JPS51117571A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS51117571A
JPS51117571A JP50042601A JP4260175A JPS51117571A JP S51117571 A JPS51117571 A JP S51117571A JP 50042601 A JP50042601 A JP 50042601A JP 4260175 A JP4260175 A JP 4260175A JP S51117571 A JPS51117571 A JP S51117571A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
scanning
microscope
obtain reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50042601A
Other languages
Japanese (ja)
Inventor
Toshiyuki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50042601A priority Critical patent/JPS51117571A/en
Publication of JPS51117571A publication Critical patent/JPS51117571A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain reflection electrons with great resolution by use of a scanning election microscope.
COPYRIGHT: (C)1976,JPO&Japio
JP50042601A 1975-04-08 1975-04-08 Scanning electron microscope Pending JPS51117571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50042601A JPS51117571A (en) 1975-04-08 1975-04-08 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50042601A JPS51117571A (en) 1975-04-08 1975-04-08 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS51117571A true JPS51117571A (en) 1976-10-15

Family

ID=12640561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50042601A Pending JPS51117571A (en) 1975-04-08 1975-04-08 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS51117571A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823160U (en) * 1981-07-24 1983-02-14 日本電子株式会社 electronic probe device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823160U (en) * 1981-07-24 1983-02-14 日本電子株式会社 electronic probe device

Similar Documents

Publication Publication Date Title
JPS538053A (en) Gas discharging panel
JPS52110563A (en) Hexagonal boride cathode
JPS51117571A (en) Scanning electron microscope
JPS5322357A (en) Beam blanking unit
JPS53105316A (en) Pick up unit
JPS51116671A (en) Scanning type electron microscope
JPS5219958A (en) Scanning electron microscope
JPS51120170A (en) Scanning type elestson microscope
JPS5349956A (en) Electron line resist
JPS51112169A (en) Scanning electron microscope
JPS51151062A (en) Electron tube
JPS5329612A (en) Pick up tube
JPS5335363A (en) Field radiation type cathode
JPS51124370A (en) Focus correction device for scanning type electron microscope
JPS5350614A (en) Pick up tube target
JPS5294062A (en) Sample-imagine device of electron scanning type
JPS51139775A (en) Method of forming projection electrode
JPS5289457A (en) Stereo scan type electron microscope
JPS53967A (en) Electron tube for forming charge pattern
CESARONI et al. Improvement of the resolving power of a TV system for pulsed images
JPS51142277A (en) Device for electron-beam exposure
JPS51126728A (en) Digital scanning device
JPS5213586A (en) Preparation of cellulose sulfate
JPS51139583A (en) Cathode ray tubes
JPS5330817A (en) Operating system of pickup tube