JPH1186280A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH1186280A JPH1186280A JP25074597A JP25074597A JPH1186280A JP H1186280 A JPH1186280 A JP H1186280A JP 25074597 A JP25074597 A JP 25074597A JP 25074597 A JP25074597 A JP 25074597A JP H1186280 A JPH1186280 A JP H1186280A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- zone
- film
- texturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000007747 plating Methods 0.000 claims abstract description 8
- 230000001681 protective effect Effects 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000000314 lubricant Substances 0.000 claims abstract description 3
- 229910018104 Ni-P Inorganic materials 0.000 claims 1
- 229910018536 Ni—P Inorganic materials 0.000 claims 1
- 230000007704 transition Effects 0.000 abstract description 7
- 238000000206 photolithography Methods 0.000 abstract description 3
- 239000011651 chromium Substances 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、情報記録装置であ
る磁気ディスク装置に搭載される磁気記録媒体に関し、
特にＣＳＳ方式の固定磁気ディスク装置に搭載される磁
気記録媒体に関する。The present invention relates to a magnetic recording medium mounted on a magnetic disk device as an information recording device,
In particular, it relates to a magnetic recording medium mounted on a fixed magnetic disk device of the CSS system.
【０００２】[0002]
【従来の技術】磁気ディスク装置は、近年飛躍的に高密
度化が進展しているが、高密度化に伴って磁気記録媒体
と磁気記録ヘッドとのスペ−シング（磁気ヘッドの浮上
量）は小さくなる傾向にあり、このため、磁気記録媒体
はその表面の面粗度の平滑化が要求されてきている。し
かし、磁気記録媒体の表面の平滑化は、磁気記録媒体と
磁気記録ヘッドとの間で吸着現象が発生するという弊害
が生じるが、この吸着現象を回避するため、磁気記録媒
体表面には適当な粗さをテクスチャリング工法により施
しているのが一般的である。従来のテクスチャリング工
法には、研磨テ−プを用いるメカニカルテクスチャリン
グとレ−ザを使用するレ−ザテクスチャリングとがあ
り、各工法による磁気記録媒体（図７（ａ）および図８
（ａ）、図８（ｂ））の表面断面形状を各々図７（ｂ）
および図８（ｃ）に示す。また、磁気記録媒体全面に粗
さを施す全面テクスチャリングと、磁気ディスク装置の
電源停止時に磁気記録ヘッドが退避する位置となる磁気
記録媒体のＣＳＳ（Ｃｏｎｔａｃｔ Ｓｔａｒｔ Ｓｔｏ
ｐ）ゾ−ン９のみに粗さを施すゾ−ンテクスチャリング
とがあるが、ゾ−ンテクスチャリングをメカニカルテク
スチャリングとレ−ザテクスチャリングの各工法で磁気
記録媒体に施した場合の表面断面形状を図９（ａ）、図
９（ｂ）に各々示す。2. Description of the Related Art In recent years, the density of magnetic disk devices has been dramatically increased, but with the increase in density, the spacing between the magnetic recording medium and the magnetic recording head (the flying height of the magnetic head) has increased. Therefore, the magnetic recording medium is required to have a smooth surface roughness. However, the smoothing of the surface of the magnetic recording medium has a disadvantage that an adsorption phenomenon occurs between the magnetic recording medium and the magnetic recording head. Generally, the roughness is applied by a texturing method. Conventional texturing methods include mechanical texturing using a polishing tape and laser texturing using a laser. The magnetic recording media (FIGS.
FIGS. 7A and 7B show the surface cross-sectional shapes of FIGS.
And FIG. 8 (c). Further, the entire surface of the magnetic recording medium is roughened by texturing, and the CSS (Contact Start Start) of the magnetic recording medium, which is a position where the magnetic recording head is retracted when the power of the magnetic disk device is stopped.
p) There is zone texturing in which only the zone 9 is roughened, but the surface when the zone texturing is applied to the magnetic recording medium by the mechanical texturing method and the laser texturing method. The cross-sectional shapes are shown in FIGS. 9A and 9B, respectively.
