JPS5732906B2 - - Google Patents
Info
- Publication number
- JPS5732906B2 JPS5732906B2 JP13430274A JP13430274A JPS5732906B2 JP S5732906 B2 JPS5732906 B2 JP S5732906B2 JP 13430274 A JP13430274 A JP 13430274A JP 13430274 A JP13430274 A JP 13430274A JP S5732906 B2 JPS5732906 B2 JP S5732906B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13430274A JPS5732906B2 (cs) | 1974-11-25 | 1974-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13430274A JPS5732906B2 (cs) | 1974-11-25 | 1974-11-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5160481A JPS5160481A (cs) | 1976-05-26 |
| JPS5732906B2 true JPS5732906B2 (cs) | 1982-07-14 |
Family
ID=15125096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13430274A Expired JPS5732906B2 (cs) | 1974-11-25 | 1974-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5732906B2 (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2024504B (en) * | 1978-06-29 | 1982-10-20 | Philips Electronic Associated | Manufacture of integrated circuits |
| JPS57180142A (en) * | 1981-04-28 | 1982-11-06 | Toshiba Corp | Manufacture of semiconductor device |
| JPS62271450A (ja) * | 1987-04-24 | 1987-11-25 | Hitachi Ltd | 半導体装置の製造方法 |
-
1974
- 1974-11-25 JP JP13430274A patent/JPS5732906B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5160481A (cs) | 1976-05-26 |