JPS51135474A - To analyze a semiconductor device - Google Patents

To analyze a semiconductor device

Info

Publication number
JPS51135474A
JPS51135474A JP50060676A JP6067675A JPS51135474A JP S51135474 A JPS51135474 A JP S51135474A JP 50060676 A JP50060676 A JP 50060676A JP 6067675 A JP6067675 A JP 6067675A JP S51135474 A JPS51135474 A JP S51135474A
Authority
JP
Japan
Prior art keywords
semiconductor device
analyze
sectional
accuracy
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50060676A
Other languages
Japanese (ja)
Other versions
JPS5820140B2 (en
Inventor
Hiroshi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50060676A priority Critical patent/JPS5820140B2/en
Publication of JPS51135474A publication Critical patent/JPS51135474A/en
Publication of JPS5820140B2 publication Critical patent/JPS5820140B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: Method of sectional analysis capable of detecting the sectional structure of a semiconductor device with accuracy.
COPYRIGHT: (C)1976,JPO&Japio
JP50060676A 1975-05-20 1975-05-20 Analysis method for semiconductor devices Expired JPS5820140B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50060676A JPS5820140B2 (en) 1975-05-20 1975-05-20 Analysis method for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50060676A JPS5820140B2 (en) 1975-05-20 1975-05-20 Analysis method for semiconductor devices

Publications (2)

Publication Number Publication Date
JPS51135474A true JPS51135474A (en) 1976-11-24
JPS5820140B2 JPS5820140B2 (en) 1983-04-21

Family

ID=13149151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50060676A Expired JPS5820140B2 (en) 1975-05-20 1975-05-20 Analysis method for semiconductor devices

Country Status (1)

Country Link
JP (1) JPS5820140B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931038A (en) * 1982-08-13 1984-02-18 Oki Electric Ind Co Ltd Structural analysis of semiconductor device
JPS5943275U (en) * 1982-09-14 1984-03-21 川崎重工業株式会社 Mounting structure of motorcycle side stand
JPS6064237A (en) * 1983-09-20 1985-04-12 Sumitomo Bakelite Co Ltd Method for measuring degree of infiltration of water

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931038A (en) * 1982-08-13 1984-02-18 Oki Electric Ind Co Ltd Structural analysis of semiconductor device
JPS5943275U (en) * 1982-09-14 1984-03-21 川崎重工業株式会社 Mounting structure of motorcycle side stand
JPS6064237A (en) * 1983-09-20 1985-04-12 Sumitomo Bakelite Co Ltd Method for measuring degree of infiltration of water

Also Published As

Publication number Publication date
JPS5820140B2 (en) 1983-04-21

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