部 11 基材 12 帯状電極 13 絶縁層 14 防湿層 DESCRIPTION OF SYMBOLS 1 Stator 2 Conveying medium 5 Power supply 6 Drive part 7 Control part 11 Base material 12 Strip electrode 13 Insulation layer 14 Moisture-proof layer
Claims (3)
の静電気力を加えて、所定の方向へ搬送する固定子を備
え、 この固定子には、 基材上に形成した複数の帯状電極と、 この基材上で帯状電極を覆う絶縁層と、 前記基材と絶縁層全体を覆う防湿層を設けたことを特徴
とする媒体搬送装置。An object to be conveyed along a conveying path is provided with a stator for applying a predetermined electrostatic force to the object to be conveyed in a predetermined direction. The stator includes a plurality of strips formed on a base material. A medium transport device, comprising: an electrode; an insulating layer covering the strip electrode on the substrate; and a moisture-proof layer covering the entire substrate and the insulating layer.
の静電気力を加えて、所定の方向へ搬送する固定子を製
造する場合において、 基材上に複数の帯状電極を形成し、 この基材上で帯状電極を覆うように絶縁層を形成し、 乾燥処理をした後、低湿度雰囲気下40℃以上に加熱し
た状態で、 溶剤に対するシリコン系樹脂の割合を、70重量%以上
90重量%以下で希釈し、真空脱泡したものに浸漬し
て、防湿層を形成することを特徴とする媒体搬送装置の
製造方法。2. A method of manufacturing a stator, which applies a predetermined electrostatic force to an object to be conveyed along a conveyance path and conveys the object in a predetermined direction, comprises forming a plurality of strip-shaped electrodes on a base material; An insulating layer is formed on the base material so as to cover the strip electrodes, dried, and heated in a low-humidity atmosphere to 40 ° C. or more. A method for manufacturing a medium transporting device, comprising diluting at a concentration of not more than weight% and immersing in a vacuum degassed product to form a moisture-proof layer.
の静電気力を加えて、所定の方向へ搬送する固定子を備
え、 この固定子には、 基材上に形成した複数の帯状電極と、 この基材上の帯状電極と前記基材全体を覆う防湿層を設
けたことを特徴とする媒体搬送装置。3. A method according to claim 1, further comprising the step of applying a predetermined electrostatic force to an object to be conveyed along the conveying path to convey the object in a predetermined direction. The stator includes a plurality of strips formed on a base material. A medium transport device, comprising: an electrode; a strip electrode on the substrate; and a moisture-proof layer covering the entire substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26266497A JPH1179455A (en) | 1997-09-10 | 1997-09-10 | Medium carrying device and manufacture therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26266497A JPH1179455A (en) | 1997-09-10 | 1997-09-10 | Medium carrying device and manufacture therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1179455A true JPH1179455A (en) | 1999-03-23 |
Family
ID=17378910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26266497A Pending JPH1179455A (en) | 1997-09-10 | 1997-09-10 | Medium carrying device and manufacture therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1179455A (en) |
-
1997
- 1997-09-10 JP JP26266497A patent/JPH1179455A/en active Pending
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