JPS51140493A - Method of fabricating mis semiconductor device - Google Patents

Method of fabricating mis semiconductor device

Info

Publication number
JPS51140493A
JPS51140493A JP6429575A JP6429575A JPS51140493A JP S51140493 A JPS51140493 A JP S51140493A JP 6429575 A JP6429575 A JP 6429575A JP 6429575 A JP6429575 A JP 6429575A JP S51140493 A JPS51140493 A JP S51140493A
Authority
JP
Japan
Prior art keywords
semiconductor device
mis semiconductor
fabricating
fabricating mis
prevents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6429575A
Other languages
English (en)
Inventor
Katsuhiko Ito
Sumio Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6429575A priority Critical patent/JPS51140493A/ja
Publication of JPS51140493A publication Critical patent/JPS51140493A/ja
Pending legal-status Critical Current

Links

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  • Element Separation (AREA)
JP6429575A 1975-05-30 1975-05-30 Method of fabricating mis semiconductor device Pending JPS51140493A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6429575A JPS51140493A (en) 1975-05-30 1975-05-30 Method of fabricating mis semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6429575A JPS51140493A (en) 1975-05-30 1975-05-30 Method of fabricating mis semiconductor device

Publications (1)

Publication Number Publication Date
JPS51140493A true JPS51140493A (en) 1976-12-03

Family

ID=13254095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6429575A Pending JPS51140493A (en) 1975-05-30 1975-05-30 Method of fabricating mis semiconductor device

Country Status (1)

Country Link
JP (1) JPS51140493A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180145A (en) * 1981-04-30 1982-11-06 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57180145A (en) * 1981-04-30 1982-11-06 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor integrated circuit device

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