JPS5126472A - - Google Patents

Info

Publication number
JPS5126472A
JPS5126472A JP49099237A JP9923774A JPS5126472A JP S5126472 A JPS5126472 A JP S5126472A JP 49099237 A JP49099237 A JP 49099237A JP 9923774 A JP9923774 A JP 9923774A JP S5126472 A JPS5126472 A JP S5126472A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49099237A
Other versions
JPS5743975B2 (ja
Inventor
Hideo Kubota
Seiji Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP49099237A priority Critical patent/JPS5743975B2/ja
Publication of JPS5126472A publication Critical patent/JPS5126472A/ja
Publication of JPS5743975B2 publication Critical patent/JPS5743975B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP49099237A 1974-08-29 1974-08-29 Expired JPS5743975B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49099237A JPS5743975B2 (ja) 1974-08-29 1974-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49099237A JPS5743975B2 (ja) 1974-08-29 1974-08-29

Publications (2)

Publication Number Publication Date
JPS5126472A true JPS5126472A (ja) 1976-03-04
JPS5743975B2 JPS5743975B2 (ja) 1982-09-18

Family

ID=14242066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49099237A Expired JPS5743975B2 (ja) 1974-08-29 1974-08-29

Country Status (1)

Country Link
JP (1) JPS5743975B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267464A (ja) * 1986-05-15 1987-11-20 Nissin Electric Co Ltd イオン蒸着薄膜形成装置
JPH0436467A (ja) * 1990-05-31 1992-02-06 Shimadzu Corp 汚染防止ウェハ回転具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267464A (ja) * 1986-05-15 1987-11-20 Nissin Electric Co Ltd イオン蒸着薄膜形成装置
JPH0436467A (ja) * 1990-05-31 1992-02-06 Shimadzu Corp 汚染防止ウェハ回転具

Also Published As

Publication number Publication date
JPS5743975B2 (ja) 1982-09-18

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