JPS51116126A - Glow discharge coating apparatus - Google Patents

Glow discharge coating apparatus

Info

Publication number
JPS51116126A
JPS51116126A JP4030275A JP4030275A JPS51116126A JP S51116126 A JPS51116126 A JP S51116126A JP 4030275 A JP4030275 A JP 4030275A JP 4030275 A JP4030275 A JP 4030275A JP S51116126 A JPS51116126 A JP S51116126A
Authority
JP
Japan
Prior art keywords
coating apparatus
glow discharge
discharge coating
glow
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4030275A
Other languages
Japanese (ja)
Other versions
JPS5420198B2 (en
Inventor
Naotatsu Asahi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4030275A priority Critical patent/JPS51116126A/en
Publication of JPS51116126A publication Critical patent/JPS51116126A/en
Publication of JPS5420198B2 publication Critical patent/JPS5420198B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4030275A 1975-04-04 1975-04-04 Glow discharge coating apparatus Granted JPS51116126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4030275A JPS51116126A (en) 1975-04-04 1975-04-04 Glow discharge coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4030275A JPS51116126A (en) 1975-04-04 1975-04-04 Glow discharge coating apparatus

Publications (2)

Publication Number Publication Date
JPS51116126A true JPS51116126A (en) 1976-10-13
JPS5420198B2 JPS5420198B2 (en) 1979-07-20

Family

ID=12576808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4030275A Granted JPS51116126A (en) 1975-04-04 1975-04-04 Glow discharge coating apparatus

Country Status (1)

Country Link
JP (1) JPS51116126A (en)

Also Published As

Publication number Publication date
JPS5420198B2 (en) 1979-07-20

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