JPS5368165A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5368165A
JPS5368165A JP14427576A JP14427576A JPS5368165A JP S5368165 A JPS5368165 A JP S5368165A JP 14427576 A JP14427576 A JP 14427576A JP 14427576 A JP14427576 A JP 14427576A JP S5368165 A JPS5368165 A JP S5368165A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
layer
concentration
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14427576A
Other languages
Japanese (ja)
Inventor
Kazutaka Kamitake
Masao Shimada
Yoshiharu Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14427576A priority Critical patent/JPS5368165A/en
Publication of JPS5368165A publication Critical patent/JPS5368165A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To produce a device of good high frequency characteristics and high reliability by laminating poly-Si of low concentration and high concentration on substrate surface, annealing said layer and forming the layer to a desired shape.
COPYRIGHT: (C)1978,JPO&Japio
JP14427576A 1976-11-30 1976-11-30 Production of semiconductor device Pending JPS5368165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14427576A JPS5368165A (en) 1976-11-30 1976-11-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14427576A JPS5368165A (en) 1976-11-30 1976-11-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5368165A true JPS5368165A (en) 1978-06-17

Family

ID=15358291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14427576A Pending JPS5368165A (en) 1976-11-30 1976-11-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5368165A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591176A (en) * 1978-12-29 1980-07-10 Ibm Method of fabricating semiconductor device
JPS61222125A (en) * 1985-03-27 1986-10-02 Rohm Co Ltd Manufacture of semiconductor device
JP2016514359A (en) * 2012-11-05 2016-05-19 ダイナロイ・エルエルシー Solution formulation and method for forming a substrate comprising an arsenic dopant

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591176A (en) * 1978-12-29 1980-07-10 Ibm Method of fabricating semiconductor device
JPS61222125A (en) * 1985-03-27 1986-10-02 Rohm Co Ltd Manufacture of semiconductor device
JP2016514359A (en) * 2012-11-05 2016-05-19 ダイナロイ・エルエルシー Solution formulation and method for forming a substrate comprising an arsenic dopant

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