JPS51131280A - Dielectric insulation separation base manufacturing process - Google Patents

Dielectric insulation separation base manufacturing process

Info

Publication number
JPS51131280A
JPS51131280A JP50054585A JP5458575A JPS51131280A JP S51131280 A JPS51131280 A JP S51131280A JP 50054585 A JP50054585 A JP 50054585A JP 5458575 A JP5458575 A JP 5458575A JP S51131280 A JPS51131280 A JP S51131280A
Authority
JP
Japan
Prior art keywords
manufacturing process
dielectric insulation
insulation separation
separation base
base manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50054585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5411231B2 (2
Inventor
Akio Mimura
Takaya Suzuki
Setsuro Yagyu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50054585A priority Critical patent/JPS51131280A/ja
Priority to CA251,240A priority patent/CA1059647A/en
Priority to DE2620814A priority patent/DE2620814C3/de
Publication of JPS51131280A publication Critical patent/JPS51131280A/ja
Priority to US05/888,981 priority patent/US4173674A/en
Publication of JPS5411231B2 publication Critical patent/JPS5411231B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/019—Manufacture or treatment of isolation regions comprising dielectric materials using epitaxial passivated integrated circuit [EPIC] processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials

Landscapes

  • Element Separation (AREA)
JP50054585A 1975-05-12 1975-05-12 Dielectric insulation separation base manufacturing process Granted JPS51131280A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP50054585A JPS51131280A (en) 1975-05-12 1975-05-12 Dielectric insulation separation base manufacturing process
CA251,240A CA1059647A (en) 1975-05-12 1976-04-27 Method of preparing dielectric insulator separated substrate for semiconductor integrated circuits
DE2620814A DE2620814C3 (de) 1975-05-12 1976-05-11 Verfahren zur Herstellung einer dielektrisch isolierten Unterlage fur integrierte Halbleiterschaltungen
US05/888,981 US4173674A (en) 1975-05-12 1978-03-22 Dielectric insulator separated substrate for semiconductor integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50054585A JPS51131280A (en) 1975-05-12 1975-05-12 Dielectric insulation separation base manufacturing process

Publications (2)

Publication Number Publication Date
JPS51131280A true JPS51131280A (en) 1976-11-15
JPS5411231B2 JPS5411231B2 (2) 1979-05-12

Family

ID=12974774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50054585A Granted JPS51131280A (en) 1975-05-12 1975-05-12 Dielectric insulation separation base manufacturing process

Country Status (3)

Country Link
JP (1) JPS51131280A (2)
CA (1) CA1059647A (2)
DE (1) DE2620814C3 (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102044A (en) * 1980-12-17 1982-06-24 Hitachi Ltd Insulating isolation substrate
JPS61166039A (ja) * 1985-09-20 1986-07-26 Hitachi Ltd 誘電体絶縁分離基板

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55138229A (en) * 1979-04-13 1980-10-28 Hitachi Ltd Manufacture of dielectric material for insulation- separation substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102044A (en) * 1980-12-17 1982-06-24 Hitachi Ltd Insulating isolation substrate
JPS61166039A (ja) * 1985-09-20 1986-07-26 Hitachi Ltd 誘電体絶縁分離基板

Also Published As

Publication number Publication date
JPS5411231B2 (2) 1979-05-12
DE2620814A1 (de) 1976-11-25
DE2620814B2 (de) 1978-04-06
CA1059647A (en) 1979-07-31
DE2620814C3 (de) 1978-11-30

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