【０００３】磁気ディスク装置の高密度化に対応して磁
気記録媒体の平滑化が要求されるため、磁気記録媒体の
デ−タゾ−ン１０は平滑にしＣＳＳゾ−ン９は吸着現象
を発生しない程度の面粗度とすることが望ましく、最近
では前記ゾ−ンテクスチャリングに関する様々な研究が
行われている。[0003] In order to increase the density of the magnetic disk drive, it is required to smooth the magnetic recording medium. Therefore, the data zone 10 of the magnetic recording medium is made smooth and the CSS zone 9 does not cause an adsorption phenomenon. The surface roughness is desirably of the order of magnitude, and various studies on the zone texturing have been conducted recently.
【０００４】図９において、デ−タゾ−ン１０と比べて
ＣＳＳゾ−ン９はその領域が非常に狭いため、メカニカ
ルテクスチャリングでは、ＣＳＳゾ−ン９のみにテクス
チャリングを施すことは難しく、トランジションゾ−ン
（粗さが変化していく領域）１１がデ−タゾ−ンにまで
入り込んでしまい、磁気ディスク装置のリ−ド／ライト
時の誤動作を生じるという欠点がある故、ゾ−ンテクス
チャリングにはレ−ザを用いたレ−ザテクスチャリング
が適用されるのが一般的である。In FIG. 9, the CSS zone 9 has a very small area compared to the data zone 10. Therefore, it is difficult to texturing only the CSS zone 9 by mechanical texturing. The transition zone (area where the roughness changes) 11 penetrates into the data zone, which causes a malfunction during read / write of the magnetic disk drive. Generally, laser texturing using a laser is applied to texturing.
【０００５】[0005]
【発明が解決しようとする課題】上述のレ−ザテクスチ
ャリングは、狭い領域のテクスチャリングを正確に設定
可能であり、且つ、遷移領域も発生しないためＣＳＳゾ
−ン９のみにテクスチャリングを施すゾ−ンテクスチャ
リングには適しているが、一方、次のような欠点があ
る。In the above-described laser texturing, texturing of a narrow area can be accurately set, and no transition area is generated. Therefore, texturing is performed only on the CSS zone 9. Although suitable for zone texturing, it has the following disadvantages.
【０００６】レ−ザテクスチャリングによるゾ−ンテク
スチャリングでは、メカニカルテクスチャリングで生じ
るトランジションゾ−ン１１のような突起高さに変化を
付けることが難しく、図９（ｂ）のようにクレ−タ状突
起１２となっているため、磁気記録ヘッドがデ−タゾ−
ン１０からＣＳＳゾ−ン９に移動するときに、その境界
で磁気記録ヘッドはクレ−タ状突起１２と衝突し、磁気
記録媒体と磁気記録ヘッドの損傷事故が発生するという
問題がある。[0006] In zone texturing by laser texturing, it is difficult to change the height of the projections like the transition zone 11 generated by mechanical texturing, and as shown in FIG. Since the magnetic recording head has a data projection,
When the magnetic recording head moves from the magnetic field 10 to the CSS zone 9, the magnetic recording head collides with the creature-shaped projection 12 at the boundary, and there is a problem that the magnetic recording medium and the magnetic recording head are damaged.
【０００７】本発明の目的は、デ−タゾ−ンに入り込む
トランジションゾ−ンをなくし、ＣＳＳゾ−ンのみにテ
クスチャリングを施すと共にデ−タゾ−ンとＣＳＳゾ−
ンとの境界において突起に起因する磁気記録ヘッドと磁
気記録媒体との衝突による損傷事故を皆無とする信頼性
の高い磁気記録媒体を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to eliminate a transition zone which enters a data zone, apply texturing only to a CSS zone, and provide a data zone and a CSS zone.
