JPS5111573A - Handotaisoshino seizohoho - Google Patents

Handotaisoshino seizohoho

Info

Publication number
JPS5111573A
JPS5111573A JP49082971A JP8297174A JPS5111573A JP S5111573 A JPS5111573 A JP S5111573A JP 49082971 A JP49082971 A JP 49082971A JP 8297174 A JP8297174 A JP 8297174A JP S5111573 A JPS5111573 A JP S5111573A
Authority
JP
Japan
Prior art keywords
handotaisoshino
seizohoho
handotaisoshino seizohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49082971A
Other languages
Japanese (ja)
Inventor
Masamitsu Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP49082971A priority Critical patent/JPS5111573A/en
Publication of JPS5111573A publication Critical patent/JPS5111573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP49082971A 1974-07-19 1974-07-19 Handotaisoshino seizohoho Pending JPS5111573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49082971A JPS5111573A (en) 1974-07-19 1974-07-19 Handotaisoshino seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49082971A JPS5111573A (en) 1974-07-19 1974-07-19 Handotaisoshino seizohoho

Publications (1)

Publication Number Publication Date
JPS5111573A true JPS5111573A (en) 1976-01-29

Family

ID=13789091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49082971A Pending JPS5111573A (en) 1974-07-19 1974-07-19 Handotaisoshino seizohoho

Country Status (1)

Country Link
JP (1) JPS5111573A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348676A (en) * 1976-10-15 1978-05-02 Handotai Kenkyu Shinkokai Method of forming pattern
JPS56145503A (en) * 1980-03-10 1981-11-12 Rca Corp Method of copying spiral groove pattern
JPS57162336A (en) * 1981-03-30 1982-10-06 Fujitsu Ltd Coating method of resist on wafer
JPS61143751A (en) * 1984-12-17 1986-07-01 Toshiba Corp Formation of thin film pattern
JPS6486520A (en) * 1987-11-04 1989-03-31 Ricoh Kk Exposure method
JPH0232526A (en) * 1988-07-22 1990-02-02 Mitsubishi Electric Corp Substrate periphery exposure device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348676A (en) * 1976-10-15 1978-05-02 Handotai Kenkyu Shinkokai Method of forming pattern
JPS56145503A (en) * 1980-03-10 1981-11-12 Rca Corp Method of copying spiral groove pattern
JPS57162336A (en) * 1981-03-30 1982-10-06 Fujitsu Ltd Coating method of resist on wafer
JPS61143751A (en) * 1984-12-17 1986-07-01 Toshiba Corp Formation of thin film pattern
JPS6486520A (en) * 1987-11-04 1989-03-31 Ricoh Kk Exposure method
JPH0232526A (en) * 1988-07-22 1990-02-02 Mitsubishi Electric Corp Substrate periphery exposure device

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