JPS51142981A - Production method of semiconductor devices - Google Patents

Production method of semiconductor devices

Info

Publication number
JPS51142981A
JPS51142981A JP6655775A JP6655775A JPS51142981A JP S51142981 A JPS51142981 A JP S51142981A JP 6655775 A JP6655775 A JP 6655775A JP 6655775 A JP6655775 A JP 6655775A JP S51142981 A JPS51142981 A JP S51142981A
Authority
JP
Japan
Prior art keywords
semiconductor devices
production method
electrodes
remainers
leakage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6655775A
Other languages
Japanese (ja)
Inventor
Osamu Kasahara
Akihiro Tomosawa
Kensuke Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6655775A priority Critical patent/JPS51142981A/en
Publication of JPS51142981A publication Critical patent/JPS51142981A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To remove silicon remainers between electrodes, in order to make free of leakage and to avoid the appearance trouble in semiconductor devices utilizing aluminum electrodes containing silicon.
COPYRIGHT: (C)1976,JPO&Japio
JP6655775A 1975-06-04 1975-06-04 Production method of semiconductor devices Pending JPS51142981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6655775A JPS51142981A (en) 1975-06-04 1975-06-04 Production method of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6655775A JPS51142981A (en) 1975-06-04 1975-06-04 Production method of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS51142981A true JPS51142981A (en) 1976-12-08

Family

ID=13319328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6655775A Pending JPS51142981A (en) 1975-06-04 1975-06-04 Production method of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS51142981A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160043A (en) * 1980-05-13 1981-12-09 Mitsubishi Metal Corp Prevention from contamination for surface of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160043A (en) * 1980-05-13 1981-12-09 Mitsubishi Metal Corp Prevention from contamination for surface of semiconductor wafer

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