It is an object of the present invention to provide a highly reliable magnetic recording medium in which there is no damage accident due to a collision between the magnetic recording head and the magnetic recording medium caused by a projection at a boundary with the magnetic recording medium.
【０００８】[0008]
【課題を解決するための手段】本発明の磁気記録媒体
は、メッキ材料により被覆された基板上に形成される下
地膜と、前記下地膜上に形成される磁性膜と、前記磁性
膜上に形成される保護膜と、前記保護膜上に塗布される
潤滑剤とからなる磁気記録媒体に於いて、前記下地膜に
凹部形状の窪みを設けたことを特徴とする。According to the present invention, there is provided a magnetic recording medium comprising: a base film formed on a substrate covered with a plating material; a magnetic film formed on the base film; In a magnetic recording medium comprising a protective film to be formed and a lubricant applied on the protective film, a concave-shaped depression is provided in the base film.
【０００９】また、前記下地膜に凹部形状の窪みを設け
るテクスチャリング工法としてフォトソリグラフ法を適
用し、磁気記録媒体のＣＳＳゾ−ンのみに前記下地膜に
凹部形状の窪みを設け、前記メッキ材料としてＮｉ−Ｐ
（ニッケル−リン）メッキ、前記下地膜としてＣｒ（ク
ロム）膜としたことを特徴とする。A photolithography method is applied as a texturing method for forming a concave portion in the underlayer, and a concave portion is formed in the underlayer only in the CSS zone of the magnetic recording medium. Ni-P as material
(Ni-P) plating and a Cr (chromium) film as the underlayer.
【００１０】[0010]
【発明の実施の形態】本発明の実施の形態について、図
面を参照して説明する。Embodiments of the present invention will be described with reference to the drawings.
【００１１】図１および図２は本発明の磁気記録媒体１
の実施の形態を示す図である。図１は磁気記録媒体の構
成を示す概略断面図であり、図２（ａ）、図２（ｂ）は
各々テクスチャリングによる磁気記録媒体の形状を示す
概略平面図、概略断面図である。FIGS. 1 and 2 show a magnetic recording medium 1 according to the present invention.
It is a figure showing an embodiment. FIG. 1 is a schematic sectional view showing the configuration of a magnetic recording medium, and FIGS. 2A and 2B are a schematic plan view and a schematic sectional view showing the shape of the magnetic recording medium by texturing, respectively.
【００１２】図１に示すように、磁気記録媒体１は、Ｎ
ｉ−Ｐメッキ膜４で被覆されたＡｌ（アルミニウム）基
板３には下地膜５としてＣｒ膜が形成され、Ｃｒ膜の上
に磁性膜６、保護膜７、潤滑膜８が形成される構成とな
っている。As shown in FIG. 1, the magnetic recording medium 1
A Cr film is formed as a base film 5 on an Al (aluminum) substrate 3 covered with an i-P plating film 4, and a magnetic film 6, a protective film 7, and a lubricating film 8 are formed on the Cr film. Has become.
【００１３】図２を参照すると、Ｃｒ膜からなる下地膜
５をスパッタリングするときにフォトソリグラフ法によ
りゾ−ンテクスチャリングを施すことにより、磁気記録
媒体１は、デ−タゾ−ン１０は平滑でありＣＳＳゾ−ン
９領域のみに凹部形状の窪み２が設けられている。Referring to FIG. 2, the magnetic recording medium 1 has a smooth data zone 10 by applying zone texturing by photolithography when the underlayer 5 made of a Cr film is sputtered. The recess 2 is provided only in the region of the CSS zone 9.
