JPS5160481A - - Google Patents

Info

Publication number
JPS5160481A
JPS5160481A JP49134302A JP13430274A JPS5160481A JP S5160481 A JPS5160481 A JP S5160481A JP 49134302 A JP49134302 A JP 49134302A JP 13430274 A JP13430274 A JP 13430274A JP S5160481 A JPS5160481 A JP S5160481A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49134302A
Other languages
Japanese (ja)
Other versions
JPS5732906B2 (cs
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13430274A priority Critical patent/JPS5732906B2/ja
Publication of JPS5160481A publication Critical patent/JPS5160481A/ja
Publication of JPS5732906B2 publication Critical patent/JPS5732906B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Weting (AREA)
JP13430274A 1974-11-25 1974-11-25 Expired JPS5732906B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13430274A JPS5732906B2 (cs) 1974-11-25 1974-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13430274A JPS5732906B2 (cs) 1974-11-25 1974-11-25

Publications (2)

Publication Number Publication Date
JPS5160481A true JPS5160481A (cs) 1976-05-26
JPS5732906B2 JPS5732906B2 (cs) 1982-07-14

Family

ID=15125096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13430274A Expired JPS5732906B2 (cs) 1974-11-25 1974-11-25

Country Status (1)

Country Link
JP (1) JPS5732906B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS556896A (en) * 1978-06-29 1980-01-18 Philips Nv Method of manufacturing semiconductor
JPS57180142A (en) * 1981-04-28 1982-11-06 Toshiba Corp Manufacture of semiconductor device
JPS62271450A (ja) * 1987-04-24 1987-11-25 Hitachi Ltd 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS556896A (en) * 1978-06-29 1980-01-18 Philips Nv Method of manufacturing semiconductor
JPS57180142A (en) * 1981-04-28 1982-11-06 Toshiba Corp Manufacture of semiconductor device
JPS62271450A (ja) * 1987-04-24 1987-11-25 Hitachi Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5732906B2 (cs) 1982-07-14

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