JPS5316577A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS5316577A
JPS5316577A JP9018176A JP9018176A JPS5316577A JP S5316577 A JPS5316577 A JP S5316577A JP 9018176 A JP9018176 A JP 9018176A JP 9018176 A JP9018176 A JP 9018176A JP S5316577 A JPS5316577 A JP S5316577A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
sides
rectangle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9018176A
Other languages
Japanese (ja)
Inventor
Kuniyoshi Tanaka
Mamoru Nakasuji
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9018176A priority Critical patent/JPS5316577A/en
Publication of JPS5316577A publication Critical patent/JPS5316577A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To increase drawing speed by making the section of an electron beam to a rectangle of 0.5 or under in the ratio between short sides and long sides and scanning the short side direction with a saw tooth wave voltage.
COPYRIGHT: (C)1978,JPO&Japio
JP9018176A 1976-07-30 1976-07-30 Electron beam exposure apparatus Pending JPS5316577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9018176A JPS5316577A (en) 1976-07-30 1976-07-30 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9018176A JPS5316577A (en) 1976-07-30 1976-07-30 Electron beam exposure apparatus

Publications (1)

Publication Number Publication Date
JPS5316577A true JPS5316577A (en) 1978-02-15

Family

ID=13991308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9018176A Pending JPS5316577A (en) 1976-07-30 1976-07-30 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5316577A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548929A (en) * 1978-09-30 1980-04-08 Toshiba Corp Method of drawing by electron beam
JPS63173717A (en) * 1987-12-25 1988-07-18 Nippon Denso Co Ltd Refrigeration cycle controller for automobile

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548929A (en) * 1978-09-30 1980-04-08 Toshiba Corp Method of drawing by electron beam
JPS63173717A (en) * 1987-12-25 1988-07-18 Nippon Denso Co Ltd Refrigeration cycle controller for automobile

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