JPS4855763U - - Google Patents
Info
- Publication number
- JPS4855763U JPS4855763U JP1972123899U JP12389972U JPS4855763U JP S4855763 U JPS4855763 U JP S4855763U JP 1972123899 U JP1972123899 U JP 1972123899U JP 12389972 U JP12389972 U JP 12389972U JP S4855763 U JPS4855763 U JP S4855763U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
Landscapes
- Casings For Electric Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972123899U JPS524841Y2 (cs) | 1972-10-26 | 1972-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972123899U JPS524841Y2 (cs) | 1972-10-26 | 1972-10-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4855763U true JPS4855763U (cs) | 1973-07-17 |
| JPS524841Y2 JPS524841Y2 (cs) | 1977-02-01 |
Family
ID=28034632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1972123899U Expired JPS524841Y2 (cs) | 1972-10-26 | 1972-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS524841Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5875850A (ja) * | 1981-10-31 | 1983-05-07 | Tanaka Denshi Kogyo Kk | Ｉｃパツケ−ジのシ−ル用カバ−及びその成形方法 |
-
1972
- 1972-10-26 JP JP1972123899U patent/JPS524841Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5875850A (ja) * | 1981-10-31 | 1983-05-07 | Tanaka Denshi Kogyo Kk | Ｉｃパツケ−ジのシ−ル用カバ−及びその成形方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS524841Y2 (cs) | 1977-02-01 |