JPS5420198B2 - - Google Patents
Info
- Publication number
- JPS5420198B2 JPS5420198B2 JP4030275A JP4030275A JPS5420198B2 JP S5420198 B2 JPS5420198 B2 JP S5420198B2 JP 4030275 A JP4030275 A JP 4030275A JP 4030275 A JP4030275 A JP 4030275A JP S5420198 B2 JPS5420198 B2 JP S5420198B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4030275A JPS51116126A (en) | 1975-04-04 | 1975-04-04 | Glow discharge coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4030275A JPS51116126A (en) | 1975-04-04 | 1975-04-04 | Glow discharge coating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51116126A JPS51116126A (en) | 1976-10-13 |
| JPS5420198B2 true JPS5420198B2 (en) | 1979-07-20 |
Family
ID=12576808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4030275A Granted JPS51116126A (en) | 1975-04-04 | 1975-04-04 | Glow discharge coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51116126A (en) |
-
1975
- 1975-04-04 JP JP4030275A patent/JPS51116126A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51116126A (en) | 1976-10-13 |