【００１４】従って、磁気記録ヘッド（図示せず）の退
避位置であるＣＳＳゾ−ン９においては、上記凹部形状
の窪み２により磁気記録ヘッドと磁気記録媒体１との吸
着現象の発生がなくなると共に、ＣＳＳゾ−ン９にはデ
−タゾ−ン１０よりも高い突起部が無いため、磁気記録
ヘッドがデ−タゾ−ン１０とＣＳＳゾ−ン９との間をシ
−ク動作する際に突起部との衝突という現象は皆無とな
り、安定なシ−ク動作を行うことができ、磁気記録媒体
１と磁気記録ヘッドとの損傷事故が発生することがなく
なる。また、図２に示す如く、トランジションゾ−ン１
１は無いため、磁気ディスク装置のリ−ド／ライト動作
上の誤動作を生じることの無い信頼性の高い磁気記録媒
体１が実現できる。Therefore, in the CSS zone 9 where the magnetic recording head (not shown) is retracted, the above-mentioned concave-shaped recess 2 eliminates the occurrence of the adsorption phenomenon between the magnetic recording head and the magnetic recording medium 1. Since the CSS zone 9 has no protruding portion higher than the data zone 10, the magnetic recording head performs a seek operation between the data zone 10 and the CSS zone 9. The phenomenon of collision with the projections is eliminated, and a stable seek operation can be performed, so that damage to the magnetic recording medium 1 and the magnetic recording head does not occur. Also, as shown in FIG.
Since there is no magnetic recording medium 1, it is possible to realize a highly reliable magnetic recording medium 1 which does not cause a malfunction in a read / write operation of the magnetic disk device.
【００１５】次に本発明の磁気記録媒体１に関し、図３
に示す突起高さｈ、突起の幅ｗ、突起の間隔ｐをパラメ
−タとしたときの磁気記録媒体と磁気記録ヘッドとの吸
着、摩擦、摩耗深さの具体的実験結果を各々図４、図
５、図６に示す。図３中のｒは接触面積比を示し、ｒ＝
ｗ2 ／ｐ2 で定義付けている。なお本実験では５０％サ
イズのテ−パ−フラットタイプの磁気記録ヘッドを用い
ている。Next, the magnetic recording medium 1 of the present invention will be described with reference to FIG.
The experimental results of the adsorption, friction and wear depth between the magnetic recording medium and the magnetic recording head when the projection height h, the projection width w, and the projection interval p shown in FIG. These are shown in FIGS. R in FIG. 3 indicates a contact area ratio, and r =
are Teigizuke in w 2 / p 2. In this experiment, a 50% size taper flat type magnetic recording head was used.
【００１６】図４は突起の高さｈを変えたときの接触面
積比ｒと吸着との関係を示すが、突起の高さｈが小さ過
ぎると吸着気味となる結果を示し、図５は接触面積比ｒ
と摩擦との関係を示しており、接触面積比ｒの増加に伴
い摩擦も増加する結果を示し、図６ではＣＳＳを繰り返
し行った後の接触面積比ｒと摩耗深さとの関係を示す
が、接触面積比ｒが大きい程、摩耗深さは小さく突起の
高さは減少し難い結果を示している。FIG. 4 shows the relationship between the contact area ratio r and the adsorption when the height h of the projection is changed. If the height h of the projection is too small, the result tends to be slightly adsorbed. Area ratio r
Shows the relationship between the contact area ratio r and the wear depth, and FIG. 6 shows the relationship between the contact area ratio r after repeated CSS and the wear depth. As the contact area ratio r is larger, the wear depth is smaller and the height of the protrusion is less likely to decrease.
【００１７】以上の実験結果から、本願発明による磁気
記録媒体１のテクスチャリングの具体的な突起の高さｈ
は少なくとも１０ｎｍ以上とし接触面積比は２％以上と
することが望ましいという結果を得ている。From the above experimental results, the specific projection height h of the texturing of the magnetic recording medium 1 according to the present invention is shown.
At least 10 nm or more and the contact area ratio is preferably 2% or more.
