JPS51112183A - Diffraction pattern detector - Google Patents

Diffraction pattern detector

Info

Publication number
JPS51112183A
JPS51112183A JP49092528A JP9252874A JPS51112183A JP S51112183 A JPS51112183 A JP S51112183A JP 49092528 A JP49092528 A JP 49092528A JP 9252874 A JP9252874 A JP 9252874A JP S51112183 A JPS51112183 A JP S51112183A
Authority
JP
Japan
Prior art keywords
diffraction pattern
pattern detector
laser
detect
diffraction light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49092528A
Other languages
Japanese (ja)
Other versions
JPS5428118B2 (en
Inventor
Takahiko Inari
Mitsuhito Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP49092528A priority Critical patent/JPS51112183A/en
Publication of JPS51112183A publication Critical patent/JPS51112183A/en
Publication of JPS5428118B2 publication Critical patent/JPS5428118B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: In the pattern detector to inspect the pattern form using the diffraction light of laser, detect the shift of the O-dimension diffraction light at the end of the element by oblique incidence of laser and detect the place of the irradiation and the pattern form at the same time.
COPYRIGHT: (C)1976,JPO&Japio
JP49092528A 1974-08-12 1974-08-12 Diffraction pattern detector Granted JPS51112183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49092528A JPS51112183A (en) 1974-08-12 1974-08-12 Diffraction pattern detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49092528A JPS51112183A (en) 1974-08-12 1974-08-12 Diffraction pattern detector

Publications (2)

Publication Number Publication Date
JPS51112183A true JPS51112183A (en) 1976-10-04
JPS5428118B2 JPS5428118B2 (en) 1979-09-13

Family

ID=14056836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49092528A Granted JPS51112183A (en) 1974-08-12 1974-08-12 Diffraction pattern detector

Country Status (1)

Country Link
JP (1) JPS51112183A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5262083A (en) * 1975-11-17 1977-05-23 Hitachi Ltd Measurement of balance of revolving body
JPS53102776A (en) * 1977-02-21 1978-09-07 Mitsubishi Electric Corp Evaluating method of mirror polished face of metal and internal characteristics
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS59934A (en) * 1983-06-06 1984-01-06 Hitachi Ltd Device for inspection of defect
JPS60122359A (en) * 1984-07-04 1985-06-29 Hitachi Ltd optical inspection equipment
JPS60166809A (en) * 1984-02-10 1985-08-30 Toshiba Corp Defect inspecting device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5262083A (en) * 1975-11-17 1977-05-23 Hitachi Ltd Measurement of balance of revolving body
JPS53102776A (en) * 1977-02-21 1978-09-07 Mitsubishi Electric Corp Evaluating method of mirror polished face of metal and internal characteristics
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS59934A (en) * 1983-06-06 1984-01-06 Hitachi Ltd Device for inspection of defect
JPS60166809A (en) * 1984-02-10 1985-08-30 Toshiba Corp Defect inspecting device
JPS60122359A (en) * 1984-07-04 1985-06-29 Hitachi Ltd optical inspection equipment

Also Published As

Publication number Publication date
JPS5428118B2 (en) 1979-09-13

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