JPS49127298A - - Google Patents

Info

Publication number: JPS49127298A
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP49029273A

Other languages

Japanese (ja)

Other versions

JPS5536070B2 (2

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1973-03-16

Filing date

1974-03-15

Publication date

1974-12-05

1974-03-15 Application filed filed Critical

1974-12-05 Publication of JPS49127298A publication Critical patent/JPS49127298A/ja

1980-09-18 Publication of JPS5536070B2 publication Critical patent/JPS5536070B2/ja

Status Expired legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7618—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
- H10P72/0418—Apparatus for fluid treatment for etching
- H10P72/0421—Apparatus for fluid treatment for etching for drying etching
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7621—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting two or more semiconductor substrates
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7624—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support

Landscapes

ing And Chemical Polishing (AREA)
Welding Or Cutting Using Electron Beams (AREA)
Drying Of Semiconductors (AREA)

JP2927374A 1973-03-16 1974-03-15 Expired JPS5536070B2 (2)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2313096A DE2313096A1 (de)	1973-03-16	1973-03-16	Probenhalterung fuer das aetzen von duennen schichten

Publications (2)

Publication Number	Publication Date
JPS49127298A true JPS49127298A (2)	1974-12-05
JPS5536070B2 JPS5536070B2 (2)	1980-09-18

Family

ID=5874944

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2927374A Expired JPS5536070B2 (2)	1973-03-16	1974-03-15

Country Status (4)

Country	Link
JP (1)	JPS5536070B2 (2)
DE (1)	DE2313096A1 (2)
FR (1)	FR2221815B1 (2)
GB (1)	GB1461464A (2)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2316723A1 (fr) *	1975-07-03	1977-01-28	Zaitseva Aita	Dispositif d'amenee de pieces en vue de leur traitement par un faisceau d'ions
GB2119236A (en) *	1982-03-26	1983-11-16	Philips Electronic Associated	Magazine and disc holders for supporting discs in the magazine
JPS61134378U (2) *	1985-02-13	1986-08-21
FR2701463B1 (fr) *	1993-02-15	1995-05-05	Alain Gentric	Dispositif de sélection pour amener un objet, par exemple un substrat, à une station de traitement.
DE102005021831A1 (de) *	2005-05-11	2006-11-23	Mühlbauer Ag	Vorrichtung zum Transportieren von Plättchen
AT510606B1 (de)	2011-02-09	2012-05-15	Leica Mikrosysteme Gmbh	Vorrichtung und verfahren zur probenpräparation

1973
- 1973-03-16 DE DE2313096A patent/DE2313096A1/de active Pending
1974
- 1974-03-14 GB GB1143674A patent/GB1461464A/en not_active Expired
- 1974-03-15 JP JP2927374A patent/JPS5536070B2/ja not_active Expired
- 1974-03-18 FR FR7409052A patent/FR2221815B1/fr not_active Expired

Also Published As

Publication number	Publication date
DE2313096A1 (de)	1974-09-26
JPS5536070B2 (2)	1980-09-18
FR2221815A1 (2)	1974-10-11
FR2221815B1 (2)	1978-06-09
GB1461464A (en)	1977-01-13

Publication	Publication Date	Title
AU476761B2 (2)	1976-09-30
AU465372B2 (2)	1975-09-25
AU474593B2 (2)	1976-07-29
AU474511B2 (2)	1976-07-22
AU471343B2 (2)	1976-04-15
AU465453B2 (2)	1975-09-25
AU465434B2 (2)	1975-09-25
AU450229B2 (2)	1974-07-04
AU476714B2 (2)	1976-09-30
FR2221815B1 (2)	1978-06-09
AU472848B2 (2)	1976-06-03
AU466283B2 (2)	1975-10-23
AU476696B2 (2)	1976-09-30
AU477823B2 (2)	1975-06-19
AU477824B2 (2)	1975-07-17
AU471461B2 (2)	1976-04-29
AU461342B2 (2)	1975-05-22
AU447540B2 (2)	1974-03-25
AR196382A1 (2)	1973-12-18
AU476873B1 (2)	1975-01-09
AR196212Q (2)	1973-12-10
AU1891376A (2)	1977-01-20
AR196123Q (2)	1973-11-30
CH1763773A4 (2)	1976-05-31
AU479420A (2)	1974-10-03