JPS5160164A - Etsuchingusochi - Google Patents

Etsuchingusochi

Info

Publication number
JPS5160164A
JPS5160164A JP13363174A JP13363174A JPS5160164A JP S5160164 A JPS5160164 A JP S5160164A JP 13363174 A JP13363174 A JP 13363174A JP 13363174 A JP13363174 A JP 13363174A JP S5160164 A JPS5160164 A JP S5160164A
Authority
JP
Japan
Prior art keywords
usochi
etsuching
etsuching usochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13363174A
Other languages
English (en)
Inventor
Masato Fujita
Tsukasa Masuda
Shinichiro Myoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13363174A priority Critical patent/JPS5160164A/ja
Publication of JPS5160164A publication Critical patent/JPS5160164A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
JP13363174A 1974-11-22 1974-11-22 Etsuchingusochi Pending JPS5160164A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13363174A JPS5160164A (ja) 1974-11-22 1974-11-22 Etsuchingusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13363174A JPS5160164A (ja) 1974-11-22 1974-11-22 Etsuchingusochi

Publications (1)

Publication Number Publication Date
JPS5160164A true JPS5160164A (ja) 1976-05-25

Family

ID=15109323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13363174A Pending JPS5160164A (ja) 1974-11-22 1974-11-22 Etsuchingusochi

Country Status (1)

Country Link
JP (1) JPS5160164A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52152088U (ja) * 1976-05-14 1977-11-17
JPH0722381A (ja) * 1993-07-06 1995-01-24 Mitsubishi Materials Shilicon Corp 誘電体分離基板の製造装置と製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52152088U (ja) * 1976-05-14 1977-11-17
JPH0722381A (ja) * 1993-07-06 1995-01-24 Mitsubishi Materials Shilicon Corp 誘電体分離基板の製造装置と製造方法

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