JPS51116497A - Electron beam irradiating device - Google Patents

Electron beam irradiating device

Info

Publication number
JPS51116497A
JPS51116497A JP50041505A JP4150575A JPS51116497A JP S51116497 A JPS51116497 A JP S51116497A JP 50041505 A JP50041505 A JP 50041505A JP 4150575 A JP4150575 A JP 4150575A JP S51116497 A JPS51116497 A JP S51116497A
Authority
JP
Japan
Prior art keywords
electron beam
beam irradiating
irradiating device
irradiated
correspondence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50041505A
Other languages
Japanese (ja)
Inventor
Kazuhiro Ueda
Kenji Machida
Toru Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50041505A priority Critical patent/JPS51116497A/en
Publication of JPS51116497A publication Critical patent/JPS51116497A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To provide an electron beam irradiating device which can effectively irradiate once by selecting a scanning frequency in correspondence to the speed of a work to be irradiated.
COPYRIGHT: (C)1976,JPO&Japio
JP50041505A 1975-04-04 1975-04-04 Electron beam irradiating device Pending JPS51116497A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50041505A JPS51116497A (en) 1975-04-04 1975-04-04 Electron beam irradiating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50041505A JPS51116497A (en) 1975-04-04 1975-04-04 Electron beam irradiating device

Publications (1)

Publication Number Publication Date
JPS51116497A true JPS51116497A (en) 1976-10-13

Family

ID=12610212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50041505A Pending JPS51116497A (en) 1975-04-04 1975-04-04 Electron beam irradiating device

Country Status (1)

Country Link
JP (1) JPS51116497A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203099A (en) * 1986-03-03 1987-09-07 日新ハイボルテ−ジ株式会社 Electron beam irradiator
JP2011251771A (en) * 2011-08-26 2011-12-15 Mitsubishi Heavy Ind Ltd Electron beam sterilization system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203099A (en) * 1986-03-03 1987-09-07 日新ハイボルテ−ジ株式会社 Electron beam irradiator
JP2011251771A (en) * 2011-08-26 2011-12-15 Mitsubishi Heavy Ind Ltd Electron beam sterilization system

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