JPS5017574A - - Google Patents
Info
- Publication number
- JPS5017574A JPS5017574A JP6686473A JP6686473A JPS5017574A JP S5017574 A JPS5017574 A JP S5017574A JP 6686473 A JP6686473 A JP 6686473A JP 6686473 A JP6686473 A JP 6686473A JP S5017574 A JPS5017574 A JP S5017574A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686473A JPS5017574A (de) | 1973-06-15 | 1973-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686473A JPS5017574A (de) | 1973-06-15 | 1973-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5017574A true JPS5017574A (de) | 1975-02-24 |
Family
ID=13328137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6686473A Pending JPS5017574A (de) | 1973-06-15 | 1973-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5017574A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03123027A (ja) * | 1989-10-05 | 1991-05-24 | Toshiba Ceramics Co Ltd | シリコンウエハの清浄化方法 |
| JPH0620896A (ja) * | 1992-06-29 | 1994-01-28 | Kyushu Electron Metal Co Ltd | 半導体ウェーハの製造方法 |
-
1973
- 1973-06-15 JP JP6686473A patent/JPS5017574A/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| RCA REVIEW#N4=1970US * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03123027A (ja) * | 1989-10-05 | 1991-05-24 | Toshiba Ceramics Co Ltd | シリコンウエハの清浄化方法 |
| JPH0620896A (ja) * | 1992-06-29 | 1994-01-28 | Kyushu Electron Metal Co Ltd | 半導体ウェーハの製造方法 |