【００１８】[0018]
【発明の効果】以上述べたように、本願発明は、フォト
ソリグラフ法によりゾ−ンテクスチャリングを施し、Ｃ
ＳＳゾ−ン領域のみに凹部形状の窪みを設けることによ
り、磁気記録ヘッドの退避位置であるＣＳＳゾ−ンにお
いては、上記凹部形状の窪みにより磁気記録ヘッドと磁
気記録媒体との吸着現象の発生がなくなると共に、ＣＳ
Ｓゾ−ンにはデ−タゾ−ンよりも高い突起部が無いた
め、磁気記録ヘッドがデ−タゾ−ンとＣＳＳゾ−ンとの
間をシ−ク動作する際に突起部との衝突という現象は皆
無となり、安定なシ−ク動作を行うことができ、磁気記
録媒体と磁気記録ヘッドとの損傷事故が発生することが
なくなり、且つ、トランジションゾ−ンが無いため、磁
気ディスク装置のリ−ド／ライト動作上の誤動作を生じ
ることの無い信頼性の高い磁気記録媒体を提供できると
いう効果がある。As described above, according to the present invention, zone texturing is performed by the photo-soligraph method, and C
By providing a concave-shaped depression only in the SS zone area, in the CSS zone where the magnetic recording head is retracted, the magnetic recording head is attracted to the magnetic recording medium due to the concave-shaped depression. Disappears and CS
Since the S zone does not have a projection higher than the data zone, the magnetic recording head collides with the projection when performing a seek operation between the data zone and the CSS zone. Phenomenon can be eliminated, stable seek operation can be performed, no damage accident occurs between the magnetic recording medium and the magnetic recording head, and there is no transition zone. There is an effect that it is possible to provide a highly reliable magnetic recording medium that does not cause a malfunction in a read / write operation.
【図１】本発明の磁気記録媒体の一実施形態を示す構成
概略断面図である。FIG. 1 is a schematic sectional view showing a configuration of an embodiment of a magnetic recording medium of the present invention.
【図２】図２（ａ）は本実施の形態の磁気記録媒体の表
面形状を示す概略平面図、図２（ｂ）は概略断面図であ
る。FIG. 2A is a schematic plan view showing a surface shape of a magnetic recording medium of the present embodiment, and FIG. 2B is a schematic sectional view.
【図３】本実施の形態の磁気記録媒体の実験を行った具
体的な突起の高さ、突起の幅、突起の間隔の各々のパラ
メ−タを示す図である。FIG. 3 is a diagram showing specific parameters of a height of a protrusion, a width of a protrusion, and a distance between protrusions in an experiment of the magnetic recording medium of the present embodiment.
【図４】本実施の形態の磁気記録媒体の突起高さを変え
たときの接触面積比と吸着との関係を示す実験結果の図
である。FIG. 4 is a diagram of an experimental result showing a relationship between a contact area ratio and suction when the protrusion height of the magnetic recording medium of the present embodiment is changed.
【図５】本実施の形態の磁気記録媒体の接触面積比と摩
擦との関係を示す実験結果の図である。FIG. 5 is a diagram of an experimental result showing a relationship between a contact area ratio and friction of the magnetic recording medium of the present embodiment.
【図６】本実施の形態の磁気記録媒体のＣＳＳを繰り返
し行った後の接触面積比と摩耗深さとの関係を示す実験
結果の図である。FIG. 6 is a diagram of an experimental result showing a relationship between a contact area ratio and a wear depth after repeatedly performing CSS of the magnetic recording medium of the present embodiment.
【図７】図７（ａ）は従来のメカニカルテクスチャリン
グによる磁気記録媒体の概略平面図を示し、図７（ｂ）
は図７（ａ）の一部拡大断面形状を示す概略図である。FIG. 7A is a schematic plan view of a magnetic recording medium obtained by conventional mechanical texturing, and FIG.
FIG. 8 is a schematic view showing a partially enlarged cross-sectional shape of FIG.
