JPS51111085A - Semiconductor manufucturing process - Google Patents

Semiconductor manufucturing process

Info

Publication number: JPS51111085A
Authority: JP; Japan
Prior art keywords: manufucturing; semiconductor; load; inverter; driver
Prior art date: 1975-03-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP50035595A

Other languages

English (en)

Inventor

Yoshio Tominaga

Eiichiro Sato

Hiroo Sakaba

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-03-26

Filing date

1975-03-26

Publication date

1976-10-01

1975-03-26 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1975-03-26 Priority to JP50035595A priority Critical patent/JPS51111085A/ja

1976-10-01 Publication of JPS51111085A publication Critical patent/JPS51111085A/ja

Status Pending legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
- H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]

Landscapes

Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

JP50035595A 1975-03-26 1975-03-26 Semiconductor manufucturing process Pending JPS51111085A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP50035595A JPS51111085A (en)	1975-03-26	1975-03-26	Semiconductor manufucturing process

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP50035595A JPS51111085A (en)	1975-03-26	1975-03-26	Semiconductor manufucturing process

Publications (1)

Publication Number	Publication Date
JPS51111085A true JPS51111085A (en)	1976-10-01

Family

ID=12446142

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP50035595A Pending JPS51111085A (en)	1975-03-26	1975-03-26	Semiconductor manufucturing process

Country Status (1)

Country	Link
JP (1)	JPS51111085A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4838984A (ja) *	1971-09-20	1973-06-08
US3873372A (en) *	1973-07-09	1975-03-25	Ibm	Method for producing improved transistor devices

1975
- 1975-03-26 JP JP50035595A patent/JPS51111085A/ja active Pending

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4838984A (ja) *	1971-09-20	1973-06-08
US3873372A (en) *	1973-07-09	1975-03-25	Ibm	Method for producing improved transistor devices

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