JPS51112169A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS51112169A
JPS51112169A JP50032329A JP3232975A JPS51112169A JP S51112169 A JPS51112169 A JP S51112169A JP 50032329 A JP50032329 A JP 50032329A JP 3232975 A JP3232975 A JP 3232975A JP S51112169 A JPS51112169 A JP S51112169A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
sample
omni
emit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50032329A
Other languages
Japanese (ja)
Inventor
Tadao Watabe
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50032329A priority Critical patent/JPS51112169A/en
Publication of JPS51112169A publication Critical patent/JPS51112169A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable detecting omni-directionally reflective electrons being emit from a sample without affecting fine movements of the sample.
COPYRIGHT: (C)1976,JPO&Japio
JP50032329A 1975-03-19 1975-03-19 Scanning electron microscope Pending JPS51112169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50032329A JPS51112169A (en) 1975-03-19 1975-03-19 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50032329A JPS51112169A (en) 1975-03-19 1975-03-19 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS51112169A true JPS51112169A (en) 1976-10-04

Family

ID=12355890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50032329A Pending JPS51112169A (en) 1975-03-19 1975-03-19 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS51112169A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829180A (en) * 1971-08-17 1973-04-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829180A (en) * 1971-08-17 1973-04-18

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