JPS51137368A - Movable iris for electron microscope - Google Patents

Movable iris for electron microscope

Info

Publication number
JPS51137368A
JPS51137368A JP50060963A JP6096375A JPS51137368A JP S51137368 A JPS51137368 A JP S51137368A JP 50060963 A JP50060963 A JP 50060963A JP 6096375 A JP6096375 A JP 6096375A JP S51137368 A JPS51137368 A JP S51137368A
Authority
JP
Japan
Prior art keywords
electron microscope
iris
movable iris
movable
keep
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50060963A
Other languages
English (en)
Inventor
Hirobumi Hashimoto
Teiji Katsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50060963A priority Critical patent/JPS51137368A/ja
Publication of JPS51137368A publication Critical patent/JPS51137368A/ja
Pending legal-status Critical Current

Links

JP50060963A 1975-05-23 1975-05-23 Movable iris for electron microscope Pending JPS51137368A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50060963A JPS51137368A (en) 1975-05-23 1975-05-23 Movable iris for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50060963A JPS51137368A (en) 1975-05-23 1975-05-23 Movable iris for electron microscope

Publications (1)

Publication Number Publication Date
JPS51137368A true JPS51137368A (en) 1976-11-27

Family

ID=13157561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50060963A Pending JPS51137368A (en) 1975-05-23 1975-05-23 Movable iris for electron microscope

Country Status (1)

Country Link
JP (1) JPS51137368A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576559A (en) * 1978-12-01 1980-06-09 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam fine adjusting device
JPS5857064U (ja) * 1981-10-15 1983-04-18 株式会社明石製作所 電子線装置の対物レンズ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5576559A (en) * 1978-12-01 1980-06-09 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam fine adjusting device
JPS5857064U (ja) * 1981-10-15 1983-04-18 株式会社明石製作所 電子線装置の対物レンズ

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