【図８】図８（ａ）は従来のレ−ザテクスチャリングに
よる磁気記録媒体の概略平面図を示し、図８（ｂ）は図
８（ａ）の一部拡大平面図、図８（ｃ）は図８（ｂ）の
正面図の概略図である。8 (a) is a schematic plan view of a magnetic recording medium by conventional laser texturing, FIG. 8 (b) is a partially enlarged plan view of FIG. 8 (a), and FIG. 9) is a schematic view of the front view of FIG.
【図９】図９（ａ）、図９（ｂ）は従来のゾ−ンテクス
チャリングにおけるメカニカルテクスチャリングとレ−
ザテクスチャリングの各工法による各々の磁気記録媒体
の表面断面形状の概略図である。FIGS. 9 (a) and 9 (b) show mechanical texturing and laying in conventional zone texturing.
It is the schematic of the surface cross section of each magnetic recording medium by each method of the texturing.
１ 磁気記録媒体 ２ 窪み ３ Ａｌ基板 ４ Ｎｉ−Ｐメッキ膜 ５ 下地膜 ６ 磁性膜 ７ 保護膜 ８ 潤滑膜 ９ ＣＳＳゾ−ン １０ デ−タゾ−ン １１ トランジションゾ−ン １２ クレ−タ状突起 ｈ 突起の高さ ｗ 突起の幅 ｐ 突起の間隔 ｒ 接触面積比 DESCRIPTION OF SYMBOLS 1 Magnetic recording medium 2 Depression 3 Al substrate 4 Ni-P plating film 5 Base film 6 Magnetic film 7 Protective film 8 Lubricating film 9 CSS zone 10 Data zone 11 Transition zone 12 Creter-shaped protrusion h Projection height w Projection width p Projection spacing r Contact area ratio
Claims (4)
成される下地膜と、前記下地膜上に形成される磁性膜
と、前記磁性膜上に形成される保護膜と、前記保護膜上
に塗布される潤滑剤とからなる磁気記録媒体に於いて、
前記下地膜に凹部形状の窪みを設けたことを特徴とする
磁気記録媒体。1. A base film formed on a substrate covered with a plating material, a magnetic film formed on the base film, a protective film formed on the magnetic film, In a magnetic recording medium comprising a lubricant to be applied,
A magnetic recording medium characterized in that a concave-shaped depression is provided in the base film.
クスチャリング工法としてフォトソリグラフ法によるこ
とを特徴とする請求項１に記載の磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein the texturing method for forming a concave portion in the base film is a photolithographic method.
下地膜に凹部形状の窪みを設けたことを特徴とする請求
項１に記載の磁気記録媒体。3. The magnetic recording medium according to claim 1, wherein a concave-shaped depression is provided in the underlayer only in the CSS zone of the magnetic recording medium.
前記下地膜としてＣｒ膜としたことを特徴とする請求項
１に記載の磁気記録媒体。4. A Ni-P plating as the plating material,
2. The magnetic recording medium according to claim 1, wherein the underlayer is a Cr film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25074597A JPH1186280A (en) | 1997-09-16 | 1997-09-16 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25074597A JPH1186280A (en) | 1997-09-16 | 1997-09-16 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1186280A true JPH1186280A (en) | 1999-03-30 |
Family
ID=17212415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25074597A Pending JPH1186280A (en) | 1997-09-16 | 1997-09-16 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1186280A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ306549B6 (en) * | 2005-01-27 | 2017-03-08 | Samick Precision Ind. Co., Ltd. | A method of producing linear bushing |
-
1997
- 1997-09-16 JP JP25074597A patent/JPH1186280A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CZ306549B6 (en) * | 2005-01-27 | 2017-03-08 | Samick Precision Ind. Co., Ltd. | A method of producing linear bushing |
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|---|---|---|---|
| A02 | Decision of refusal |
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