JPS51112193A - Processing method of semiconductor equipment - Google Patents

Processing method of semiconductor equipment

Info

Publication number
JPS51112193A
JPS51112193A JP50036589A JP3658975A JPS51112193A JP S51112193 A JPS51112193 A JP S51112193A JP 50036589 A JP50036589 A JP 50036589A JP 3658975 A JP3658975 A JP 3658975A JP S51112193 A JPS51112193 A JP S51112193A
Authority
JP
Japan
Prior art keywords
processing method
semiconductor equipment
make
polylayer
compose
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50036589A
Other languages
English (en)
Other versions
JPS5828734B2 (ja
Inventor
Eisuke Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50036589A priority Critical patent/JPS5828734B2/ja
Priority to US05/667,445 priority patent/US4069067A/en
Publication of JPS51112193A publication Critical patent/JPS51112193A/ja
Publication of JPS5828734B2 publication Critical patent/JPS5828734B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP50036589A 1975-03-20 1975-03-28 ハンドウタイソウチノセイゾウホウホウ Expired JPS5828734B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50036589A JPS5828734B2 (ja) 1975-03-28 1975-03-28 ハンドウタイソウチノセイゾウホウホウ
US05/667,445 US4069067A (en) 1975-03-20 1976-03-16 Method of making a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50036589A JPS5828734B2 (ja) 1975-03-28 1975-03-28 ハンドウタイソウチノセイゾウホウホウ

Publications (2)

Publication Number Publication Date
JPS51112193A true JPS51112193A (en) 1976-10-04
JPS5828734B2 JPS5828734B2 (ja) 1983-06-17

Family

ID=12473952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50036589A Expired JPS5828734B2 (ja) 1975-03-20 1975-03-28 ハンドウタイソウチノセイゾウホウホウ

Country Status (1)

Country Link
JP (1) JPS5828734B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478985A (en) * 1977-11-17 1979-06-23 Rca Corp Semiconductor and method of producing same
JPS5489594A (en) * 1977-12-27 1979-07-16 Nec Corp Manufacture for integrated circuit
JPS5534492A (en) * 1978-09-02 1980-03-11 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device having mis field effect type transistor and its manufacture
JPS59108317A (ja) * 1982-12-13 1984-06-22 Mitsubishi Electric Corp 電極配線形成法
JP2007327511A (ja) * 2006-06-06 2007-12-20 Nok Corp 防振マウント

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502472A (ja) * 1973-05-08 1975-01-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502472A (ja) * 1973-05-08 1975-01-11

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5478985A (en) * 1977-11-17 1979-06-23 Rca Corp Semiconductor and method of producing same
JPS5489594A (en) * 1977-12-27 1979-07-16 Nec Corp Manufacture for integrated circuit
JPS5534492A (en) * 1978-09-02 1980-03-11 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device having mis field effect type transistor and its manufacture
JPS59108317A (ja) * 1982-12-13 1984-06-22 Mitsubishi Electric Corp 電極配線形成法
JP2007327511A (ja) * 2006-06-06 2007-12-20 Nok Corp 防振マウント

Also Published As

Publication number Publication date
JPS5828734B2 (ja) 1983-06-17

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