JPS51114062A - Liquid phase growth and concerned unit - Google Patents

Liquid phase growth and concerned unit

Info

Publication number
JPS51114062A
JPS51114062A JP50038595A JP3859575A JPS51114062A JP S51114062 A JPS51114062 A JP S51114062A JP 50038595 A JP50038595 A JP 50038595A JP 3859575 A JP3859575 A JP 3859575A JP S51114062 A JPS51114062 A JP S51114062A
Authority
JP
Japan
Prior art keywords
liquid phase
phase growth
concerned unit
concerned
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50038595A
Other languages
Japanese (ja)
Other versions
JPS599515B2 (en
Inventor
Takao Fujiwara
Katsuji Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50038595A priority Critical patent/JPS599515B2/en
Publication of JPS51114062A publication Critical patent/JPS51114062A/en
Publication of JPS599515B2 publication Critical patent/JPS599515B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:Contact of solution phase with the base plate across slit during liquid phase growth by way of overcoming the effect of the oxides within the solution, and thereby giving rise to a growth layer of excellent crystallization characteristic.
JP50038595A 1975-04-01 1975-04-01 Liquid phase growth method and equipment Expired JPS599515B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50038595A JPS599515B2 (en) 1975-04-01 1975-04-01 Liquid phase growth method and equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50038595A JPS599515B2 (en) 1975-04-01 1975-04-01 Liquid phase growth method and equipment

Publications (2)

Publication Number Publication Date
JPS51114062A true JPS51114062A (en) 1976-10-07
JPS599515B2 JPS599515B2 (en) 1984-03-02

Family

ID=12529634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50038595A Expired JPS599515B2 (en) 1975-04-01 1975-04-01 Liquid phase growth method and equipment

Country Status (1)

Country Link
JP (1) JPS599515B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63232420A (en) * 1987-03-20 1988-09-28 Nec Corp Liquid phase epitaxial growth boat

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163745U (en) * 1984-10-02 1986-04-30

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934268A (en) * 1972-07-28 1974-03-29
JPS4994268A (en) * 1973-01-10 1974-09-06
JPS49110270A (en) * 1973-02-21 1974-10-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934268A (en) * 1972-07-28 1974-03-29
JPS4994268A (en) * 1973-01-10 1974-09-06
JPS49110270A (en) * 1973-02-21 1974-10-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63232420A (en) * 1987-03-20 1988-09-28 Nec Corp Liquid phase epitaxial growth boat

Also Published As

Publication number Publication date
JPS599515B2 (en) 1984-03-02

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