JPS51111086A - Manufacturing method of semi-conductor equipment - Google Patents

Manufacturing method of semi-conductor equipment

Info

Publication number
JPS51111086A
JPS51111086A JP50035574A JP3557475A JPS51111086A JP S51111086 A JPS51111086 A JP S51111086A JP 50035574 A JP50035574 A JP 50035574A JP 3557475 A JP3557475 A JP 3557475A JP S51111086 A JPS51111086 A JP S51111086A
Authority
JP
Japan
Prior art keywords
semi
manufacturing
conductor equipment
conductor
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50035574A
Other languages
Japanese (ja)
Inventor
Masaru Miyazaki
Masatoshi Utaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50035574A priority Critical patent/JPS51111086A/en
Publication of JPS51111086A publication Critical patent/JPS51111086A/en
Pending legal-status Critical Current

Links

Landscapes

  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)

Abstract

PURPOSE: To obtain low cost, highly reliable solid oscillation elements such as gun diode by mass production.
COPYRIGHT: (C)1976,JPO&Japio
JP50035574A 1975-03-26 1975-03-26 Manufacturing method of semi-conductor equipment Pending JPS51111086A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50035574A JPS51111086A (en) 1975-03-26 1975-03-26 Manufacturing method of semi-conductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50035574A JPS51111086A (en) 1975-03-26 1975-03-26 Manufacturing method of semi-conductor equipment

Publications (1)

Publication Number Publication Date
JPS51111086A true JPS51111086A (en) 1976-10-01

Family

ID=12445518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50035574A Pending JPS51111086A (en) 1975-03-26 1975-03-26 Manufacturing method of semi-conductor equipment

Country Status (1)

Country Link
JP (1) JPS51111086A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162484A (en) * 1978-06-13 1979-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS60149176A (en) * 1983-08-31 1985-08-06 テキサス　インスツルメンツ　インコ−ポレイテツド Microwave device
JPH01503423A (en) * 1987-05-14 1989-11-16 ヒユーズ・エアクラフト・カンパニー 2 terminal semiconductor diode device
JPH07326623A (en) * 1994-09-09 1995-12-12 Res Dev Corp Of Japan Method for manufacturing GaAs semiconductor diode

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162484A (en) * 1978-06-13 1979-12-24 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS60149176A (en) * 1983-08-31 1985-08-06 テキサス　インスツルメンツ　インコ−ポレイテツド Microwave device
JPS6372169A (en) * 1983-08-31 1988-04-01 テキサス　インスツルメンツ　インコ−ポレイテツド Microwave device
JPH01503423A (en) * 1987-05-14 1989-11-16 ヒユーズ・エアクラフト・カンパニー 2 terminal semiconductor diode device
JPH07326623A (en) * 1994-09-09 1995-12-12 Res Dev Corp Of Japan Method for manufacturing GaAs semiconductor diode

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