JPS51111071A - Semiconductor equipment - Google Patents

Semiconductor equipment

Info

Publication number
JPS51111071A
JPS51111071A JP50035565A JP3556575A JPS51111071A JP S51111071 A JPS51111071 A JP S51111071A JP 50035565 A JP50035565 A JP 50035565A JP 3556575 A JP3556575 A JP 3556575A JP S51111071 A JPS51111071 A JP S51111071A
Authority
JP
Japan
Prior art keywords
semiconductor equipment
different depths
semiconductor
form simultaneously
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50035565A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Yoshifumi Kawamoto
Shigeru Nishimatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50035565A priority Critical patent/JPS51111071A/en
Publication of JPS51111071A publication Critical patent/JPS51111071A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To form simultaneously multiple etching holes of different depths.
COPYRIGHT: (C)1976,JPO&Japio
JP50035565A 1975-03-26 1975-03-26 Semiconductor equipment Pending JPS51111071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50035565A JPS51111071A (en) 1975-03-26 1975-03-26 Semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50035565A JPS51111071A (en) 1975-03-26 1975-03-26 Semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS51111071A true JPS51111071A (en) 1976-10-01

Family

ID=12445261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50035565A Pending JPS51111071A (en) 1975-03-26 1975-03-26 Semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS51111071A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113267A (en) * 1980-11-19 1982-07-14 Ibm Method of producing semiconductor device
JPS57148370A (en) * 1981-03-10 1982-09-13 Nec Corp Semiconductor device
JPS60113430A (en) * 1983-11-24 1985-06-19 Mitsubishi Electric Corp semiconductor equipment
JPS60160125A (en) * 1984-01-30 1985-08-21 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113267A (en) * 1980-11-19 1982-07-14 Ibm Method of producing semiconductor device
JPS57148370A (en) * 1981-03-10 1982-09-13 Nec Corp Semiconductor device
JPS60113430A (en) * 1983-11-24 1985-06-19 Mitsubishi Electric Corp semiconductor equipment
JPS60160125A (en) * 1984-01-30 1985-08-21 Mitsubishi Electric Corp Manufacture of semiconductor device

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