JPS51113294A - Carrier for lapping wafer - Google Patents

Carrier for lapping wafer

Info

Publication number
JPS51113294A
JPS51113294A JP50038920A JP3892075A JPS51113294A JP S51113294 A JPS51113294 A JP S51113294A JP 50038920 A JP50038920 A JP 50038920A JP 3892075 A JP3892075 A JP 3892075A JP S51113294 A JPS51113294 A JP S51113294A
Authority
JP
Japan
Prior art keywords
carrier
lapping wafer
wafer
lapping
mum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50038920A
Other languages
Japanese (ja)
Inventor
Yasuhiro Ogura
Shigeo Makino
Hisao Wakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP50038920A priority Critical patent/JPS51113294A/en
Publication of JPS51113294A publication Critical patent/JPS51113294A/en
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE:To prevent straining of the vicinity of a nest by a driving force applied to a gear with a rigid carrier body to polish a wafer below 100 mum in high accuracy.
JP50038920A 1975-03-31 1975-03-31 Carrier for lapping wafer Pending JPS51113294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50038920A JPS51113294A (en) 1975-03-31 1975-03-31 Carrier for lapping wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50038920A JPS51113294A (en) 1975-03-31 1975-03-31 Carrier for lapping wafer

Publications (1)

Publication Number Publication Date
JPS51113294A true JPS51113294A (en) 1976-10-06

Family

ID=12538641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50038920A Pending JPS51113294A (en) 1975-03-31 1975-03-31 Carrier for lapping wafer

Country Status (1)

Country Link
JP (1) JPS51113294A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131193A (en) * 1978-04-04 1979-10-12 Tooban Kougiyou Kk Polishing method
JPS54131194A (en) * 1978-04-04 1979-10-12 Tooban Kougiyou Kk Burr removing method
JPS5741164A (en) * 1980-08-12 1982-03-08 Citizen Watch Co Ltd Dual carrier for lapping
JPS60161551U (en) * 1984-04-06 1985-10-26 株式会社フジクラ Work carrier for wrapping machine
JPH01163059U (en) * 1989-03-14 1989-11-14

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131193A (en) * 1978-04-04 1979-10-12 Tooban Kougiyou Kk Polishing method
JPS54131194A (en) * 1978-04-04 1979-10-12 Tooban Kougiyou Kk Burr removing method
JPS5741164A (en) * 1980-08-12 1982-03-08 Citizen Watch Co Ltd Dual carrier for lapping
JPS60161551U (en) * 1984-04-06 1985-10-26 株式会社フジクラ Work carrier for wrapping machine
JPH01163059U (en) * 1989-03-14 1989-11-14

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