JPS5081981A - - Google Patents
Info
- Publication number
- JPS5081981A JPS5081981A JP13408473A JP13408473A JPS5081981A JP S5081981 A JPS5081981 A JP S5081981A JP 13408473 A JP13408473 A JP 13408473A JP 13408473 A JP13408473 A JP 13408473A JP S5081981 A JPS5081981 A JP S5081981A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13408473A JPS5081981A (ja) | 1973-11-26 | 1973-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13408473A JPS5081981A (ja) | 1973-11-26 | 1973-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5081981A true JPS5081981A (ja) | 1975-07-03 |
Family
ID=15120018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13408473A Pending JPS5081981A (ja) | 1973-11-26 | 1973-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5081981A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0356666A (ja) * | 1989-07-26 | 1991-03-12 | Kanebo Ltd | 粒子状物質の真空蒸着装置 |
-
1973
- 1973-11-26 JP JP13408473A patent/JPS5081981A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0356666A (ja) * | 1989-07-26 | 1991-03-12 | Kanebo Ltd | 粒子状物質の真空蒸着装置 |