JPS5123471B1 - - Google Patents

Info

Publication number
JPS5123471B1
JPS5123471B1 JP44024030A JP2403069A JPS5123471B1 JP S5123471 B1 JPS5123471 B1 JP S5123471B1 JP 44024030 A JP44024030 A JP 44024030A JP 2403069 A JP2403069 A JP 2403069A JP S5123471 B1 JPS5123471 B1 JP S5123471B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44024030A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP44024030A priority Critical patent/JPS5123471B1/ja
Priority to DE19702014509 priority patent/DE2014509C3/de
Priority to GB04772/70A priority patent/GB1279538A/en
Priority to FR7011132A priority patent/FR2040075A5/fr
Publication of JPS5123471B1 publication Critical patent/JPS5123471B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901Materials
    • H10P14/2902Materials being Group IVA materials
    • H10P14/2905Silicon, silicon germanium or germanium
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3421Arsenides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3424Deposited materials, e.g. layers characterised by the chemical composition being Group IIB-VIA materials

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP44024030A 1969-03-28 1969-03-28 Pending JPS5123471B1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP44024030A JPS5123471B1 (de) 1969-03-28 1969-03-28
DE19702014509 DE2014509C3 (de) 1969-03-28 1970-03-25 Verfahren zur Herstellung eines epitaktisch gewachsenen Films aus einer halbleitenden A tief III B tief V -Verbindung
GB04772/70A GB1279538A (en) 1969-03-28 1970-03-26 A manufacturing method of a monocrystal of a compound semiconductor
FR7011132A FR2040075A5 (de) 1969-03-28 1970-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44024030A JPS5123471B1 (de) 1969-03-28 1969-03-28

Publications (1)

Publication Number Publication Date
JPS5123471B1 true JPS5123471B1 (de) 1976-07-16

Family

ID=12127104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44024030A Pending JPS5123471B1 (de) 1969-03-28 1969-03-28

Country Status (3)

Country Link
JP (1) JPS5123471B1 (de)
FR (1) FR2040075A5 (de)
GB (1) GB1279538A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2314672A1 (de) * 1973-03-23 1974-10-03 Siemens Ag Verfahren zum heteroepitaktischen aufwachsen von iii-v-verbindungs-halbleitermaterial

Also Published As

Publication number Publication date
FR2040075A5 (de) 1971-01-15
DE2014509A1 (de) 1970-10-01
DE2014509B2 (de) 1972-10-26
GB1279538A (en) 1972-06-28

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