JPS4859372A - - Google Patents
Info
- Publication number
- JPS4859372A JPS4859372A JP9531071A JP9531071A JPS4859372A JP S4859372 A JPS4859372 A JP S4859372A JP 9531071 A JP9531071 A JP 9531071A JP 9531071 A JP9531071 A JP 9531071A JP S4859372 A JPS4859372 A JP S4859372A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9531071A JPS4859372A (ja) | 1971-11-29 | 1971-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9531071A JPS4859372A (ja) | 1971-11-29 | 1971-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4859372A true JPS4859372A (ja) | 1973-08-20 |
Family
ID=14134171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9531071A Pending JPS4859372A (ja) | 1971-11-29 | 1971-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4859372A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS593206A (ja) * | 1982-06-29 | 1984-01-09 | Fujitsu Ltd | 微細パタ−ンの欠陥検出方法 |
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1971
- 1971-11-29 JP JP9531071A patent/JPS4859372A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS593206A (ja) * | 1982-06-29 | 1984-01-09 | Fujitsu Ltd | 微細パタ−ンの欠陥検出方法 |