JPS51117581A - Manufacturing method of mos type semiconductor equipment - Google Patents

Manufacturing method of mos type semiconductor equipment

Info

Publication number
JPS51117581A
JPS51117581A JP4249575A JP4249575A JPS51117581A JP S51117581 A JPS51117581 A JP S51117581A JP 4249575 A JP4249575 A JP 4249575A JP 4249575 A JP4249575 A JP 4249575A JP S51117581 A JPS51117581 A JP S51117581A
Authority
JP
Japan
Prior art keywords
manufacturing
type semiconductor
mos type
semiconductor equipment
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4249575A
Other languages
Japanese (ja)
Inventor
Tsutomu Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4249575A priority Critical patent/JPS51117581A/en
Publication of JPS51117581A publication Critical patent/JPS51117581A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve on the threshold voltage control of the Si gate MOS device.
COPYRIGHT: (C)1976,JPO&Japio
JP4249575A 1975-04-07 1975-04-07 Manufacturing method of mos type semiconductor equipment Pending JPS51117581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4249575A JPS51117581A (en) 1975-04-07 1975-04-07 Manufacturing method of mos type semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4249575A JPS51117581A (en) 1975-04-07 1975-04-07 Manufacturing method of mos type semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS51117581A true JPS51117581A (en) 1976-10-15

Family

ID=12637628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4249575A Pending JPS51117581A (en) 1975-04-07 1975-04-07 Manufacturing method of mos type semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS51117581A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377182A (en) * 1976-12-20 1978-07-08 Fujitsu Ltd Production of mos type semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377182A (en) * 1976-12-20 1978-07-08 Fujitsu Ltd Production of mos type semiconductor device

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