JPS51117573A - Manufacturing method of semiconductor - Google Patents

Manufacturing method of semiconductor

Info

Publication number
JPS51117573A
JPS51117573A JP4218375A JP4218375A JPS51117573A JP S51117573 A JPS51117573 A JP S51117573A JP 4218375 A JP4218375 A JP 4218375A JP 4218375 A JP4218375 A JP 4218375A JP S51117573 A JPS51117573 A JP S51117573A
Authority
JP
Japan
Prior art keywords
diffusion
semiconductor
manufacturing
arsenic
densely
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4218375A
Other languages
Japanese (ja)
Inventor
Yoshinobu Monma
Tadashi Kirisako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4218375A priority Critical patent/JPS51117573A/en
Publication of JPS51117573A publication Critical patent/JPS51117573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To diffuse arsenic very densely and deeply only on the designated area of the substrate by removing the arsenic glass film of the diffusion source after preliminary diffusion and further continuing the diffusion.
COPYRIGHT: (C)1976,JPO&Japio
JP4218375A 1975-04-09 1975-04-09 Manufacturing method of semiconductor Pending JPS51117573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4218375A JPS51117573A (en) 1975-04-09 1975-04-09 Manufacturing method of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4218375A JPS51117573A (en) 1975-04-09 1975-04-09 Manufacturing method of semiconductor

Publications (1)

Publication Number Publication Date
JPS51117573A true JPS51117573A (en) 1976-10-15

Family

ID=12628873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4218375A Pending JPS51117573A (en) 1975-04-09 1975-04-09 Manufacturing method of semiconductor

Country Status (1)

Country Link
JP (1) JPS51117573A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110036A (en) * 1981-12-23 1983-06-30 Matsushita Electronics Corp Diffusion of impurity

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3404451A (en) * 1966-06-29 1968-10-08 Fairchild Camera Instr Co Method of manufacturing semiconductor devices
JPS4973077A (en) * 1972-11-14 1974-07-15

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3404451A (en) * 1966-06-29 1968-10-08 Fairchild Camera Instr Co Method of manufacturing semiconductor devices
JPS4973077A (en) * 1972-11-14 1974-07-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110036A (en) * 1981-12-23 1983-06-30 Matsushita Electronics Corp Diffusion of impurity

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