JPS51139774A - Liquid phase growing device - Google Patents

Liquid phase growing device

Info

Publication number
JPS51139774A
JPS51139774A JP6466275A JP6466275A JPS51139774A JP S51139774 A JPS51139774 A JP S51139774A JP 6466275 A JP6466275 A JP 6466275A JP 6466275 A JP6466275 A JP 6466275A JP S51139774 A JPS51139774 A JP S51139774A
Authority
JP
Japan
Prior art keywords
liquid phase
growing device
phase growing
solution
saturate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6466275A
Other languages
Japanese (ja)
Other versions
JPS5837687B2 (en
Inventor
Masaaki Ayabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP6466275A priority Critical patent/JPS5837687B2/en
Publication of JPS51139774A publication Critical patent/JPS51139774A/en
Publication of JPS5837687B2 publication Critical patent/JPS5837687B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To simply obtain an excellent epitaxial layer at low cost by applying a liquid phase growth process after bringing a solution into contact with a source to saturate the solution.
COPYRIGHT: (C)1976,JPO&Japio
JP6466275A 1975-05-28 1975-05-28 Liquid phase growth method Expired JPS5837687B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6466275A JPS5837687B2 (en) 1975-05-28 1975-05-28 Liquid phase growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6466275A JPS5837687B2 (en) 1975-05-28 1975-05-28 Liquid phase growth method

Publications (2)

Publication Number Publication Date
JPS51139774A true JPS51139774A (en) 1976-12-02
JPS5837687B2 JPS5837687B2 (en) 1983-08-18

Family

ID=13264637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6466275A Expired JPS5837687B2 (en) 1975-05-28 1975-05-28 Liquid phase growth method

Country Status (1)

Country Link
JP (1) JPS5837687B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252461U (en) * 1975-10-09 1977-04-14
JPS5478377A (en) * 1977-12-05 1979-06-22 Nec Corp Method and apparatus for growing semiconductor crystal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252461U (en) * 1975-10-09 1977-04-14
JPS5478377A (en) * 1977-12-05 1979-06-22 Nec Corp Method and apparatus for growing semiconductor crystal

Also Published As

Publication number Publication date
JPS5837687B2 (en) 1983-08-18

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