JPS5248469A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5248469A
JPS5248469A JP50124827A JP12482775A JPS5248469A JP S5248469 A JPS5248469 A JP S5248469A JP 50124827 A JP50124827 A JP 50124827A JP 12482775 A JP12482775 A JP 12482775A JP S5248469 A JPS5248469 A JP S5248469A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
serration
eliminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50124827A
Other languages
Japanese (ja)
Inventor
Masanori Fukumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50124827A priority Critical patent/JPS5248469A/en
Publication of JPS5248469A publication Critical patent/JPS5248469A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To eliminate serration of contact part and improve the yield of contact formation, by selective etching og the compound film of an oxide film and Mo film.
COPYRIGHT: (C)1977,JPO&Japio
JP50124827A 1975-10-15 1975-10-15 Process for production of semiconductor device Pending JPS5248469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50124827A JPS5248469A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50124827A JPS5248469A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5248469A true JPS5248469A (en) 1977-04-18

Family

ID=14895073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50124827A Pending JPS5248469A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5248469A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125671A (en) * 1979-03-22 1980-09-27 Shindengen Electric Mfg Co Ltd High withstand voltage semiconductor device
JPS5895856A (en) * 1981-12-02 1983-06-07 Matsushita Electronics Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125671A (en) * 1979-03-22 1980-09-27 Shindengen Electric Mfg Co Ltd High withstand voltage semiconductor device
JPS5895856A (en) * 1981-12-02 1983-06-07 Matsushita Electronics Corp Semiconductor device

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