JPS4831878A - - Google Patents
Info
- Publication number
- JPS4831878A JPS4831878A JP47071364A JP7136472A JPS4831878A JP S4831878 A JPS4831878 A JP S4831878A JP 47071364 A JP47071364 A JP 47071364A JP 7136472 A JP7136472 A JP 7136472A JP S4831878 A JPS4831878 A JP S4831878A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Landscapes
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1217971A CH529446A (de) | 1971-08-19 | 1971-08-19 | Selbstausrichtendes Maskierverfahren, insbesondere für Halbleiteroberflächen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4831878A true JPS4831878A (de) | 1973-04-26 |
Family
ID=4380613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47071364A Pending JPS4831878A (de) | 1971-08-19 | 1972-07-18 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS4831878A (de) |
| CH (1) | CH529446A (de) |
| DE (1) | DE2234189A1 (de) |
| FR (1) | FR2149384A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1094517B (it) * | 1978-04-28 | 1985-08-02 | Componenti Elettronici Sgs Ate | Procedimento per la fabbricazione di un elemento resistivo filiforme per circuito integrato |
| DE3426421A1 (de) * | 1984-07-18 | 1986-01-23 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer halbleiteranordnung |
-
1971
- 1971-08-19 CH CH1217971A patent/CH529446A/de not_active IP Right Cessation
-
1972
- 1972-07-12 DE DE2234189A patent/DE2234189A1/de active Pending
- 1972-07-18 JP JP47071364A patent/JPS4831878A/ja active Pending
- 1972-08-03 FR FR7228653A patent/FR2149384A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2149384B1 (de) | 1974-07-12 |
| DE2234189A1 (de) | 1973-03-01 |
| FR2149384A1 (en) | 1973-03-30 |
| CH529446A (de) | 1972-10-15 |