JPS5160577A - - Google Patents
Info
- Publication number
- JPS5160577A JPS5160577A JP49135688A JP13568874A JPS5160577A JP S5160577 A JPS5160577 A JP S5160577A JP 49135688 A JP49135688 A JP 49135688A JP 13568874 A JP13568874 A JP 13568874A JP S5160577 A JPS5160577 A JP S5160577A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49135688A JPS5160577A (ja) | 1974-11-25 | 1974-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49135688A JPS5160577A (ja) | 1974-11-25 | 1974-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5160577A true JPS5160577A (ja) | 1976-05-26 |
Family
ID=15157577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49135688A Pending JPS5160577A (ja) | 1974-11-25 | 1974-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5160577A (ja) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142956A (ja) * | 1984-08-06 | 1986-03-01 | Nec Corp | 圧力センサ |
| JPS61172378A (ja) * | 1985-01-28 | 1986-08-04 | Nec Corp | 圧力センサ |
| JPH02256278A (ja) * | 1987-04-10 | 1990-10-17 | Mitsubishi Electric Corp | 半導体圧力センサ |
| JPH04184232A (ja) * | 1990-11-20 | 1992-07-01 | Mitsubishi Electric Corp | 半導体圧力センサ |
| JPH06167351A (ja) * | 1991-06-27 | 1994-06-14 | Dresser Ind Inc | 変化器の非直線性の制御法 |
| JPH08293617A (ja) * | 1995-04-24 | 1996-11-05 | Nippondenso Co Ltd | 半導体装置およびその製造方法 |
| JPH08334424A (ja) * | 1995-06-07 | 1996-12-17 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
| JP2005043351A (ja) * | 2003-07-04 | 2005-02-17 | Robert Bosch Gmbh | マイクロマシニング型の圧力センサ |
| JP2009027733A (ja) * | 2008-08-25 | 2009-02-05 | Yamaha Corp | コンデンサマイクロホンの製造方法 |
| US7932117B2 (en) | 2006-07-10 | 2011-04-26 | Yamaha Corporation | Pressure sensor and manufacturing method therefor |
-
1974
- 1974-11-25 JP JP49135688A patent/JPS5160577A/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142956A (ja) * | 1984-08-06 | 1986-03-01 | Nec Corp | 圧力センサ |
| JPS61172378A (ja) * | 1985-01-28 | 1986-08-04 | Nec Corp | 圧力センサ |
| JPH02256278A (ja) * | 1987-04-10 | 1990-10-17 | Mitsubishi Electric Corp | 半導体圧力センサ |
| JPH04184232A (ja) * | 1990-11-20 | 1992-07-01 | Mitsubishi Electric Corp | 半導体圧力センサ |
| JPH06167351A (ja) * | 1991-06-27 | 1994-06-14 | Dresser Ind Inc | 変化器の非直線性の制御法 |
| JPH08293617A (ja) * | 1995-04-24 | 1996-11-05 | Nippondenso Co Ltd | 半導体装置およびその製造方法 |
| JPH08334424A (ja) * | 1995-06-07 | 1996-12-17 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
| JP2005043351A (ja) * | 2003-07-04 | 2005-02-17 | Robert Bosch Gmbh | マイクロマシニング型の圧力センサ |
| US7932117B2 (en) | 2006-07-10 | 2011-04-26 | Yamaha Corporation | Pressure sensor and manufacturing method therefor |
| JP2009027733A (ja) * | 2008-08-25 | 2009-02-05 | Yamaha Corp | コンデンサマイクロホンの製造方法 |