JPS51111993A - Apparatus for fabricating thin work as semiconductor or the like - Google Patents

Apparatus for fabricating thin work as semiconductor or the like

Info

Publication number
JPS51111993A
JPS51111993A JP50036033A JP3603375A JPS51111993A JP S51111993 A JPS51111993 A JP S51111993A JP 50036033 A JP50036033 A JP 50036033A JP 3603375 A JP3603375 A JP 3603375A JP S51111993 A JPS51111993 A JP S51111993A
Authority
JP
Japan
Prior art keywords
semiconductor
fabricating thin
thin work
work
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50036033A
Other languages
Japanese (ja)
Inventor
Ryosuke Tojo
Hatsuyuki Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Original Assignee
SUPIIDE FUAMU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK filed Critical SUPIIDE FUAMU KK
Priority to JP50036033A priority Critical patent/JPS51111993A/en
Publication of JPS51111993A publication Critical patent/JPS51111993A/en
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE:To provide a surface polishing machine enabling of avoiding crack of wafer, irregularity of thicknesses of the wafers after polishing.
JP50036033A 1975-03-27 1975-03-27 Apparatus for fabricating thin work as semiconductor or the like Pending JPS51111993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50036033A JPS51111993A (en) 1975-03-27 1975-03-27 Apparatus for fabricating thin work as semiconductor or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50036033A JPS51111993A (en) 1975-03-27 1975-03-27 Apparatus for fabricating thin work as semiconductor or the like

Publications (1)

Publication Number Publication Date
JPS51111993A true JPS51111993A (en) 1976-10-02

Family

ID=12458392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50036033A Pending JPS51111993A (en) 1975-03-27 1975-03-27 Apparatus for fabricating thin work as semiconductor or the like

Country Status (1)

Country Link
JP (1) JPS51111993A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157471A (en) * 1979-05-19 1980-12-08 Nippon Telegr & Teleph Corp <Ntt> Dish for bonding workpieces
JPS58137555A (en) * 1982-02-09 1983-08-16 Kyocera Corp Polishing board and polishing method using it
JPS59124564A (en) * 1982-12-28 1984-07-18 Kyocera Corp Waxing tool and wax application using it
JPS59167141U (en) * 1983-04-21 1984-11-09 旭化成株式会社 Bathroom equipment duct
JPH09129712A (en) * 1996-07-29 1997-05-16 Canon Inc Semiconductor manufacturing equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4899796A (en) * 1972-03-30 1973-12-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4899796A (en) * 1972-03-30 1973-12-17

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157471A (en) * 1979-05-19 1980-12-08 Nippon Telegr & Teleph Corp <Ntt> Dish for bonding workpieces
JPS58137555A (en) * 1982-02-09 1983-08-16 Kyocera Corp Polishing board and polishing method using it
JPS59124564A (en) * 1982-12-28 1984-07-18 Kyocera Corp Waxing tool and wax application using it
JPS59167141U (en) * 1983-04-21 1984-11-09 旭化成株式会社 Bathroom equipment duct
JPH09129712A (en) * 1996-07-29 1997-05-16 Canon Inc Semiconductor manufacturing equipment

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