JPS51114142A - Method of manufacturing diffraction grid - Google Patents

Method of manufacturing diffraction grid

Info

Publication number
JPS51114142A
JPS51114142A JP3896875A JP3896875A JPS51114142A JP S51114142 A JPS51114142 A JP S51114142A JP 3896875 A JP3896875 A JP 3896875A JP 3896875 A JP3896875 A JP 3896875A JP S51114142 A JPS51114142 A JP S51114142A
Authority
JP
Japan
Prior art keywords
diffraction grid
manufacturing diffraction
manufacturing
manufacture
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3896875A
Other languages
English (en)
Inventor
Yutaka Uematsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3896875A priority Critical patent/JPS51114142A/ja
Publication of JPS51114142A publication Critical patent/JPS51114142A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP3896875A 1975-03-31 1975-03-31 Method of manufacturing diffraction grid Pending JPS51114142A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3896875A JPS51114142A (en) 1975-03-31 1975-03-31 Method of manufacturing diffraction grid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3896875A JPS51114142A (en) 1975-03-31 1975-03-31 Method of manufacturing diffraction grid

Publications (1)

Publication Number Publication Date
JPS51114142A true JPS51114142A (en) 1976-10-07

Family

ID=12539948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3896875A Pending JPS51114142A (en) 1975-03-31 1975-03-31 Method of manufacturing diffraction grid

Country Status (1)

Country Link
JP (1) JPS51114142A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5937520A (ja) * 1982-08-26 1984-03-01 Nec Corp 波長多重分波器
JPS60156004A (ja) * 1984-01-12 1985-08-16 Toppan Printing Co Ltd 回折格子露光装置
JPH04289411A (ja) * 1991-03-18 1992-10-14 Fujitsu Ltd 測長ｓｅｍ用基準サンプルの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5937520A (ja) * 1982-08-26 1984-03-01 Nec Corp 波長多重分波器
JPS60156004A (ja) * 1984-01-12 1985-08-16 Toppan Printing Co Ltd 回折格子露光装置
JPH04289411A (ja) * 1991-03-18 1992-10-14 Fujitsu Ltd 測長ｓｅｍ用基準サンプルの製造方法

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