JPS51113294A - Carrier for lapping wafer - Google Patents
Carrier for lapping waferInfo
- Publication number
- JPS51113294A JPS51113294A JP50038920A JP3892075A JPS51113294A JP S51113294 A JPS51113294 A JP S51113294A JP 50038920 A JP50038920 A JP 50038920A JP 3892075 A JP3892075 A JP 3892075A JP S51113294 A JPS51113294 A JP S51113294A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- lapping wafer
- wafer
- lapping
- mum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
PURPOSE:To prevent straining of the vicinity of a nest by a driving force applied to a gear with a rigid carrier body to polish a wafer below 100 mum in high accuracy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50038920A JPS51113294A (en) | 1975-03-31 | 1975-03-31 | Carrier for lapping wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50038920A JPS51113294A (en) | 1975-03-31 | 1975-03-31 | Carrier for lapping wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51113294A true JPS51113294A (en) | 1976-10-06 |
Family
ID=12538641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50038920A Pending JPS51113294A (en) | 1975-03-31 | 1975-03-31 | Carrier for lapping wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51113294A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54131193A (en) * | 1978-04-04 | 1979-10-12 | Tooban Kougiyou Kk | Polishing method |
| JPS54131194A (en) * | 1978-04-04 | 1979-10-12 | Tooban Kougiyou Kk | Burr removing method |
| JPS5741164A (en) * | 1980-08-12 | 1982-03-08 | Citizen Watch Co Ltd | Dual carrier for lapping |
| JPS60161551U (en) * | 1984-04-06 | 1985-10-26 | 株式会社フジクラ | Work carrier for wrapping machine |
| JPH01163059U (en) * | 1989-03-14 | 1989-11-14 |
-
1975
- 1975-03-31 JP JP50038920A patent/JPS51113294A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54131193A (en) * | 1978-04-04 | 1979-10-12 | Tooban Kougiyou Kk | Polishing method |
| JPS54131194A (en) * | 1978-04-04 | 1979-10-12 | Tooban Kougiyou Kk | Burr removing method |
| JPS5741164A (en) * | 1980-08-12 | 1982-03-08 | Citizen Watch Co Ltd | Dual carrier for lapping |
| JPS60161551U (en) * | 1984-04-06 | 1985-10-26 | 株式会社フジクラ | Work carrier for wrapping machine |
| JPH01163059U (en) * | 1989-03-14 | 1989-11-14 |
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