JPS51147278A - Manufacturing process of mis-type semiconductor device - Google Patents

Manufacturing process of mis-type semiconductor device

Info

Publication number
JPS51147278A
JPS51147278A JP7175975A JP7175975A JPS51147278A JP S51147278 A JPS51147278 A JP S51147278A JP 7175975 A JP7175975 A JP 7175975A JP 7175975 A JP7175975 A JP 7175975A JP S51147278 A JPS51147278 A JP S51147278A
Authority
JP
Japan
Prior art keywords
mis
semiconductor device
manufacturing process
type semiconductor
well
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7175975A
Other languages
Japanese (ja)
Inventor
Kenji Ichida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7175975A priority Critical patent/JPS51147278A/en
Publication of JPS51147278A publication Critical patent/JPS51147278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To provide, in MIST, an insulating domain between a Si substrate and a source as well as a drain by the use of selective vapor growth of a monocrystal as well as a multicrystal, and, formation and oxidation of porous domains, thereby eliminating the capacitance.
COPYRIGHT: (C)1976,JPO&Japio
JP7175975A 1975-06-13 1975-06-13 Manufacturing process of mis-type semiconductor device Pending JPS51147278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7175975A JPS51147278A (en) 1975-06-13 1975-06-13 Manufacturing process of mis-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7175975A JPS51147278A (en) 1975-06-13 1975-06-13 Manufacturing process of mis-type semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147278A true JPS51147278A (en) 1976-12-17

Family

ID=13469777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7175975A Pending JPS51147278A (en) 1975-06-13 1975-06-13 Manufacturing process of mis-type semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111178A (en) * 1979-02-20 1980-08-27 Mitsubishi Electric Corp Field-effect semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111178A (en) * 1979-02-20 1980-08-27 Mitsubishi Electric Corp Field-effect semiconductor device

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